Microfabricated surgical device
First Claim
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1. A microfabricated surgical device comprising:
- an end portion and a body portion made of a conformally coated polymer.
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Abstract
This invention relates to microfabricated surgical devices made of a conformally coated polymer.
65 Citations
55 Claims
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1. A microfabricated surgical device comprising:
- an end portion and a body portion made of a conformally coated polymer.
- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A microfabricated surgical device comprising:
a tip and a shaft made of a conformal layer of a polymer, wherein at least a portion of the shaft is hollow. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
- 22. A microfabricated needle comprising a tip and a shaft each including a conformal polymer layer.
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30. A method of making a microfabricated surgical device comprising:
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defining features of the device in a surface of a first substrate;
joining a second substrate to the surface of the first substrate to define a mold cavity;
conformally depositing a polymer in the mold cavity to form the device; and
removing the device from the mold cavity. - View Dependent Claims (31, 32, 33, 34, 36, 37, 38, 39)
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35. A method of making a microfabricated surgical device comprising:
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defining features of the device in a surface of a first substrate;
forming a sacrificial release layer on the surface of the first substrate;
joining a second substrate to the first substrate to define a mold cavity;
forming a conformal layer of a polymer in the mold cavity; and
removing the sacrificial release layer to release the device form the mold cavity.
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40. A method of making a microfabricated surgical device comprising:
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providing a substrate having a thickness approximately equal to a thickness of the device;
defining features of the device by forming a mold from the substrate;
forming a conformal layer of a polymer on the mold; and
removing at least a portion the mold such that the device includes a hollow portion.
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41. A method for making a microfabricated surgical device comprising:
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providing a substrate having a thickness approximately equal to a thickness of the device;
defining features of the device by etching through the substrate to form a mold;
forming a conformal layer of a polymer on the mold; and
etching the mold such that the device includes a hollow portion. - View Dependent Claims (42, 43, 44, 45, 47, 48, 49, 50, 51, 52, 53, 54)
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46. A process for making a microneedle comprising:
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defining features of the microneedle in a surface of a first substrate;
coating the surface of the first substrate with a first sacrificial layer;
forming a metallic layer on the first sacrificial layer;
coating the metallic layer with a second sacrificial layer and patterning the second sacrificial layer;
joining a second substrate to the first substrate to define a mold cavity;
conformally depositing a polymer layer in the mold cavity to form the microneedle; and
etching the first and second sacrificial layers to remove the microneedle from the mold.
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55. A method of making a microfabricated surgical device comprising:
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defining features of the device in a surface of a first substrate;
forming a sacrificial release layer on the surface of the first substrate;
depositing a silicon nitride layer on the sacrificial release layer;
joining a second substrate to the first substrate to define a mold cavity;
forming a conformal layer of a polymer in the mold cavity; and
removing the sacrificial release layer to release the device form the mold cavity.
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Specification