Micro-opto-electro-mechanical system (MOEMS)

• US 20020168144A1
• Filed: 04/30/2001
• Published: 11/14/2002
• Est. Priority Date: 04/30/2001
• Status: Active Grant

• Current Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Original Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Inventors: Kubby, Joel A., Chen, Jingkuang, Sun, Decai
• Granted Patent: US 6,580,858 B2
• Time in Patent Office: Days
• US Class Current: 385/48
• CPC Class Codes: G02B 6/35 having switching means by changing the optical properties of the medium G02F1/00
• CPC Class Codes: G02B 6/3512 the optical element being reflective, e.g. mirror
• CPC Class Codes: G02B 6/3582 Housing means or package or arranging details of the switching elements, e.g. for thermal isolation
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C
• CPC Class Codes: G02B 6/3598 Switching means directly located between an optoelectronic element and waveguides, including direct displacement of either the element or the waveguide, e.g. optical pulse generation based on changing the optical properties of the medium G02F1/00; optical pulse generation in optical transmitters H04B10/508; optical pulse generation by controlling laser operation H01S3/00
• CPC Class Codes: G02B 6/4214 the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device G02B6/4246 takes precedence

Abstract

A MEMS-based adjustable mirror module allows faster, lower cost, and easier alignment of optical fibers in substrates. Movable mirrors formed on the substrate allow adjustment of the light path after the optical fiber is attached, after which the mirrors are affixed in place to prevent misalignment.

Claims

1. An integrated optical fiber alignment mirror module comprising:

a first wafer having a first surface and a second surface, the wafer having a groove formed in and extending along the first surface and parallel to the second surface;

a groove end reflector formed in an end of the groove in the first wafer;

a layer having a first region, the layer being attached to the first surface;

a first substrate mirror fashioned from the first region of the layer;

an optical device on the first wafer; and

an optical path extending between the groove and the optical device via optical communication between the groove end reflector and the first substrate mirror whereby light emitted from one of the optical device and an object in the groove travels to the other of the optical device and the object in the groove via the optical path.

2. The module of claim 1 wherein the groove is V-shaped.

3. The module of claim 2 wherein an end surface of the V-shaped groove is inclined at an angle in the range of from about 45 degrees to about 65 degrees measured from a plane parallel to the first surface and serves at least as a base for the mirror formed in an end of the groove.

4. The module of claim 3 wherein the angle is about 54.7 degrees.

5. The module of claim 1 wherein the first wafer is a silicon on insulator (SOI) wafer.

6. The module of claim 1 wherein the layer is a single crystal silicon layer.

7. The module of claim 1 wherein an optical fiber is in the groove.

8. The module of claim 7 wherein light from a light source exits an end of the optical fiber and enters the optical path, thereby traveling to the optical device.

9. The module of claim 7 wherein the optical device is a light source and light from the light source enters the optical path, thereby traveling to and entering an end of the optical fiber.

10. The module of claim 1 wherein the groove is deep reactive ion etched (DRIE).

11. The module of claim 1 wherein the first substrate mirror is positioned on a platform movable during a calibration of the module, thereby allowing adjustment of the optical path.

12. The module of claim 11 further comprising a plurality of substrate mirrors in the optical path, at least one of the plurality of substrate mirrors being positioned on a respective platform movable during a calibration of the module, thereby allowing further adjustment of the optical path during calibration of the module.

13. The module of claim 11 wherein post-calibration movement of the first substrate mirror is substantially minimized by material applied after adjustment of the optical path.

14. The module of claim 13 wherein the material is an adhesive.

16. The module of claim 15 further comprising an optical device in optical communication with the reflective end surface of the groove.

17. The module of claim 16 wherein the optical device resides on a second substrate mounted on the module substrate.

18. The module of claim 17 wherein the second substrate is affixed to the module substrate with solder bumps.

19. The module of claim 16 wherein the optical device resides on the module.

20. The module of claim 15 further comprising a reflector mounted on the substrate in optical communication with the reflective surface of the groove end.

21. The module of claim 20 further comprising a movable mounting device supporting the reflector and allowing positional adjustment of the reflector.

22. The module of claim 21 wherein the movable mounting device is an electrostatic comb drive.

23. The module of claim 20 wherein the substrate reflector is a first substrate reflector and further including a second substrate reflector.

24. The module of claim 23 wherein at least one of the first and second substrate reflectors rests on an actuator that can adjust the reflector position.

25. The module of claim 24 wherein the at least one actuator is an electrostatic comb drive.

27. The method of claim 26 wherein forming a groove includes the step of deep reactive ion etching the substrate to form the groove.

28. The method of claim 26 wherein forming the groove end reflector includes the step of polishing an end of the groove.

29. The method of claim 26 wherein forming the groove includes the step of coating an end of the groove with a reflective material.

30. The method of claim 26 wherein forming the actuators includes the steps of depositing a layer of material on the substrate, then removing a portion of the material to leave the actuators behind on the surface of the substrate.

31. The method of claim 26 wherein forming the substrate reflectors includes the steps of depositing a layer of material on at least the actuators, then removing a portion of the material to leave the substrate reflectors behind on the surface of the respective actuators.

15. An integrated optical fiber alignment mirror module comprising:

a groove formed in a substrate, the groove having an end in the substrate, the end being inclined relative to a bottom of the groove, the inclination of the end being less than 90 degrees as measured from an imaginary extension of the bottom of the groove to a surface of the end;

an optical element in the groove and positioned to allow light to shine between the optical element and the surface of the end of the groove; and

the surface of the end of the groove being substantially reflective so that light incident thereon from the optical element reflects from the surface and out of the groove.

26. A method comprising:

forming a groove in a substrate on which an optical device resides;

forming a groove end reflector at an end of the groove;

forming first and second actuators on a surface of the substrate;

forming first and second substrate reflectors on the first and second actuators, respectively, to establish an optical path between the groove end reflector and the optical device;

mounting an optical fiber in the groove with an end of the fiber in optical communication with the groove end reflector so that light can travel between the optical path and the end of the optical fiber;

causing light to travel along the optical path;

adjusting positions of the first and second substrate mirrors with their respective actuators to maximize light transmission between the optical device and the optical fiber; and

affixing the first and second substrate mirrors in respective positions corresponding to maximized light transmission on the optical path.