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Mass sensor and mass sensor method

  • US 20020189375A1
  • Filed: 08/08/2002
  • Published: 12/19/2002
  • Est. Priority Date: 09/04/1998
  • Status: Abandoned Application
First Claim
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1. A mass sensor comprising:

  • a first connecting plate and a second connecting plate each having at least one of a slit, an opening portion, and a thin-walled portion and a thick-walled portion formed therein;

    a first diaphragm joined with said first connecting plate at respective side surfaces thereof, and a second diaphragm joined with said second connecting plate at respective side surfaces thereof, between which connecting plates a first sensing plate to which a piezoelectric element is provided at least on a part of at least one surface is bridged; and

    a sensor substrate joined with the first connecting plate and the second connecting plate at respective side surfaces thereof so that the sensor substrate is positioned on a side opposite to the first diaphragm and the second diaphragm, wherein said diaphragms, said connecting plates, said sensing plate, and said piezoelectric element form a resonating portion.

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