Radition detectors and methods for manufacturing them
First Claim
1. A method of manufacturing radiation detectors collectively on a substrate in which said radiation detectors each comprise an assembly of microdetectors under a window that is transparent to radiation, said method comprising:
- forming a plurality of layers, wherein for each of said radiation detectors at least one of said plurality of layers is transparent to said radiation and serves as a window; and
partially eliminating at least a portion of said plurality of layers principally under said transparent layer, such that said microdetectors are positioned, for each of said radiation detectors, in one or more cavities; and
placing said one or more cavities under sub-atmospheric pressure.
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Abstract
The present invention relates to a method of manufacturing radiation detectors, in which these detectors each comprise a set of microdetectors, for example microbolometers, situated under a window that is transparent to said radiation. According to the invention, said detectors are manufactured collectively on a substrate (1), and said method comprises notably the following steps:
the construction of several layers, of which, for each of said detectors, at least one layer (4) is transparent to said radiation and serves as a window, and
the partial elimination of said layers principally under said transparent layer(4), such that said microdetectors (2) are placed, for each of said detectors, in one or more cavities, which are then placed under vacuum or under low pressure.
The invention also relates to various radiation detectors, of which the walls form hermetically sealed cavities each containing one or more microdetectors (2).
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Citations
42 Claims
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1. A method of manufacturing radiation detectors collectively on a substrate in which said radiation detectors each comprise an assembly of microdetectors under a window that is transparent to radiation, said method comprising:
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forming a plurality of layers, wherein for each of said radiation detectors at least one of said plurality of layers is transparent to said radiation and serves as a window; and
partially eliminating at least a portion of said plurality of layers principally under said transparent layer, such that said microdetectors are positioned, for each of said radiation detectors, in one or more cavities; and
placing said one or more cavities under sub-atmospheric pressure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30)
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19. A radiation detector comprising an assembly of microdetectors, said radiation detector comprising:
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a portion of a substrate, a peripheral partition surrounding said radiation detector and joined to said portion of substrate; and
a wall adapted to serve as a window for said radiation and joined to said peripheral partition, wherein said portion of a substrate, said peripheral partition, and said wall define an envelope for said detector, within which are located one or more cavities containing said microdetectors under sub-atmospheric.
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31. A radiation detector comprising an assembly of microdetectors under sub-atmospheric pressure in one or more cavities located within an envelope of said radiation detector, said envelope comprising:
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a portion of a substrate; and
a wall adapted to serve as a window for said radiation, wherein said envelope has one or more openings sealed with a sealing material. - View Dependent Claims (32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42)
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Specification