Method for fabricating ruthenium thin layer
First Claim
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1. A method for fabricating a ruthenium (Ru) thin layer comprising:
- loading a substrate into a reaction chamber for an atomic layer deposition;
injecting RuXn into the reaction camber, wherein n is 2 or 3, and adsorbing the RuXn onto a surfaced substrate; and
injecting a reductive reaction gas into the reaction chamber.
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Abstract
A method for fabricating a Ru thin layer by using an atomic layer deposition (ALD) technique is disclosed. The method comprises the steps of loading a substrate into a reaction chamber for an atomic layer deposition, adsorbing RuXn (wherein n is 2 or 3), which is a Ru precursor, onto the substrate and injecting a reductive reaction gas into the reaction chamber.
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Citations
13 Claims
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1. A method for fabricating a ruthenium (Ru) thin layer comprising:
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loading a substrate into a reaction chamber for an atomic layer deposition;
injecting RuXn into the reaction camber, wherein n is 2 or 3, and adsorbing the RuXn onto a surfaced substrate; and
injecting a reductive reaction gas into the reaction chamber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 12)
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10. A method for fabricating a ruthenium (Ru) thin layer comprising:
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loading a substrate into a reaction chamber for an atomic layer deposition;
injecting RuXn into the reaction chamber wherein n is 2 or 3 and adsorbing the RuXn onto a surface of the substrate; and
injecting a reductive reaction gas into the reaction chamber, wherein the reductive reaction gas is a gas selected from the group consisting of hydrazine (N2H4), ammonia (NH3), NH2R, NHR2, NR3, C1˜
C10 alkylhydrazine, C1˜
C10 dialkylhydrazine and mixtures thereof and R is a material selected from the group consisting of hydrogen, C1˜
C10 alkyl, C2˜
C8 alkenyl, C1˜
C8 alkoxy, C6˜
C12 aryl and derivatives thereof including one or more halogen groups. - View Dependent Claims (11, 13)
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Specification