Remote maintenance method, industrial device, and semiconductor device

• US 20020183880A1
• Filed: 02/25/2002
• Published: 12/05/2002
• Est. Priority Date: 05/31/2001
• Status: Active Grant

• Current Assignee: Hitachi, Ltd.
• Original Assignee: Hitachi, Ltd.
• Inventors: Iizumi, Takashi, Aizono, Takeiki, Arima, Juntaro, Inaba, Masaaki
• Granted Patent: US 6,708,072 B2
• Time in Patent Office: Days
• US Class Current: 700/110
• CPC Class Codes: G05B 19/4184 characterised by fault tolerance, reliability of production system
• CPC Class Codes: G05B 2219/24001 Maintenance, repair
• CPC Class Codes: G05B 2219/32234 Maintenance planning
• CPC Class Codes: G05B 23/0267 Fault communication, e.g. human machine interface [HMI]
• CPC Class Codes: G05B 23/0283 Predictive maintenance, e.g. involving the monitoring of a system and, based on the monitoring results, taking decisions on the maintenance schedule of the monitored system; Estimating remaining useful life [RUL] preventive maintenance, i.e. planning maintenance according to the available resources without monitoring the system G06Q10/06
• CPC Class Codes: G06Q 10/06 Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
• CPC Class Codes: G06Q 30/0283 Price estimation or determination
• CPC Class Codes: G06Q 30/04 Billing or invoicing
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
• CPC Class Codes: Y02P 90/80 Management or planning

Abstract

The present invention provides a remote maintenance method, a remote maintenance system, and an industrial device for enabling control and thorough services and billing according to the contents of the remote maintenance operation and the request destination of maintenance and enabling access limit according to the attribute of a service person, access limit according to the device state, and output limit according to the output mode. The industrial device 123 installed at the factory 120 and the operation device 113 installed in the maintenance center 110 are connected via the network 100. The operation device 113 transmits command information indicating a command concerning maintenance to the industrial device 123 and the industrial device 123 executes a process according to the received command information, generates charge information indicating a charge concerning maintenance according to the contents of the executed process, and outputs the whole or a part of the generated charge information to the output device of the industrial device 123.

Claims

1. :

A remote maintenance method for a system that an industrial device for executing a specific process and an operation device for maintaining said industrial device are connected to each other via a network, characterized in that said operation device transmits command information indicating a maintenance command to said industrial device and said industrial device executes said process according to said received command information, generates charge information indicating a value for maintenance according to contents of said executed process, and outputs a whole or a part of said generated charge information to an output device of said industrial device.

2. :

A remote maintenance method according to claim 1, wherein said industrial device holds a user of said operation device and attribute information indicating a degree of art held by said user in connection with each other and generates said charge information according to said attribute information related to said user transmitting said command information.

3. :

A remote maintenance method according to claim 2, wherein said value for maintenance is surcharged according to said degree of art indicated in said attribute information.

4. :

A remote maintenance method according to claim 1, wherein said industrial device holds state information indicating a process state of said industrial device and generates said charge information according to said condition information at a point of time when said process is executed according to said command information.

5. :

A remote maintenance method according to claim 4, wherein when said state information indicates that said industrial device is in a production state, said value for maintenance is discounted.

6. :

A remote maintenance method according to claim 1, wherein said industrial device stores use history information indicating a history of use of said industrial device and generates said charge information according to a kind of said use history information read according to said command information.

7. :

A remote maintenance method according to claim 1, wherein said industrial device outputs state information indicating a state of a maintenance operation and generates said charge information according to contents of said output state information.

8. :

A remote maintenance method according to claim 1, wherein when secret information concerning use of said industrial device is disclosed, said industrial device discounts said value for maintenance.

9. :

A remote maintenance method according to claim 1, wherein when secret information concerning maintenance of said industrial device is disclosed, said industrial device surcharges said value for maintenance.

10. :

A remote maintenance method according to claim 1, wherein said industrial device outputs state information indicating a state of a maintenance operation and generates said charge information according to contents of said output state information.

