Method for forming a magnetic sensor that uses a lorentz force and a piezoelectric effect
First Claim
1. A method for sensing a magnetic field, comprising:
- (a) applying a direct-current voltage across a first layer of a conductive material wherein a direct current flows in a first direction;
(b) positioning a second layer of a piezoelectric material adjacent the first layer and within the magnetic field;
(c) generating a Lorentz force in a second direction generally perpendicular to the first direction to deflect the piezoelectric layer;
(d) detecting a voltage output of the piezoelectric layer; and
(e) calculating a magnetic flux density of the magnetic field as a function of the voltage output of the piezoelectric layer as caused by the Lorentz force.
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Abstract
A method and apparatus for sensing a presence of a magnetic field and/or a magnitude of a magnetic flux density of the magnetic field. A direct-current voltage is applied across a first layer of a conductive material, so that a direct current flows in a first direction through the first layer. A second layer of a piezoelectric material is integrated with or positioned adjacent or abutting the first layer. The first layer and the second layer are exposed to or positioned within a magnetic field. A Lorentz force is thus caused, preferably in a direction which is generally perpendicular to the first direction of the direct current and a second direction of the magnetic field to deflect the piezoelectric material thereby causing an output voltage in response to the Lorentz force. A magnetic flux density can be calculated as a function of the piezoelectric output.
15 Citations
21 Claims
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1. A method for sensing a magnetic field, comprising:
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(a) applying a direct-current voltage across a first layer of a conductive material wherein a direct current flows in a first direction;
(b) positioning a second layer of a piezoelectric material adjacent the first layer and within the magnetic field;
(c) generating a Lorentz force in a second direction generally perpendicular to the first direction to deflect the piezoelectric layer;
(d) detecting a voltage output of the piezoelectric layer; and
(e) calculating a magnetic flux density of the magnetic field as a function of the voltage output of the piezoelectric layer as caused by the Lorentz force. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. An apparatus for sensing a magnetic field, comprising:
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a first layer of a conductive material, a voltage source attached to and directing a current in a first direction through the first layer;
a second layer of a piezoelectric material positioned adjacent the first layer;
a base structure forming a gap, the second layer attached to the base, at least a portion of the second layer spanning at least a portion of the gap. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A method for sensing a magnetic field, comprising:
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(a) providing a substrate;
(b) etching the substrate to provide a gap;
(c) forming a conductive layer extending at least partially over the gap;
(d) forming a piezoelectric layer extending over the gap and positioned adjacent to the conductive layer; and
(e) emitting a signal output from the piezoelectric layer as a function of a generated Lorentz force.
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Specification