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Reusable mass-sensor in manufacture of organic light-emitting devices

  • US 20020187253A1
  • Filed: 04/20/2001
  • Published: 12/12/2002
  • Est. Priority Date: 04/20/2001
  • Status: Active Grant
First Claim
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1. A method for depositing an evaporated or sublimed organic layer onto a structure which will form part of an organic light-emitting device, comprising the steps of:

  • a) depositing at a deposition zone organic material forming a layer of the organic light-emitting device;

    b) providing a movable sensor which, when moved into the deposition zone and is being coated during the depositing step, provides a signal representing the thickness of the organic material forming the layer;

    c) controlling the deposition of the organic material in response to the signal to control a deposition rate and thickness of the organic layer formed on the structure;

    d) moving the movable sensor from the deposition zone to a cleaning position; and

    e) removing organic material from the movable sensor to permit reuse of the movable sensor.

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