11. :

A remote maintenance method according to claim 1, wherein said industrial device is a semiconductor manufacturing device.

13. :

A remote maintenance method according to claim 12, wherein said industrial device is a semiconductor manufacturing device.

15. :

A remote maintenance method according to claim 14, wherein said industrial device is a semiconductor manufacturing device.

17. :

A remote maintenance method according to claim 16, wherein said industrial device is a semiconductor manufacturing device.

19. :

A remote maintenance method according to claim 18, wherein said industrial device is a semiconductor manufacturing device.

12. :

A remote maintenance method for a system that an industrial device for executing a specific process and an operation device for maintaining said industrial device are connected to each other via a network, characterized in that said operation device transmits command information indicating a maintenance command to said industrial device and said industrial device executes said process according to said received command information, holds attribute information indicating an attribute of a user of said operation device and condition information indicating a condition of said attribute necessary to execute said process according to said command information, reads said attribute information and said condition information when said industrial device receives said command information from said operation device, and executes said process according to said command information only when said attribute in said attribute information satisfies said condition in said condition information.

14. :

A remote maintenance method for a system that an industrial device for executing a specific process and an operation device for maintaining said industrial device are connected to each other via a network, characterized in that said operation device transmits command information indicating a maintenance command to said industrial device and said industrial device executes said process according to said received command information, holds state information indicating a state of said process of said industrial device and condition information indicating a condition concerning said state information necessary to execute said process according to said command information, reads said state information and said condition information when said industrial device receives said command information from said operation device, and executes said process according to said command information only when said state in said state information satisfies said condition in said condition information.

16. :

A remote maintenance method for a system that an industrial device for executing a specific process and an operation device for maintaining said industrial device are connected to each other via a network, characterized in that said operation device transmits command information indicating a maintenance command to said industrial device and said industrial device executes said process according to said received command information, holds mode information for identifying a state for outputting a state of a maintenance operation to said industrial device and condition information indicating a condition concerning said state necessary to output said state of said maintenance operation, reads said mode information and said condition information when said industrial device receives said command information from said operation device, and outputs said state of said maintenance operation to an output device of said industrial device only when said state in said mode information satisfies said condition in said condition information.

18. :

A remote maintenance method for a system that an industrial device for executing a specific process and an operation device for maintaining said industrial device are connected to each other via a network, characterized in that said operation device transmits command information indicating a maintenance command and charge list information for designating a value for maintenance to said industrial device and said industrial device executes said process according to said received command information, generates charge information indicating said value for maintenance using said received charge list information, and outputs a whole or a part of said generated charge information to an output device of said industrial device.

20. :

A remote maintenance method for a system that an industrial device for executing a specific process and an operation device for maintaining said industrial device are connected to each other via a network, characterized in that said operation device transmits command information indicating a maintenance command and condition information indicating a condition concerning a state necessary to output a state of a maintenance operation to said industrial device and said industrial device executes said process according to said received command information, holds mode information for identifying a state for outputting said state of said maintenance operation to said industrial device and said condition information, reads said mode information and said condition information when said industrial device receives said command information from said operation device, and outputs said state of said maintenance operation to an output device of said industrial device only when said state identified by said mode information satisfies said condition in said condition information.

21. :

A remote maintenance method according to claim 20, wherein said industrial device is a semiconductor manufacturing device.

22. :

An industrial device for receiving a maintenance operation from an operation device connected via a network by remote control, comprising communication means for receiving command information indicating a command of maintenance from said operation device, processing means for executing a process according to said command information received by said communication means, calculation means for generating charge information indicating a value for said maintenance according to contents of said process executed by said processing means, and output means for outputting a whole or a part of said charge information generated by said calculation means to an output device.

23. :

An industrial device according to claim 22, wherein said communication means holds a user of said operation device and attribute information indicating a degree of art held by said user in connection with each other, and said calculation means obtains said attribute information related to said user of said operation device transmitting said command information from said communication means, and said calculation means generates said charge information according to said obtained attribute information.

