Electrostatic zipper actuator optical beam switching system and method of operation
First Claim
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1. A micro-optical electromechanical system, comprising:
- a substrate having an optical port formed through the substrate;
a stationary electrode on the substrate; and
a cantilevered beam extending from the substrate wherein an electric field between the stationary electrode and the cantilevered beam causes the cantilevered beam to pivot toward the stationary electrode in a plane of the substrate.
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Abstract
A zipper actuator for optical beam control has an optical port formed through the substrate. The cantilevered beam of the actuator preferably includes a paddle for switching the optical signal. Mirror structures can be provided on the paddle for beam switching. In some embodiments, MEMS or electrode latches are further provided.
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Citations
28 Claims
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1. A micro-optical electromechanical system, comprising:
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a substrate having an optical port formed through the substrate;
a stationary electrode on the substrate; and
a cantilevered beam extending from the substrate wherein an electric field between the stationary electrode and the cantilevered beam causes the cantilevered beam to pivot toward the stationary electrode in a plane of the substrate. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A micro-optical electromechanical system, comprising:
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a substrate;
a stationary electrode on the substrate;
a cantilevered beam extending from the substrate wherein an electric field between the stationary electrode and the cantilevered beam causes the cantilevered beam to pivot toward the stationary electrode in a plane of the substrate; and
a paddle of the cantilevered beam for modulating an optical signal. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15, 17, 19, 20, 21, 22, 23, 24, 26, 27, 28)
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16. A micro-optical electromechanical system, comprising:
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a substrate having an optical port formed through the substrate;
a stationary electrode on the substrate; and
a curved cantilevered beam extending from the substrate and wrapping around the stationary electrode in a relaxed state, wherein an electric field between the stationary electrode and the cantilevered beam causes the cantilevered beam to curl around the stationary electrode in a plane of the substrate.
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18. A micro optical electromechanical system, comprising:
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a substrate;
a stationary electrode on the substrate; and
a cantilevered beam extending from the substrate, wherein an electric field between the stationary electrode and the cantilevered beam causes the cantilevered beam to pivot toward the stationary electrode in a plane of the substrate; and
a latch holding the cantilevered beam in a fixed location relative to the substrate.
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25. A micro-optical electromechanical system, comprising:
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a substrate;
a stationary electrode on the substrate;
a cantilevered beam extending from the substrate wherein an electric field between the stationary electrode and the cantilevered beam causes the cantilevered beam to pivot toward the stationary electrode in a plane of the substrate; and
a paddle, that is attached to the cantilevered beam, the paddle extending at least partially orthogonally to the substrate.
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Specification