Compliant mechanism and method of forming same

• US 20020196522A1
• Filed: 04/22/2002
• Published: 12/26/2002
• Est. Priority Date: 03/20/2000
• Status: Active Grant

• Current Assignee: Vividon, Inc. (BurstPoint Networks, Inc.), NP Photonics Incorporated
• Original Assignee: NP Photonics Incorporated
• Inventors: Tyrie, Thomas S., Little, Michael J., Eaton, William P.
• Granted Patent: US 6,747,784 B2
• Time in Patent Office: Days
• US Class Current: 359/290
• CPC Class Codes: A61K 38/00 Medicinal preparations containing peptides peptides containing beta-lactam rings A61K31/00; cyclic dipeptides not having in their molecule any other peptide link than those which form their ring, e.g. piperazine-2,5-diones, A61K31/00; ergot alkaloids of the cyclic peptide type A61K31/48; containing macromolecular compounds having statistically distributed amino acid units A61K31/74; medicinal preparations containing antigens or antibodies A61K39/00; medicinal preparations characterised by the non-active ingredients, e.g. peptides as drug carriers, A61K47/00
• CPC Class Codes: A61K 39/08 Clostridium, e.g. Clostridium tetani
• CPC Class Codes: B81B 2201/047 Optical MEMS not provided for in B81B2201/042 - B81B2201/045
• CPC Class Codes: B81B 2203/053 Translation according to an axis perpendicular to the substrate
• CPC Class Codes: B81B 2203/058 Rotation out of a plane parallel to the substrate
• CPC Class Codes: B81B 3/0021 Transducers for transforming electrical into mechanical energy or vice versa dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00
• CPC Class Codes: C07K 14/33 from Clostridium (G)
• CPC Class Codes: C07K 2319/00 Fusion polypeptide
• CPC Class Codes: G02B 2006/12104 Mirror; Reflectors or the like
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G02B 26/02 for controlling the intensity of light G02B26/004 takes precedence
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 6/3572 Magnetic force magnetic forces controlling reflecting elements in general G02B26/085; magneto-optic devices G02F1/09
• CPC Class Codes: G02B 6/358 Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C
• CPC Class Codes: G02B 6/3656 the additional structures being micropositioning, with microactuating elements for fine adjustment, or restricting movement, into two dimensions, e.g. cantilevers, beams, tongues or bridges with associated MEMs
• CPC Class Codes: G02B 6/3692 with surface micromachining involving etching, e.g. wet or dry etching steps surface micromachining involving subtractive techniques B81C1/00055
• CPC Class Codes: G02B 6/4226 Positioning means for moving the elements into alignment, e.g. alignment screws, deformation of the mount

Abstract

The present invention provides a compliant mechanism that can be used to make a variety of devices, such as tunable optical devices that are more reliable, more cost effective and/or exhibit better performance than prior art devices.

Claims

1. An apparatus, comprising:

a support member comprising a top and a bottom;

a non-rigid member attached to the bottom of the support member; and

an island member movably supported by the non-rigid member.

2. The apparatus of claim 1, wherein the support member comprises a frame.

3. The apparatus of claim 2, wherein the frame surrounds the island member.

4. The apparatus of claim 1, wherein the top of the island member is at least partially reflective.

5. The apparatus of claim 1, wherein the non-rigid material has a Young'"'"'s modulus that is smaller than a Young'"'"'s modulus of the island member.

6. The apparatus of claim 1, wherein the non-rigid material comprises an elastomer.

7. The apparatus of claim 1, wherein the non-rigid material exhibits substantially linear-elastic behavior over an operational frequency range of the apparatus.

8. An actuated mechanism, comprising:

a movable mechanism, comprising;

a support member comprising a top and a bottom,

a non-rigid member attached to the bottom of the support member, and

an island member movably supported by the non-rigid member; and

an actuator configured and positioned to move the island member in response to a control signal.

9. The actuated mechanism of claim 8, wherein the actuator comprises an electrostatic actuator.

10. The actuated mechanism of claim 8, wherein at least a portion of the actuator is attached to the island member.

11. The actuated mechanism of claim 8, wherein the actuator comprises:

at least one electrode positioned on the non-rigid member below the island member; and

at least one electrode disposed on an actuator support.