Micro fluidic valves, agitators, and pumps and methods thereof
First Claim
1. A device for micro fluidics, the device comprising:
- a structure with at least one opening; and
a member having a fixed static charge, the member having a first position exposing the opening and a second position sealing the opening.
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Accused Products
Abstract
A valve which has a structure with at least one opening and a member which has a fixed static charge and also has a first position exposing the opening and a second position sealing the opening. A method for making the valve includes providing a structure with at least one opening and providing a member having a fixed static charge where the member has a first position exposing the opening and a second position sealing the opening. An agitator includes a base with at least one trench, a structure with at least one opening, and a membrane with a fixed static charge. The structure is connected to the base over the trench with the opening in the structure extending through to the trench in the base. The membrane is connected to the base across at least a portion of the trench. A pump includes a base with at least one trench, a structure with at least two openings, a membrane with a fixed static charge, a first cantilever arm having a fixed static charge, and a second cantilever arm having a fixed static charge. The structure is connected to the base over the trench with the openings in the structure extending through to the trench in the base. The membrane is connected to the base across at least a portion of the trench. The first cantilever arm has a first position exposing one of the openings and a second position sealing the one of the openings. The second cantilever arm has a first position exposing another one of the openings and a second position sealing the another one of the openings.
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Citations
50 Claims
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1. A device for micro fluidics, the device comprising:
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a structure with at least one opening; and
a member having a fixed static charge, the member having a first position exposing the opening and a second position sealing the opening. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32)
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14. A method for making a micro fluidic device, the method comprising:
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providing a structure with at least one opening; and
providing a member having a fixed static charge, the member having a first position exposing the opening and a second position sealing the opening.
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33. An agitator comprising:
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a base with at least one trench;
a structure with at least one opening, the structure connected to the base over the trench with the opening in the structure extending through to the trench in the base; and
a membrane with a fixed static charge, the membrane connected to the base across at least a portion of the trench. - View Dependent Claims (34, 35, 36, 37, 39, 40, 41, 42)
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38. A method for agitating one or more substances, the method comprising:
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placing the one or more substances in a trench in a base through an opening in a structure, the structure connected to the base over the trench;
applying a varying bias to at least two control electrode which are adjacent to and spaced from different sides of a membrane with a fixed static charge, the membrane connected to the base across at least a portion of the trench; and
moving the membrane towards and away from one of the control electrodes based on the applied varying bias.
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43. A pump comprising:
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a base with at least one trench;
a structure with at least two openings, the structure connected to the base over the trench with the openings in the structure extending through to the trench in the base;
a membrane with a fixed static charge, the membrane connected to the base across at least a portion of the trench;
a first cantilever arm having a fixed static charge, the first cantilever arm having a first position exposing one of the openings and a second position sealing the one of the openings; and
a second cantilever arm having a fixed static charge, the second cantilever arm having a first position exposing another one of the openings and a second position sealing the another one of the openings. - View Dependent Claims (44, 45, 46, 47, 49, 50)
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48. A method for pumping one or more substances, the method comprising:
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applying a first bias to a first control electrode and a fourth control electrode which are adjacent to and spaced from different sides of a membrane with a first fixed static charge, the membrane is connected to a base across at least a portion of a trench in the base;
moving the membrane towards and away from the first control electrode based on the applied first bias to pump the one or more substances into the trench in the base through the first opening in the structure, the structure is connected to the base over the trench;
applying a second bias to a second control electrode and the fourth control electrode which are adjacent to and spaced from different sides of a first cantilever arm with a second fixed static charge;
moving the first cantilever arm towards the first opening in the structure to seal the first opening in response to the applied second bias;
applying a third bias to a third control electrode and the fourth control electrode which are adjacent to and spaced from different sides of a second cantilever arm with a third fixed static charge;
moving the second cantilever arm away from the second opening in the structure to open the second opening in response to the applied third bias;
applying a fourth bias to the first control electrode and the fourth control electrode; and
moving the membrane toward the first electrode based on the applied fourth bias to pump the one or more substances out of the trench in the base through the second opening in the structure.
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Specification