System and method of processing composite substrates within a high throughput reactor
First Claim
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1. A wafer susceptor for use in a substrate processing system, comprising:
- at least one recess formed therein, with each recess is arranged and configured to hold at least one substrate therein, wherein a combination of said wafer holder and said at least one substrate forms a composite substrate having uniform processing characteristics.
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Abstract
A wafer susceptor for use in a substrate processing system, comprising of at least one recess formed therein, with each recess arranged and configured to hold at least one substrate therein, wherein a combination of the wafer holder and said at least one substrates form a composite substrate having uniform processing characteristics.
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Citations
49 Claims
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1. A wafer susceptor for use in a substrate processing system, comprising:
at least one recess formed therein, with each recess is arranged and configured to hold at least one substrate therein, wherein a combination of said wafer holder and said at least one substrate forms a composite substrate having uniform processing characteristics. - View Dependent Claims (2)
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3. The wafer susceptor of claim 3, wherein said physical properties comprise at least one property selected from the group consisting of:
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Thermal coefficient of expansion;
Reflectivity;
Thermal mass;
Thermal conductivity;
Electrical resistivity;
Dielectric constant;
Dielectric loss;
Density;
Hardness; and
Emissivity. The wafer susceptor, wherein said wafer susceptor is used in a semiconductor substrate processing system, comprising a reactor having at least one single substrate deposition chambers, and further comprising an automated substrate transport assembly including a wand array comprising a plurality of wands constructed and arranged to simultaneously transport a corresponding plurality of substrates into and out of the deposition chamber.
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- 5. The system of claim 5, further comprising an automated substrate transport assembly.
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25. A method of increasing the throughput of a single substrate deposition chamber, said method comprising:
positioning in said single substrate deposition chamber a wafer susceptor having at least one recess formed therein, with each recess being arranged and configured to hold at least one substrate therein, wherein a combination of said wafer susceptor and at least one substrate form a composite substrate having uniform processing characteristics.
Specification