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Apparatus for adjusting the resonance frequency of a microelectromechanical (MEMS) resonator using tensile/compressive strain and applications therefor

  • US 20020190603A1
  • Filed: 06/11/2001
  • Published: 12/19/2002
  • Est. Priority Date: 06/11/2001
  • Status: Active Grant
First Claim
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1. A method comprising:

  • manufacturing a resonator beam having a first end and a second end, said resonator beam suspended above a substrate by said first end and said second end, said resonator beam having a first end connected to an actuator; and

    using said actuator to applying an actuation force to resonator beam to apply strain onto said resonator beam.

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