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Capacitance type sensor

  • US 20020190727A1
  • Filed: 06/17/2002
  • Published: 12/19/2002
  • Est. Priority Date: 03/14/2001
  • Status: Active Grant
First Claim
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1. A capacitance type sensor characterized by comprising:

  • a substrate for determining an XY plane in a defined XYZ three-dimensional coordinate system;

    a detective member being opposite to said substrate;

    a conductive member disposed between said substrate and said detective member, said conductive member being displaceable in a Z-axis direction as said detective member is displaced in a Z-axis direction;

    a reference electrode formed on said substrate and electrically connected with said conductive member, said reference electrode being grounded or kept at a fixed potential;

    a first electrode formed on said substrate;

    a second electrode formed on said substrate to constitute a first capacitance element with said conductive member; and

    a third electrode disposed at a distance from said first electrode so that said third electrode can be brought into contact with said first electrode as said conductive member is displaced, and by being capable of recognizing at least one of the displacement of said detective member on the basis of a detection, using a signal input to said second electrode, of a change in capacitance value of said first capacitance element caused by a change in distance between said conductive member and said second electrode, and a judgment as to whether or not said first and third electrodes are in contact with each other.

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