Method and apparatus for the confinement of materials in a micromachined chemical sensor array
First Claim
1. A system for detecting an analyte in a fluid comprising:
- a light source;
a sensor array, the sensor array comprising a supporting member comprising at least one cavity formed within the supporting member;
a particle, the particle positioned within the cavity, wherein the particle is configured to produce a signal when the particle interacts with the analyte during use; and
a detector, the detector being configured to detect the signal produced by the interaction of the analyte with the particle during use;
wherein the light source and detector are positioned such that light passes from the light source, to the particle, and onto the detector during use.
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Accused Products
Abstract
A system for the rapid characterization of multi-analyte fluids, in one embodiment, includes a light source, a sensor array, and a detector. The sensor array is formed from a supporting member into which a plurality of cavities may be formed. A series of chemically sensitive particles are, in one embodiment positioned within the cavities. The particles may produce a signal when a receptor coupled to the particle interacts with the analyte. Using pattern recognition techniques, the analytes within a multi-analyte fluid may be characterized. In an embodiment, each cavity of the plurality of cavities is designed to capture and contain a specific size particle. Flexible projections may be positioned over each of the cavities to provide retention of the particles in the cavities.
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Citations
459 Claims
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1. A system for detecting an analyte in a fluid comprising:
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a light source;
a sensor array, the sensor array comprising a supporting member comprising at least one cavity formed within the supporting member;
a particle, the particle positioned within the cavity, wherein the particle is configured to produce a signal when the particle interacts with the analyte during use; and
a detector, the detector being configured to detect the signal produced by the interaction of the analyte with the particle during use;
wherein the light source and detector are positioned such that light passes from the light source, to the particle, and onto the detector during use. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84, 85, 86, 87, 88, 89, 90, 91, 92, 93)
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94. A system for detecting an analyte in a fluid comprising:
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a light source;
a sensor array, the sensor array comprising;
a supporting member;
wherein a first cavity and a second cavity are formed within the supporting member;
a first particle positioned within the first cavity;
a second particle positioned within the second cavity, wherein the second particle comprises a reagent, wherein a portion of the reagent is removable from the second particle when contacted with a decoupling solution, and wherein the reagent is configured to modify the first particle, when the reagent is contacted with the first particle, such that the first particle will produce a signal when the first particle interacts with the analyte during use;
a first pump coupled to the supporting member, wherein the pump is configured to direct the fluid towards the first cavity;
a second pump coupled to the supporting member, wherein the second pump is configured to direct the decoupling solution towards the second cavity;
wherein a first channel is formed in the supporting member, the first channel coupling the first pump to the first cavity such that the fluid flows through the first channel to the first cavity during use, and wherein a second channel is formed in the supporting member, the second channel coupling the second cavity to the first cavity such that the decoupling solution flows from the second cavity through the second channel to the first cavity during use; and
a detector, the detector being configured to detect the signal produced by the interaction of the analyte with the particle during use;
wherein the light source and detector are positioned such that light passes from the light source, to the particle, and onto the detector during use. - View Dependent Claims (95, 96, 97, 98)
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99. A system for detecting an analyte in a fluid comprising:
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a light source;
a sensor array, the sensor array comprising at least one particle coupled to the sensor array, wherein the particle is configured to produce a signal when the particle interacts with the analyte; and
a detector configured to detect the signal produced by the interaction of the analyte with the particle;
wherein the light source and detector are positioned such that light passes from the light source, to the particle, and onto the detector during use.
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100. A sensor array for detecting an analyte in a fluid comprising:
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a supporting member;
wherein at least one cavity is formed within the supporting member;
a particle positioned within the cavity, wherein the particle is configured to produce a signal when the particle interacts with the analyte. - View Dependent Claims (101, 102, 103, 104, 105, 106, 107, 108, 109, 110, 111, 112, 113, 114, 115, 116, 117, 118, 119, 120, 121, 122, 123, 124, 125, 126, 127, 128, 129, 130, 131, 132, 133, 134, 135, 136, 137, 138, 139, 140, 141, 142, 143, 144, 145, 146, 147, 149, 150, 151, 152, 154, 155, 156, 157, 158, 159, 160, 162, 163, 164, 165, 166, 167, 168, 169, 170, 171, 172, 173, 174, 175, 176, 177, 178, 179, 180, 181, 182, 183, 184, 185, 186, 187, 188, 189, 190, 191, 192, 193, 194, 195, 196, 198, 199, 200, 201, 202, 203, 204, 205, 206, 207, 208, 209, 210, 211, 212, 213, 214, 215, 216, 217, 218, 219, 220, 221, 222, 223, 224, 225, 226, 227, 228, 229, 230, 231, 232, 233, 234, 235, 236, 237, 238, 239, 240, 241, 242, 243, 244, 245, 246, 247, 248, 249, 250, 251, 252, 254, 255, 256, 257, 258, 259, 260, 261, 262, 263, 265, 266, 267, 268, 269, 270, 271, 272, 273, 274, 275, 276, 277, 279, 280, 281, 282, 283, 284, 285, 286, 287, 288, 289, 290, 291, 292, 293, 294, 295, 296, 297, 298, 299, 300)
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148. A sensor array for detecting an analyte in a fluid comprising:
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a supporting member;
wherein a first cavity and a second cavity are formed within the supporting member;
a first particle positioned within the first cavity;
a second particle positioned within the second cavity, wherein the second particle comprises a reagent, wherein a portion of the reagent is removable from the second particle when contacted with a decoupling solution, and wherein the reagent is configured to modify the first particle, when the reagent is contacted with the first particle, such that the first particle will produce a signal when the first particle interacts with the analyte during use;
a first pump coupled to the supporting member, wherein the pump is configured to direct the fluid towards the first cavity;
a second pump coupled to the supporting member, wherein the second pump is configured to direct the decoupling solution towards the second cavity;
wherein a first channel is formed in the supporting member, the first channel coupling the first pump to the first cavity such that the fluid flows through the first channel to the first cavity during use, and wherein a second channel is formed in the supporting member, the second channel coupling the second cavity to the first cavity such that the decoupling solution flows from the second cavity through the second channel to the first cavity during use.
