Inductive plasma processor including current sensor for plasma excitation coil
First Claim
1. An inductive plasma processor comprising an RF plasma excitation coil including a winding having an input terminal and an output terminal, the winding having one end connected in a branch in series with a matching network and an RF source and a second end having a lead to ground so the same current which flows through the winding output terminal flows through the lead, a current sensor coupled to the lead, and a grounded shield coupled with the current sensor for shielding electromagnetic interference from an ambient RF environment.
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Abstract
An inductive plasma processor includes an RF plasma excitation coil having plural windings, each having a first end connected in parallel to be driven by a single RF source via a single matching network. Second ends of the windings are connected to ground by termination capacitors, in turn connected by a lead to ground. A current sensor including a winding around a toroidal core is coupled to the lead between each termination capacitor and ground. The current sensor is surrounded by a grounded shield. There is minimum electromagnetic interference from an ambient RF environment to the current sensor, to provide an accurate current sensor.
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Citations
14 Claims
- 1. An inductive plasma processor comprising an RF plasma excitation coil including a winding having an input terminal and an output terminal, the winding having one end connected in a branch in series with a matching network and an RF source and a second end having a lead to ground so the same current which flows through the winding output terminal flows through the lead, a current sensor coupled to the lead, and a grounded shield coupled with the current sensor for shielding electromagnetic interference from an ambient RF environment.
Specification