Compliant hermetic package
First Claim
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1. A device with at least two substrates, wherein at least two substrates are mechanically attached to at least one compliant structure.
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Abstract
The present invention provides a compliant seal, particularly for bonding substrates having different thermal expansion coefficients. This invention is also applicable for attaching substrates requiring a significant gap between said substrates.
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23 Claims
- 1. A device with at least two substrates, wherein at least two substrates are mechanically attached to at least one compliant structure.
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8. A device with at least two substrates, wherein at least two substrates are mechanically attached to at least one compliant structure, wherein said at least two substrates are bonded to each other with a bonding technique selected from the following list:
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a. gold bump bonding, b. gold bump bonding at room temperature c. gold bump bonding near room temperature d. bonding at room temperature e. bonding near room temperature f. solder bump bonding, g. indium bump bonding, h. polymer bump bonding, i. bonding with gold on at least one bonding surface, j. bonding with solder on at least one bonding surface, k. bonding with indium on at least one bonding surface, l. bonding with conductive polymer on at least one bonding surface, m. bonding wherein at least one adhesive provides at least the majority of the bonding strength between said substrates, n. bonding wherein at least one adhesive provides at least majority of the bonding strength between said substrates, and device herneticity is improved from structures which assist in sealing including but not limited of structures which comprises at least one less-gas-permeable material from deposited layers, substrate, or combination including but not limited to silicon oxide, single crystal silicon, polysilicon, silicon nitride, gold, nickel, indium, titanium, tungsten, titanium nitride, solder, other ceramics, other metals, or any combination, o. bonding wherein at least one adhesive provides at least the majority of the bonding strength between said substrates, and device hermeticity is improved from at least one knife-blade type seal, crush-gasket type seal or a combination which comprises at least one less-gas-permeable material from deposited layers, substrate, or combination including but not limited to silicon oxide, single crystal silicon, polysilicon, silicon nitride, gold, nickel, indium, titanium, tungsten, titanium nitride, solder, other ceramics, other metals, or any combination, p. bonding wherein at least one adhesive provides at least the majority of the bonding strength between said substrates, and device hermeticity is improved by adding at least one less gas permeable material into the adhesive or add at least one less-gas-permeable material adjacent to the adhesive by depositing layers on one or more substrates, removing materials from one or more substrates, or any combination, q. bonding wherein a solder bond provides the majority of the bonding strength between said substrates, r. bonding wherein a gold thermal compression bond provides the majority of the bonding strength between said substrates, s. bonding wherein a gold compression bond provides the majority of the bonding strength between said substrates, t. bonding wherein the majority of the bonding strength between said substrates is provided from a bonding process involving the formation of at least one amalgam, u. bonding wherein the majority of the bonding strength between said substrates is provided from a cold welding process, w. any combination including at least one of the above bonding processes. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 17, 19, 20, 21, 22, 23)
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18. A method of assembly of at least two substrates with at least one compliant structure, wherein said at least one compliant structure seals at least one location between at least two substrates.
Specification