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Etching process for making electrodes

  • US 20020182386A1
  • Filed: 06/12/2002
  • Published: 12/05/2002
  • Est. Priority Date: 05/12/2000
  • Status: Active Grant
First Claim
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1. A process for forming an electrode, the process comprising:

  • forming on a substrate, in order, a bottom high index layer, a conductive layer, and a top high index layer with a conductivity of at least about 400 Ω

    /square; and

    chemically etching in the bottom high index layer, the top high index layer and the conductive layer to form an electrode in the conductive layer.

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