Method for producing organic thin-film device by use of facing-targets-type sputtering apparatus
First Claim
1. A method for producing an organic thin-film device having a structure including a functional organic layer formed from an organic compound and a thin-film layer deposited onto the organic layer, the method comprising:
- forming the thin-film layer by use of a facing-targets-type sputtering apparatus including a pair of facing targets disposed a predetermined distance away from each other;
an electron reflection electrode disposed at the periphery of each target so as to face a confinement space provided between the paired targets; and
magnetic field generation means disposed at the lateral sides of each target, wherein the magnetic field generation means generates a magnetic field extending from one target to the other so as to surround the confinement space, as well as a magnetic field having a portion parallel to the surface of each target in the vicinity of a peripheral edge portion of the target.
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Accused Products
Abstract
Disclosed is a method for forming a thin-film layer, such as a metallic film or a transparent conductive film, on a functional organic layer formed from an organic compound, by means of a sputtering method performed at a low discharge voltage and a low gas pressure, without imparting any damage to the surface of the organic layer. The thin-film layer is formed by use of a facing-targets-type sputtering apparatus including a pair of facing targets disposed a predetermined distance away from each other; an electron reflection electrode disposed on the periphery of each target; and magnetic field generation means disposed at the sides of each target. The magnetic field generation means generates a magnetic field extending from one target to the other so as to surround a confinement space provided between the paired targets, as well as a magnetic field having a portion parallel to the surface of each target in the vicinity of a peripheral edge portion of the target. When an AC-DC power containing a DC component and a high-frequency component is supplied as a sputtering power to the apparatus, the thin-film layer can be formed at a lower discharge voltage and a lower gas pressure.
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Citations
12 Claims
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1. A method for producing an organic thin-film device having a structure including a functional organic layer formed from an organic compound and a thin-film layer deposited onto the organic layer, the method comprising:
forming the thin-film layer by use of a facing-targets-type sputtering apparatus including a pair of facing targets disposed a predetermined distance away from each other;
an electron reflection electrode disposed at the periphery of each target so as to face a confinement space provided between the paired targets; and
magnetic field generation means disposed at the lateral sides of each target, wherein the magnetic field generation means generates a magnetic field extending from one target to the other so as to surround the confinement space, as well as a magnetic field having a portion parallel to the surface of each target in the vicinity of a peripheral edge portion of the target.- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
Specification