Trench power semiconductor component
First Claim
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1. A trench power semiconductor component, comprising:
- a cell array having a trench formed therein and a first insulating layer lining said trench, said first insulating layer having a first thickness; and
an edge cell surrounding said cell array and having at least one edge trench formed therein with an outer side wall in relationship to said cell array said edge cell having a second insulating layer lining said edge trench and a conductive material at least partially filling said edge trench, said conductive material forming a field plate, said second insulating layer of said edge trench having a second thickness being greater than said first thickness at least on said outer side wall of said edge trench opposite said cell array.
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Abstract
A trench power semiconductor component is described which has an edge cell in which an edge trench is provided. The edge trench, at least on an outer side wall, has a thicker insulating layer than an insulating layer of trenches of the cell array. This simple configuration provides a high dielectric strength and is economical to produce.
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10 Claims
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1. A trench power semiconductor component, comprising:
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a cell array having a trench formed therein and a first insulating layer lining said trench, said first insulating layer having a first thickness; and
an edge cell surrounding said cell array and having at least one edge trench formed therein with an outer side wall in relationship to said cell array said edge cell having a second insulating layer lining said edge trench and a conductive material at least partially filling said edge trench, said conductive material forming a field plate, said second insulating layer of said edge trench having a second thickness being greater than said first thickness at least on said outer side wall of said edge trench opposite said cell array. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification