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MEMS with flexible portions made of novel materials

  • US 20020185699A1
  • Filed: 06/21/2002
  • Published: 12/12/2002
  • Est. Priority Date: 08/23/2000
  • Status: Active Grant
First Claim
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1. A MEMS device having at least a flexible portion formed of a nitride or oxynitride of at least one transition metal, and formed of a nitride or oxynitride of at least one metalloid or near metalloid.

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