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MICROMACHINED SHOCK SENSOR

  • US 20020184949A1
  • Filed: 06/04/2001
  • Published: 12/12/2002
  • Est. Priority Date: 06/04/2001
  • Status: Active Grant
First Claim
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1. A micromachined acceleration sensing unit comprising:

  • (a) a substrate with a surface;

    (b) a mount fixed to the substrate;

    (c) a cantilever beam extending from the mount over the substrate surface and free to bend in a plane above the substrate surface;

    (d) a proof mass fixed to the cantilever beam and supported by the cantilever beam above the surface of the substrate to permit translation of the proof mass and bending of the cantilever beam in a plane parallel to the substrate surface, the mount, cantilever beam and proof mass being electrically conductive and in electrical contact;

    (e) first and second sensing electrodes formed on the substrate on opposite sides of the proof mass and adjacent to the proof mass and having contact elements thereof spaced by a sensing gap from the proof mass such that displacements of the proof mass in response to accelerations brings the proof mass into contact with one or the other of the contact elements of the electrodes at a sufficient acceleration level; and

    (f) a test electrode formed on the substrate adjacent to the proof mass on one side thereof such that application of a voltage between the test electrode and the proof mass draws the proof mass toward the test electrode until at a sufficient voltage the proof mass contacts the sensing electrode that is on the same side of the proof mass as the test electrode.

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