Electrostatic zipper actuator optical beam switching system and method of operation

• US 20020191267A1
• Filed: 05/23/2001
• Published: 12/19/2002
• Est. Priority Date: 05/23/2001
• Status: Active Grant

• Current Assignee: Excelitas Technologies Corporation (Excelitas Technologies Holdings LLC)
• Original Assignee: Axsun Technologies Incorporated
• Inventors: Flanders, Dale C., Schmidt, Martin A.
• Granted Patent: US 6,671,078 B2
• Time in Patent Office: Days
• US Class Current: 359/254
• CPC Class Codes: B81B 2201/045 Optical switches
• CPC Class Codes: B81B 3/0021 Transducers for transforming electrical into mechanical energy or vice versa dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00
• CPC Class Codes: G02B 26/02 for controlling the intensity of light G02B26/004 takes precedence
• CPC Class Codes: G02B 6/353 the optical element being a shutter, baffle, beam dump or opaque element absorbers on light guide termination G02B6/243
• CPC Class Codes: G02B 6/3552 1x1 switch, e.g. on/off switch
• CPC Class Codes: G02B 6/3566 involving bending a beam, e.g. with cantilever
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/358 Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system

Abstract

A zipper actuator for optical beam control has an optical port formed through the substrate. The cantilevered beam of the actuator preferably includes a paddle for switching the optical signal. Mirror structures can be provided on the paddle for beam switching. In some embodiments, MEMS or electrode latches are further provided.

Claims

1. A micro-optical electromechanical system, comprising:

a substrate having an optical port formed through the substrate;

a stationary electrode on the substrate; and

a cantilevered beam extending from the substrate wherein an electric field between the stationary electrode and the cantilevered beam causes the cantilevered beam to pivot toward the stationary electrode in a plane of the substrate.

2. A micro-optical electromechanical system as claimed in claim 1, wherein a face of the stationary electrode adjacent the cantilevered beam is arcuate.

3. A micro-optical electromechanical system as claimed in claim 1, wherein the stationary electrode is semicircular or circular.

4. A micro-optical electromechanical system as claimed in claim 1, wherein cantilevered beam flexes toward the stationary electrode in response to the electric field.

5. A micro-optical electromechanical system as claimed in claim 1, wherein the optical port is located relative to the cantilevered beam such that pivoting causes the cantilevered beam to intercept an optical signal that is directed to pass through the optical port.

6. A micro-optical electromechanical system as claimed in claim 1, wherein the beam modulates a magnitude of the optical signal transmitted though the optical port.

7. A micro-optical electromechanical system, comprising:

a substrate;

a stationary electrode on the substrate;

a cantilevered beam extending from the substrate wherein an electric field between the stationary electrode and the cantilevered beam causes the cantilevered beam to pivot toward the stationary electrode in a plane of the substrate; and

a paddle of the cantilevered beam for modulating an optical signal.

8. A micro-optical electromechanical system as claimed in claim 7, wherein the paddle extends parallel to the substrate.

9. A micro-optical electromechanical system as claimed in claim 7, wherein the paddle moves relative to an optical port region of the substrate to switch an optical signal that is directed to pass through the optical port region.

10. A micro-optical electromechanical system as claimed in claim 7, wherein the optical port region comprises an antireflective coated region of the substrate.

11. A micro-optical electromechanical system as claimed in claim 10, wherein the optical port region comprises a hole formed at least partially through the substrate.

12. A micro-optical electromechanical system as claimed in claim 10, wherein the optical port region comprises a hole formed through the substrate.

13. A micro-optical electromechanical system as claimed in claim 7, wherein the paddle comprises a mirror structure for reflecting the optical signal.

14. A micro-optical electromechanical system as claimed in claim 7, wherein the mirror structure comprises a metal layer.

15. A micro-optical electromechanical system as claimed in claim 14, wherein the mirror structure comprises a thin film dielectric stack.

17. A micro-optical electromechanical system as claimed in claim 16, wherein the stationary electrode has spiral shape.

19. A micro-optical electromechanical system as claimed in claim 18, wherein the latch comprises a substrate electrode for pulling the cantilevered beam toward the substrate.

20. A micro-optical electromechanical system as claimed in claim 18, wherein the latch comprises an electrode for pulling the cantilevered beam toward the substrate over an optical port region.

21. A micro-optical electromechanical system as claimed in claim 18, further comprising a paddle on the cantilevered beam for selectively covering an optical port region in response to pivoting of the cantilevered beam.

22. A micro-optical electromechanical system as claimed in claim 18, wherein the paddle comprises a mirror structure for reflecting the optical signal.

23. A micro-optical electromechanical system as claimed in claim 18, wherein the latch engages the cantilevered beam to hold the cantilevered beam.

24. A micro-optical electromechanical system as claimed in claim 18, further comprising a latch release mechanism disengaging the latch from the cantilevered beam.

26. A micro-optical electromechanical system as claimed in claim 25, wherein the paddle comprises filter material.

27. A micro-optical electromechanical system as claimed in claim 25, wherein the paddle comprises a mirror structure.

28. A micro-optical electromechanical system as claimed in claim 25, wherein the paddle comprises a grating.

16. A micro-optical electromechanical system, comprising:

a substrate having an optical port formed through the substrate;

a stationary electrode on the substrate; and

a curved cantilevered beam extending from the substrate and wrapping around the stationary electrode in a relaxed state, wherein an electric field between the stationary electrode and the cantilevered beam causes the cantilevered beam to curl around the stationary electrode in a plane of the substrate.

18. A micro optical electromechanical system, comprising:

a substrate;

a stationary electrode on the substrate; and

a cantilevered beam extending from the substrate, wherein an electric field between the stationary electrode and the cantilevered beam causes the cantilevered beam to pivot toward the stationary electrode in a plane of the substrate; and

a latch holding the cantilevered beam in a fixed location relative to the substrate.

25. A micro-optical electromechanical system, comprising:

a substrate;

a stationary electrode on the substrate;

a cantilevered beam extending from the substrate wherein an electric field between the stationary electrode and the cantilevered beam causes the cantilevered beam to pivot toward the stationary electrode in a plane of the substrate; and

a paddle, that is attached to the cantilevered beam, the paddle extending at least partially orthogonally to the substrate.