Reusable mass-sensor in manufacture of organic light-emitting devices

• US 20020187253A1
• Filed: 04/20/2001
• Published: 12/12/2002
• Est. Priority Date: 04/20/2001
• Status: Active Grant

• Current Assignee: Global OLED Technology LLC (LG Display Co., Ltd.)
• Original Assignee: Eastman Kodak Company
• Inventors: Marcus, Michael A., Van Slyke, Steven A., Hrycin, Anna L.
• Granted Patent: US 6,558,735 B2
• Time in Patent Office: Days
• US Class Current: 427/8
• CPC Class Codes: C23C 14/12 Organic material
• CPC Class Codes: C23C 14/546 using crystal oscillators
• CPC Class Codes: G01B 7/066 for measuring thickness of coating apparatus or processes for the manufacture of piezoelectric or electrostrictive resonators for obtaining desired frequency H03H3/04
• CPC Class Codes: H10K 50/11 characterised by the electroluminescent [EL] layers
• CPC Class Codes: H10K 71/164 using vacuum deposition

Abstract

A method for controlling the deposition of an organic layer in making an organic light-emitting device includes depositing at a deposition zone organic material forming a layer of the organic light-emitting device and providing a movable sensor which, when moved into the deposition zone and is being coated during the depositing step, provides a signal representing the deposition rate and thickness of the organic material forming the layer. The method also includes controlling the deposition of the organic material in response to the signal to control the deposition rate and thickness of the deposited organic material forming the layer, moving the movable sensor from the deposition zone to a cleaning position, and removing organic material from the movable sensor to permit reuse of the movable sensor.

Claims

1. A method for depositing an evaporated or sublimed organic layer onto a structure which will form part of an organic light-emitting device, comprising the steps of:

a) depositing at a deposition zone organic material forming a layer of the organic light-emitting device;

b) providing a movable sensor which, when moved into the deposition zone and is being coated during the depositing step, provides a signal representing the thickness of the organic material forming the layer;

c) controlling the deposition of the organic material in response to the signal to control a deposition rate and thickness of the organic layer formed on the structure;

d) moving the movable sensor from the deposition zone to a cleaning position; and

e) removing organic material from the movable sensor to permit reuse of the movable sensor.

2. A method for depositing an evaporated or sublimed organic layer onto a structure which will form part of an organic light-emitting device, comprising the steps of:

a) depositing at a deposition zone organic material forming a layer of the organic light-emitting device;

b) providing at least first and second movable sensors each one of which, when moved into the deposition zone is coated during a deposition of organic material and provides a signal representing the thickness of the organic material forming the layer;

c) controlling the deposition of the organic material in response to the signal to control a deposition rate and thickness of the organic layer formed on the structure;

d) moving the first movable sensor after it has been coated with organic material from the deposition zone to a cleaning position;

e) moving the second movable sensor into the deposition zone; and

f) removing organic material from the first movable sensor at the cleaning position to permit reuse of the first movable sensor.

3. Apparatus for depositing an evaporated or sublimed organic layer onto a structure which will form part of an organic light-emitting device, comprising:

a) a housing defining a chamber and a pump connected to the chamber for reducing the pressure therein;

b) a source for receiving organic material to be evaporated or sublimed and means connected to the source for adjusting the temperature thereof to control the rate at which the organic material is evaporated or sublimed;

c) means for positioning the structure so that such structure is located spaced from the source in a deposition zone;

d) a movable sensor positioned in the deposition zone for receiving organic material from the source at the same time such organic material is deposited onto the structure;

e) electrical means connected to the sensor and responsive to the thickness of the organic material deposited on the sensor for adjusting the temperature control means to control the rate of deposition and the thickness of the organic layer formed on the structure; and

f) means for moving the sensor out of the deposition zone and means for removing in whole or in part organic material deposited on the sensor so that such sensor can be reused in the deposition zone.

4. The apparatus of claim 3 wherein the sensor is disposed on a movable sensor support and the means for removing organic material deposited on the sensor includes flashed radiation or a timed radiation beam directed towards the organic material on the sensor.

5. The apparatus of claim 4 further including a radiation-absorbing layer preformed on the sensor.

6. The apparatus of claim 3 wherein the sensor is disposed on a movable sensor support and the means for removing organic material deposited on the sensor includes a heater positioned proximate the organic material on the sensor.

7. The apparatus of claim 6 further including a heat-absorbing layer preformed on the sensor.

15. The apparatus of claim 4 further including a trap for collecting organic material removed from the sensor by the means for removing such organic material.

8. Apparatus for depositing an evaporated or sublimed organic layer onto a structure which will form part of an organic light-emitting device, comprising:

a) a housing defining a chamber and a pump connected to the chamber for reducing the pressure therein;

b) a source for receiving organic material to be evaporated or sublimed and means connected to the source for adjusting the temperature thereof to control the rate at which the organic material is evaporated or sublimed;

c) means for positioning the structure so that such structure is located spaced from the source in a deposition zone;

d) a first movable sensor of a plurality of movable sensors positioned in the deposition zone for receiving organic material from the source at the same time such organic material is deposited onto the structure;

e) electrical means connected to the first movable sensor and responsive to the thickness of the organic material deposited on the sensor for adjusting the temperature control means to control the rate of deposition and the thickness of the organic layer formed on the structure;

f) means for moving the first sensor out of the deposition zone and means for removing in whole or in part organic material deposited on the sensor so that such sensor can be reused in the deposition zone; and

g) means for moving a second movable sensor of the plurality of movable sensors into the deposition zone and electrical means connected to such second sensor.

9. The apparatus of claim 8 wherein the plurality of sensors are disposed on a movable sensor support and the means for removing organic material deposited on the first sensor includes flashed radiation or a timed radiation beam directed towards the organic material on the sensor.

10. The apparatus of claim 9 further including a radiation-absorbing layer preformed on each of the plurality of sensors.

11. The apparatus of claim 8 wherein the plurality of sensors are disposed on a movable sensor support and the means for removing organic material deposited on the first sensor includes a heater positioned proximate the organic material on the sensor.

12. The apparatus of claim 11 further including a heat-absorbing layer preformed on each of the plurality of sensors.

13. The apparatus of claim 9 wherein the movable sensor support is a rotatable sensor support.

14. The apparatus of claim 11 wherein the movable sensor support is a rotatable sensor support.

16. The apparatus of claim 15 wherein the trap includes means for cooling.

17. The apparatus of claim 9 further including a trap for collecting organic material removed from the first sensor by the means for removing such organic material.

18. The apparatus of claim 17 wherein the trap includes means for cooling.