Adjustable force damper for passive vibration control

• US 20020179806A1
• Filed: 05/30/2001
• Published: 12/05/2002
• Est. Priority Date: 05/30/2001
• Status: Abandoned Application

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Teng, Ting-Chien
• Application Number:
  US09/871,549
• Publication Number:
  US 20020179806A1
• Time in Patent Office: Days
• US Class Current: 248/618
• CPC Class Codes: F16F 15/02 Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems F16F15/005 takes precedence ; layered products B32B; suppression of vibration in ships B63; relieving load on bearings, using magnetic means F16C39/06
• CPC Class Codes: F16F 15/022 using dampers and springs in combination
• CPC Class Codes: F16F 15/03 using magnetic or electromagnetic means F16F9/53, F16F15/005 take precedence
• CPC Class Codes: F16F 7/1005 characterised by active control of the mass

Abstract

Methods and apparatus for damping out vibrations associated with a structure are disclosed. According to one aspect of the present invention, a structure includes a mass and a vibration damper. The mass has a first surface and a second surface, and is arranged to transfer vibratory energy. The vibration damper includes a force adjuster, as well as a first energy dissipator and a second energy dissipator. The vibration damper is positioned about the mass so that the first energy dissipator is in contact with the first surface and the second energy dissipator is in contact with the second surface. The first energy dissipator and the second energy dissipator absorb the vibratory energy transferred by the mass, while the force adjuster adjusts force on the first energy dissipator and force on the second energy dissipator. In one embodiment, the mass is a beam.

Claims

1. A structure comprising:

a mass, the mass having at least a first surface and a second surface, the mass being arranged to transfer vibratory energy; and

a vibration damper, the vibration damper including a force adjuster, the vibration damper further including a first energy dissipator and a second energy dissipator, the vibration damper being positioned about the mass such that the first energy dissipator is in contact with the first surface of the mass and the second energy dissipator is in contact with the second surface of the mass, the first energy dissipator and the second energy dissipator being arranged to absorb the vibratory energy transferred by the mass, wherein the force adjuster is arranged to adjust force on the first energy dissipator and force on the second energy dissipator.

2. A structure according to claim 1 wherein the force adjuster is arranged to increase the force on the first energy dissipator and the force on the second energy dissipator, whereby increasing the force on the first energy dissipator and the force on the second energy dissipator increases an amount of vibratory energy absorbed by the first energy dissipator and the second energy dissipator.

3. A structure according to claim 1 wherein the force adjuster is arranged to adjust the force on the first energy dissipator and the force on the second energy dissipator substantially simultaneously.

4. A structure according to claim 3 wherein the force adjuster is a clamp.

5. A structure according to claim 3 wherein the vibration damper includes a spring, the spring being arranged to compress to adjust the force on the first energy dissipator and the force on the second energy dissipator, wherein the force adjuster is arranged to compress the spring, the spring further being arranged to decompress to adjust the force on the first energy dissipator and the force on the second energy dissipator, wherein the force adjuster is further arranged to decompress the spring.

6. A structure according to claim 1 wherein the mass is a beam.

7. A structure according to claim 1 wherein the mass is an I-core, the I-core being a part of an EI-core motor.

8. A structure according to claim 1 wherein the first surface of the mass is not in direct contact with the second surface of the mass.

9. A structure according to claim 1 wherein the force on the first energy dissipator substantially opposes the force on the second energy dissipator.

10. A structure according to claim 1 wherein the first energy dissipator and the second energy dissipator are formed from a rubber material.

11. A structure comprising:

a mass, the mass having at least a first surface and a second surface, the mass being arranged to transfer vibratory energy, the vibratory energy being arranged to cause the mass to vibrate; and

a force damper, the force damper including a first absorber and a second absorber, the force damper being positioned about the mass such that the first absorber is in contact with the first surface of the mass when the force damper applies a first force to the first surface of the mass and the second absorber is in contact with the second surface of the mass when the force damper applies a second force to the second surface of the mass, the first absorber and the second absorber being arranged to absorb the vibratory energy transferred by the mass when the force damper applies the first force and the second force, wherein the first force substantially opposes the second force.