24. :

An industrial device according to claim 23, wherein said calculation means surcharges said value for maintenance according to said degree of art indicated in said attribute information.

25. :

An industrial device according to claim 22, wherein said processing means holds state information indicating a process state of said industrial device and said calculation means obtains said state information at a point of time when said process is executed according to said command information from said processing means and generates said charge information according to said obtained state information.

26. :

An industrial device according to claim 25, wherein when said state information held by said processing means indicates that said industrial device is in a production state, said calculation means discounts said value for maintenance

27. :

An industrial device according to claim 22, wherein said processing means stores use history information indicating use of said industrial device and said calculation means generates said charge information according to a kind of said use history information read by said processing means according to said command information.

28. :

An industrial device according to claim 22, wherein said output means outputs state information indicating a state of said maintenance operation and said calculation means generates said charge information according to contents of said state information which is output to said output device by said output means.

29. :

An industrial device according to claim 22, wherein when secret information concerning use of said industrial device is disclosed, said calculation means discounts said value for maintenance.

30. :

An industrial device according to claim 22, wherein when secret information concerning maintenance of said industrial device is disclosed, said calculation means surcharges said value for maintenance.

31. :

An industrial device according to claim 22, wherein said industrial device is a semiconductor manufacturing device.

32. :

An industrial device for receiving a maintenance operation from an operation device connected via a network by remote control, comprising communication means for receiving command information indicating a command of maintenance from said operation device and processing means for executing a process according to said command information received by said communication means, wherein said communication means holds attribute information indicating an attribute of a user of said operation device and condition information indicating a condition of said attribute necessary to execute said process according to said command information, reads said attribute information and said condition information when said communication means receives said command information from said operation device, and permits execution of said process according to said command information only when said attribute in said attribute information satisfies said condition in said condition information.

33. :

An industrial device according to claim 32, wherein said industrial device is a semiconductor manufacturing device.

35. :

An industrial device according to claim 34, wherein said industrial device is a semiconductor manufacturing device.

37. :

An industrial device according to claim 36, wherein said industrial device is a semiconductor manufacturing device.

39. :

An industrial device according to claim 38, wherein said industrial device is a semiconductor manufacturing device.

34. :

An industrial device for receiving a maintenance operation from an operation device connected via a network by remote control, comprising communication means for receiving command information indicating a command of maintenance from said operation device and processing means for executing a process according to said command information received by said communication means, wherein said processing means holds state information indicating a process state of said industrial device and said communication means holds condition information indicating a condition concerning said state necessary to execute said process according to said command information, obtains said state information from said processing means when said communication means receives said command information from said operation device, reads said condition information, and permits execution of said process according to said command information only when said state of said state information satisfies said condition of said condition information.

36. :

An industrial device for receiving a maintenance operation from an operation device connected via a network by remote control, comprising communication means for receiving command information indicating a command of maintenance from said operation device, processing means for executing a process according to said command information received by said communication means, and output means for holding mode information for identifying a state for outputting a state of said maintenance operation and condition information indicating a condition concerning said state necessary to output said state of said maintenance operation, reading said mode information and said condition information when said processing means executes said process, and outputting said state of said maintenance operation to an output device of said industrial device only when said state of said mode information satisfies said condition of said condition information.

38. :

An industrial device for receiving a maintenance operation from an operation device connected via a network by remote control, comprising communication means for receiving command information indicating a command of maintenance from said operation device, processing means for executing a process according to said command information received by said communication means, calculation means for generating charge information indicating a value for said maintenance according to contents of said process executed by said processing means, and output means for outputting a whole or a part of said charge information generated by said calculation means to an output device, wherein said communication means receives charge list information for designating said value for said maintenance from said operation device and said calculation means generates said charge information using said charge list information received by said communication means.

