MEMS with flexible portions made of novel materials
First Claim
1. A MEMS device having at least a flexible portion formed of a nitride or oxynitride of at least one transition metal, and formed of a nitride or oxynitride of at least one metalloid or near metalloid.
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Accused Products
Abstract
MEMS devices are provided that are capable of movement due to a flexible portion formed of unique materials for this purpose. The MEMS device can have a flexible portion formed of a nitride or oxynitride of at least one transition metal, and formed of a nitride or oxynitride of at least one metalloid or near metalloid; a flexible portion formed of a single transition metal nitride or oxynitride and in the absence of any other metal or metalloid nitrides; a flexible portion formed of one or more late transition metal nitrides or oxynitrides; a flexible portion formed of a single transition metal in nitride form, and an additional metal substantially in elemental form; or a flexible portion formed of at least one metalloid nitride or oxynitride. The MEMS devices can be any device, though preferably one with a flexible portion such as an accelerometer, DC relay or RF switch, optical cross connect or optical switch, or micromirror arrays for direct view and projection displays. The flexible portion (e.g. the hinge of the micromirror) is preferably formed by sputtering a metal and/or metalloid target in nitrogen ambient so as to result in a sputtered hinge. It is also possible to form other parts of the MEMS device (e.g structural parts that do not flex).
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Citations
42 Claims
- 1. A MEMS device having at least a flexible portion formed of a nitride or oxynitride of at least one transition metal, and formed of a nitride or oxynitride of at least one metalloid or near metalloid.
- 11. A MEMS device having at least a flexible portion formed of a single transition metal nitride or oxynitride and in the absence of any other metal or metalloid nitrides.
- 20. A MEMS device having at least a flexible portion formed of one or more late transition metal nitrides or oxynitrides.
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28. A MEMS device having at least a flexible portion formed of a single transition metal in nitride form, and an additional metal substantially in elemental form.
- 32. A MEMS device having at least a flexible portion formed of at least one metalloid nitride or oxynitride.
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42. A MEMS device comprising at least two of the following:
- an early transition metal, a compound of an early transition metal, a late transition metal, a compound of a late transition metal, a metalloid, and a compound of a metalloid.
Specification