12. A structure according to claim 11 wherein a magnitude of the first force is substantially equal to a magnitude of the second force.

13. A structure according to claim 11 wherein the first force is applied to the first surface of the mass through the first absorber, and the second force is applied to the second surface of the mass through the second absorber.

14. A structure according to claim 13 further including an adjuster that is arranged to be adjusted to vary at least one of the first force and the second force.

15. A structure according to claim 14 wherein an amount of the vibratory energy absorbed by the first absorber and the second absorber is varied when at least one of the first force and the second force are varied.

16. A structure according to claim 11 wherein the mass has a first mass and the adjuster has a second mass, the first mass being substantially larger than the second mass.

17. A structure according to claim 11 wherein the mass is a cantilevered beam;

18. A structure according to claim 18 wherein cantilevered beam is a moving cantilevered beam.

19. A structure according to claim 11 wherein the mass is a part of an EI-core motor.

20. A stage assembly suitable for use in wafer processing, comprising:

a base;

a stage;

a mount, the mount being coupled to the base, the mount being arranged to transfer vibratory energy, the mount having a first surface and a second surface;

a sensor, the sensor being coupled to the mount, the sensor being arranged to measure a position of the stage; and

a force damper, the force damper including a first absorber and a second absorber, the force damper being positioned about the mount such that the first absorber is in contact with the first surface of the mount when the force damper applies a first force to the first surface of the mount and the second absorber is in contact with the second surface of the mount when the force damper applies a second force to the second surface of the mount, the first absorber and the second absorber being arranged to absorb the vibratory energy transferred by the mount when the force damper applies the first force and the second force, wherein the first force substantially opposes the second force.

21. An exposure apparatus comprising the stage assembly of claim 20.

22. A device manufactured with the exposure apparatus of claim 21.

23. A wafer on which an image has been formed by the exposure apparatus of claim 21.

25. An exposure apparatus comprising the stage assembly of claim 21.

26. A device manufactured with the exposure apparatus of claim 25.

27. A wafer on which an image has been formed by the exposure apparatus of claim 25.

29. A method as recited in claim 28, wherein the first amount of the vibratory energy that is absorbed by the first absorber is dependent on at least physical properties of the first absorber and the first magnitude, and the second amount of the vibratory energy that is absorbed by the second absorber is dependent on at least physical properties of the second absorber and the second magnitude.

30. A method as recited in claim 28 wherein the first force and the second force are applied in substantially opposing directions along an axis of the device.

24. A stage assembly, comprising:

a stage, the stage being arranged to transfer vibratory energy, the stage having a first surface and a second surface; and

a force damper, the force damper including a first absorber and a second absorber, the force damper being positioned about the stage such that the first absorber is in contact with the first surface of the stage when the force damper applies a first force to the first surface of the stage and the second absorber is in contact with the second surface of the stage when the force damper applies a second force to the second surface of the stage, the first absorber and the second absorber being arranged to absorb the vibratory energy transferred by the stage when the force damper applies the first force and the second force, wherein the first force substantially opposes the second force.

28. A method for suppressing vibrations in a structure, the structure including a mass, the mass having a first surface and a second surface, the mass having vibratory energy, the method comprising:

providing a first absorber on the first surface;

providing a second absorber on the second surface;

applying a first force to the first absorber, the first force having a first magnitude, wherein the first absorber is arranged to absorb a first amount of the vibratory energy; and

applying a second force to the second absorber, the second force having a second magnitude, the second magnitude being approximately equal to the first magnitude, wherein the second absorber is arranged to absorb a second amount of the vibratory energy.

31. A method for positioning an object, the method comprising:

moving the object along a predetermined direction;

measuring a position of the object using a sensor connected to a sensor mount;

applying a first force to a first surface of the sensor mount, the first force having a first magnitude; and

applying a second force to a second surface of the sensor mount, the second force having a second magnitude that is substantially equal to the first magnitude.

32. A method for operating an exposure apparatus comprising the method for positioning an object of claim 31.

33. A method for making an object including at least a photolithography process, wherein the photolithography process utilizes the method of operating an exposure apparatus of claim 32.

34. A method for making a wafer utilizing the method of operating an exposure apparatus of claim 32.