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Acceleration sensor and manufacturing method thereof

  • US 20020178818A1
  • Filed: 11/02/2001
  • Published: 12/05/2002
  • Est. Priority Date: 06/01/2001
  • Status: Active Grant
First Claim
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1. An acceleration sensor comprising:

  • a fixed electrode including a plurality of first rod-like patterns aligned parallel to each other on a substrate surface;

    a movable electrode including a plurality of second rod-like patterns aligned parallel to each other over the substrate surface so as to be opposite to each of the plurality of said first rod-like patterns with predetermined distances; and

    a mass member disposed over the substrate surface and joined to said movable electrode to be displaceable together with said movable electrode;

    wherein said mass member includes a thin polyimide membrane provided over the substrate surface and silicon nitride membranes provided respectively on a pair of main surfaces of said thin polyimide membrane substantially parallel to the substrate surface.

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