Pressure sensor

• US 20020177971A1
• Filed: 11/06/2001
• Published: 11/28/2002
• Est. Priority Date: 05/24/2001
• Status: Active Grant

• Current Assignee: Mitsubishi Denki Kabushiki Kaisha (Mitsubishi Electric Corporation)
• Original Assignee: Mitsubishi Denki Kabushiki Kaisha (Mitsubishi Electric Corporation)
• Inventors: Nakamura, Hiroshi, Taruya, Masaaki, Fukagawa, Satoru
• Granted Patent: US 6,668,238 B2
• Time in Patent Office: Days
• US Class Current: 702/138
• CPC Class Codes: G01L 19/148 Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
• CPC Class Codes: G01L 9/06 of piezo-resistive devices

Abstract

A pressure sensor is provided which is tolerant to noise such as electromagnetic waves, is configured so as to be capable of easily selecting a system environment in which a sensor signal, commonly used for various kinds of systems, can be freely read in at timing as required by a system, and is able to realize reduction in size and cost suitable for automotive use. An element portion for detecting pressure and a circuit portion having a signal processing function are integrally accommodated in the same package. An interface section 24 optimized to interface with external wiring, an A/D conversion section 25 for digitally encoding an analog processed detection signal of the sensor, and a digital processing section 26 for converting the digitized signal into a desired serial signal are added to the circuit portion 2. The entire circuit portion is constituted by at most two ICs alone, and a selection can be made between two output forms including an analog processed detection signal and a digital processed detection signal.

Claims

1. A pressure sensor including an element portion for detecting pressure and a circuit portion having a signal processing function. both of which are integrally accommodated in the same package,

said circuit portion comprising:

a first section for performing analog processing of a detection signal from said element portion;

a second section for storing bit data for characteristic adjustment and compensation and performing characteristic adjustment and compensation of the detection signal from said element portion based on said bit data;

an interface section optimized to interface with external wiring;

an A/D conversion section for digitally encoding the analog processed detection signal; and

a digital processing section for converting the digitized signal into a desired serial signal.

2. The pressure sensor according to claim 1, including an analog signal output and a serial signal output which are selectable between two output forms inclusive of an analog processed detection signal and a digital processed detection signal.

3. The pressure sensor according to claim 1, wherein said A/D conversion section and said digital processing section are incorporated in a first IC, whereas said interface section is incorporated in a second IC different from said first IC.

4. The pressure sensor according to claim 3, wherein said first IC comprises a section for storing said bit data, an A/D conversion section for digitally encoding said analog processed detection signal, and a digital processing section for converting said digitized signal into a desired serial signal, and said second IC comprises a section for performing analog processing of said detection signal from said element portion, a section for performing characteristic adjustment and compensation based on said bit data, and a serial interface section suitable for generating a serial output to said external wiring.

5. The pressure sensor according to claim 3, wherein said first IC comprises a section for storing said bit data, an A/D conversion section for digitally encoding said analog processed detection signal, a digital processing section for converting said digitized signal into a desired serial signal, a section for analog processing said detection signal from said element portion, and a section for performing characteristic adjustment and compensation based on said bit data, and said second IC comprises a serial interface section suitable for generating a serial output to said external wiring.

6. The pressure sensor according to claim 3, wherein said first IC comprises a section for performing analog processing of said detection signal from said element portion, a section for storing said bit data and performing characteristic adjustment and compensation based on said bit data, an A/D conversion section for digitally encoding said analog processed detection signal, and a digital processing section for converting said digitized signal into a desired serial signal, and said second IC comprises an interface section optimized to interface with said external wiring, and said first and second ICs are each provided with two output ports for said analog processed detection signal and said digital processed detection signal.

7. The pressure sensor according to claim 3, wherein said first IC comprises a section for performing analog processing of said detection signal from said element portion, a section for storing said bit data and performing characteristic adjustment and compensation based on said bit data, an A/D conversion section for digitally encoding said analog processed detection signal, and a digital processing section for converting said digitized signal into a desired serial signal, and said second IC comprises an interface section optimized to interface with said external wiring, and said first IC is provided with two output ports for said analog processed detection signal and said digital processed detection signal, and uses said output port for an analog signal, and said second IC is provided with said interface section for an analog signal suitable for an analog output.

8. The pressure sensor according to claim 3, wherein said first IC comprises a section for performing analog processing of said detection signal from said element portion, a section for storing said bit data and performing characteristic adjustment and compensation based on said bit data, an A/D conversion section for digitally encoding said analog processed detection signal, and a digital processing section for converting said digitized signal into a desired serial signal, and said second IC comprises an interface section optimized to interface with said external wiring, and said first IC is provided with an analog signal output port and a serial signal output port for said analog processed detection signal and said digital processed detection signal, respectively, and uses said serial signal output port, and said second IC is provided with said interface section for a serial signal suitable for a serial output.

9. The pressure sensor according to claim 7, further comprising a single conductor line connecting between said first and second ICs for communications of said analog processed detection signal or said digital processed detection signal therebetween.

10. The pressure sensor according to claim 8, further comprising a single conductor line connecting between said first and second ICs for communications of said analog processed detection signal or said digital processed detection signal therebetween.

11. The pressure sensor according to claim 1, further comprising a power supply input port for receiving electric power from an external power supply, and a power supply circuit for generating a voltage which has a ratio metric relation with respect to an input voltage supplied to said power supply input port and which has dropped from said input voltage from said external power supply, and said respective sections other than said power supply circuit and said interface section are configured to be operated by said dropped power supply circuit output.

12. The pressure sensor according to claim 3, wherein said IC provided with said interface section comprises a power supply input port for receiving electric power from an external power supply, a power supply circuit for generating a voltage which has a ratio metric relation with respect to an input voltage supplied to said power supply input port and which has dropped from said input voltage from said external power supply, and a power supply output port for supplying said dropped power supply circuit output to the other IC, and said respective sections other than said power supply circuit and said interface section are configured to be operated by said dropped power supply circuit output.