Mass sensor and mass sensor method
First Claim
1. A mass sensor comprising:
- a first connecting plate and a second connecting plate each having at least one of a slit, an opening portion, and a thin-walled portion and a thick-walled portion formed therein;
a first diaphragm joined with said first connecting plate at respective side surfaces thereof, and a second diaphragm joined with said second connecting plate at respective side surfaces thereof, between which connecting plates a first sensing plate to which a piezoelectric element is provided at least on a part of at least one surface is bridged; and
a sensor substrate joined with the first connecting plate and the second connecting plate at respective side surfaces thereof so that the sensor substrate is positioned on a side opposite to the first diaphragm and the second diaphragm, wherein said diaphragms, said connecting plates, said sensing plate, and said piezoelectric element form a resonating portion.
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Accused Products
Abstract
A mass sensor including first and second connecting plates having a slit, an opening portion, and/or a thin-walled portion and a thick-walled portion formed therein; a first diaphragm joined with the first connecting plate at respective side surfaces thereof, and a second diaphragm joined with the second connecting plate at respective side surfaces thereof, between which connecting plates a first sensing plate to which a piezoelectric element is provided at least on a part of at least one surface is bridged; and a sensor substrate joined with the first and second connecting plates at respective side surfaces thereof so that the sensor substrate is positioned on a side opposite to the first diaphragm and the second diaphragm, wherein the diaphragms, connecting plates, sensing plate, and piezoelectric element form a resonating portion.
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Citations
25 Claims
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1. A mass sensor comprising:
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a first connecting plate and a second connecting plate each having at least one of a slit, an opening portion, and a thin-walled portion and a thick-walled portion formed therein;
a first diaphragm joined with said first connecting plate at respective side surfaces thereof, and a second diaphragm joined with said second connecting plate at respective side surfaces thereof, between which connecting plates a first sensing plate to which a piezoelectric element is provided at least on a part of at least one surface is bridged; and
a sensor substrate joined with the first connecting plate and the second connecting plate at respective side surfaces thereof so that the sensor substrate is positioned on a side opposite to the first diaphragm and the second diaphragm, wherein said diaphragms, said connecting plates, said sensing plate, and said piezoelectric element form a resonating portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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Specification