Flexible silicon strain gage
First Claim
Patent Images
1. A generally flexible strain gage comprising:
- a semiconducting strain sensing element having a single crystal or polycrystalline structure; and
a generally flexible substrate supporting said strain sensing element.
0 Assignments
0 Petitions
Accused Products
Abstract
A generally flexible strain gage comprising a strain sensing element, and a generally flexible substrate supporting the strain sensing element. The strain sensing element is made of single crystal or polycrystalline semiconducting material. The invention also includes a method for forming a generally flexible strain gage comprising the step of selecting a wafer having a portion of a base material and portion of a single crystal or polycrystalline semiconducting material located thereon. The method further comprises the steps of etching a strain sensing element out of the semiconducting material and forming a generally flexible substrate onto said sensing element.
31 Citations
51 Claims
-
1. A generally flexible strain gage comprising:
-
a semiconducting strain sensing element having a single crystal or polycrystalline structure; and
a generally flexible substrate supporting said strain sensing element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
-
-
17. A method for forming a sensor on a substrate, the method comprising the steps of:
-
selecting a wafer having a portion of base material and a portion of sensor material;
forming said sensor out of said sensor material; and
forming said substrate over said sensor.
-
-
30. A method for forming a generally flexible strain gage comprising the steps of:
-
selecting a wafer having a portion of a base material and portion of a single crystal semiconducting material or polycrystalline semiconducting material located thereon;
etching a strain sensing element out of said semiconducting material; and
forming a generally flexible substrate onto said sensing element. - View Dependent Claims (31, 32, 33, 34, 35, 36, 37, 38, 39, 40)
-
-
41. A method for forming a generally flexible strain gage comprising the steps of:
-
selecting a generally flexible substrate; and
mounting a generally flexible semiconducting strain sensing element on said substrate, said strain sensing element having a single crystal or polycrystalline structure. - View Dependent Claims (42)
-
-
43. A method for forming a sensor array comprising the steps of:
-
selecting a wafer having a portion of base material and a portion of sensor material;
forming a plurality of sensors out of said sensor material; and
forming said substrate over said plurality of sensors. - View Dependent Claims (44, 45, 46, 48, 49, 50, 51)
-
-
47. A generally flexible sensor array for use with a specimen, the array comprising a plurality of sensors mounted on a generally flexible substrate, and wherein said substrate is shaped so as to fit around said specimen such that said sensors are located on desired locations of said specimen.
Specification