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Method and system for managing semiconductor manufacturing equipment

  • US 20020188367A1
  • Filed: 07/29/2002
  • Published: 12/12/2002
  • Est. Priority Date: 09/30/1998
  • Status: Active Grant
First Claim
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1. A method of managing the operation of semiconductor manufacturing equipment comprising the steps of:

  • sampling a plurality of data of at least one parameter under a normal operating condition of said semiconductor manufacturing equipment;

    generating a Mahalanobis space on the basis of a group of sampled data;

    calculating, on the basis of said Mahalanobis space, a Mahalanobis distance from a group of measured values of said parameters under the actual operating condition of said semiconductor manufacturing equipment; and

    when a calculated Mahalanobis distance exceeds a predetermined value, making a decision that a malfunction occurred in said semiconductor manufacturing equipment.

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