40. :

An industrial device for receiving a maintenance operation from an operation device connected via a network by remote control, comprising communication means for receiving command information indicating a command of maintenance from said operation device, processing means for executing a process according to said command information received by said communication means, and output means for holding mode information for identifying a state for outputting a state of said maintenance operation and condition information indicating a condition concerning said state necessary to output said state of said maintenance operation, reading said mode information and said condition information when said processing means executes said process, and outputting said state of said maintenance operation to an output device of said industrial device only when said state of said mode information satisfies said condition of said condition information. wherein said communication means receives said condition information from said operation device and said output means holds said condition information received by said communication means, reads said mode information and said received condition information when said processing means executes said process, and outputs said state of said maintenance operation to an output device of said industrial device only when said state in said mode information satisfies said condition in said condition information.

41. :

An industrial device according to claim 40, wherein said industrial device is a semiconductor manufacturing device.

42. :

A remote maintenance method for a system that one or more industrial devices for executing a specific process and one or more operation devices for maintaining said industrial devices are connected to each other via a network, wherein each industrial device monitors an occurrence of a trouble in said industrial device itself, when said industrial device detects an occurrence of a trouble, generates status information for identifying a condition of said trouble, decides an operation device to be notified of said generated status information, and notifies said generated status information to said decided operation device, and said operation device decides a troubleshooting method for said trouble of said industrial device on the basis of said notified status information and transmits command information indicating a maintenance command on the basis of said troubleshooting method to said industrial device, and said industrial device executes said process according to said received command information, generates charge information indicating a value for maintenance according to an identifier of said operation device to which said status information is notified, and outputs a whole or a part of said generated charge information to an output device of said industrial device.

43. :

A remote maintenance method according to claim 42, wherein said industrial device is a semiconductor manufacturing device.

44. :

A remote maintenance method according to claim 42, wherein when said industrial device detects said occurrence of a trouble, said industrial device generates candidate information indicating one or more candidates of said operation device to be notified of said status information, outputs said generated candidate information to said output device, and notifies said status information to an operation device designated by a user of said industrial device from said candidates of said candidate information.

45. :

A remote maintenance method according to claim 44, wherein said industrial device notifies said status information also to a different operation device from said candidate designated by said user.

46. :

A remote maintenance method according to claim 42, wherein said industrial device is a semiconductor manufacturing device.

48. :

An industrial device according to claim 47, wherein when said monitoring means detects said occurrence of a trouble, said monitoring means generates candidate information indicating one or more candidates of said operation device to be notified of said status information, and said output means outputs said candidate information generated by said monitoring means to said output device, and said communication means notifies said status information to an operation device designated by a user of said industrial device from said candidates output by said output means.

49. :

A remote maintenance method according to claim 47, wherein said communication means notifies said status information also to a different operation device from said candidate designated by said user.

50. :

A remote maintenance method according to claim 47, wherein said industrial device is a semiconductor manufacturing device.

47. :

An industrial device for receiving a maintenance operation from one or more operation devices connected via a network by remote control, comprising monitoring means for monitoring an occurrence of a trouble in said industrial device, when said industrial device detects an occurrence of a trouble, generating status information for identifying a condition of said trouble, deciding an operation device to be notified of said generated status information, and notifying said generated status information to said decided operation device, communication means for deciding a troubleshooting method for said trouble of said industrial device on the basis of said notified status information by said operation device and receiving command information indicating a maintenance command on the basis of said troubleshooting method from said industrial device, processing means for executing said process according to said command information received by said communication means, calculation means for generating charge information indicating a value for maintenance according to an identifier of said operation device to which said status information is notified by said monitoring means, and output means for outputting a whole or a part of said charge information generated by said calculation means to an output device.

51. :

A semiconductor device characterized in that said semiconductor device is manufactured under condition that an industrial device for executing a specific process and an operation device for maintaining said industrial device are connected to each other via a network, and said operation device transmits command information indicating a maintenance command to said industrial device, and said industrial device executes said process according to said received command information, generates charge information indicating a value for maintenance according to contents of said executed process, and outputs a whole or a part of said generated charge information to an output device of said industrial device.