Wet and dry etching process on <110> silicon and resulting structures
First Claim
Patent Images
1. A method of forming an anisotropically wet etched sidewall adjacent to a dry etched sidewall in a <
- 110>
substrate, said method comprising;
directionally dry etching into an area of a <
110>
oriented substrate to form a dry etched sidewall;
coating the dry etched sidewall with a mask material resistant to an anisotropic wet etchant; and
anisotropically wet etching an area adjacent to the dry etched sidewall to form a wet etched sidewall.
4 Assignments
0 Petitions
Accused Products
Abstract
A method of producing smooth sidewalls on a micromachined device is described. A portion of the wafer is dry etched, forming a dry etched sidewall. The sidewall is covered with a mask. An area adjacent to the dry etched area is wet etched, forming a wet etched sidewall. The mask may optionally be removed after wet etching. The wafer substrate has a <110> orientation, which allows the wet etched area to have nearly vertical wet etched sidewalls.
89 Citations
31 Claims
-
1. A method of forming an anisotropically wet etched sidewall adjacent to a dry etched sidewall in a <
- 110>
substrate, said method comprising;
directionally dry etching into an area of a <
110>
oriented substrate to form a dry etched sidewall;
coating the dry etched sidewall with a mask material resistant to an anisotropic wet etchant; and
anisotropically wet etching an area adjacent to the dry etched sidewall to form a wet etched sidewall. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
- 110>
-
11. A micromachined device formed in a <
- 110>
crystal substrate, comprising;
a dry etched sidewall; and
an anisotropically wet etched sidewall adjacent to said dry etched sidewall. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31)
- 110>
Specification