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153. A sensor array for detecting an analyte in a fluid comprising:
at least one particle coupled to a supporting member, wherein the particle is configured to produce a signal when the particle interacts with the analyte.
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161. A method for forming a sensor array configured to detect an analyte in a fluid, comprising:
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forming a cavity in a supporting member, wherein the supporting member comprises a silicon wafer;
placing a particle in the cavity, wherein the particle is configured to produce a signal when the particle interacts with the analyte; and
forming a cover upon a portion of the supporting member, wherein the cover is configured to inhibit dislodgement of the particle from the cavity.
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197. A method of sensing an analyte in a fluid comprising:
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passing a fluid over a sensor array, the sensor array comprising at least one particle positioned within a cavity of a supporting member;
monitoring a spectroscopic change of the particle as the fluid is passed over the sensor array, wherein the spectroscopic change is caused by the interaction of the analyte with the particle.
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253. A particle for detecting an analyte in a fluid comprising:
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a polymeric resin;
a biopolymer coupled to the polymeric resin; and
an indicator system coupled to the biopolymer, the indicator system producing a signal, and wherein the biopolymer undergoes a chemical reaction in the presence of the analyte such that the signal is altered.
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264. A particle for detecting an analyte in a fluid comprising:
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a polymeric resin;
a receptor coupled to the polymeric resin; and
a probe molecule coupled to the biopolymer, the probe molecule configured to produce a signal when the receptor interacts with the analyte during use.
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278. A particle for detecting an analyte in a fluid comprising:
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a polymeric resin;
a receptor coupled to the polymeric resin by a first linker; and
an indicator coupled to the first linker, the indicator configured to produce a signal when the receptor interacts with the analyte during use.
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301. A particle for detecting an analyte in a fluid comprising:
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a polymeric resin;
a biopolymer coupled to the polymeric resin; and
an indicator system coupled to the biopolymer, the indicator system producing a signal during use, and wherein the biopolymer undergoes a chemical reaction in the presence of the analyte such that the signal is altered during use. - View Dependent Claims (302, 303, 304, 305, 308)
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306. The particle of claim 689, wherein the first indicator is a fluorescent dye and wherein the second indicator is a fluorescence quencher, and wherein the first indicator and the second indicator are positioned such that the fluorescence of the first indicator is at least partially quenched by the second indicator, and wherein the chemical reaction of the biopolymer in the presence of the analyte causes the first and second indicators to move such that the quenching of the fluorescence of the first indicator by the second indicator is altered.
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307. The particle of claim 689, wherein the first indicator is a fluorescent dye and wherein the second indicator is a different fluorescent dye, and wherein the first indicator and the second indicator produce a fluorescence resonance energy transfer signal, and wherein the chemical reaction of the biopolymer in the presence of the analyte causes the positions of the first and second indicators to change such that the fluorescence resonance energy transfer signal is altered.
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309. A method of forming a sensor array for detecting an analyte in a fluid, comprising:
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depositing a mask on a substrate;
forming an opening in the mask to expose a portion of the substrate;
etching the exposed portion of the substrate to form a cavity in the substrate, wherein a portion of the substrate under the mask is etched to form flexible projections positioned over a portion of the cavity; and
inserting a particle into the cavity, wherein the flexible projections substantially inhibit removal of the particle from the cavity, and wherein a particle, the particle positioned within the cavity, wherein the particle is configured to produce a signal when the particle interacts with the analyte during use.
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310. The method of claim 0, wherein the mask comprises silicon nitride.
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311. The method of claim 0, wherein the substrate comprises a bulk crystalline (100) silicon substrate.
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312. The method of claim 0, wherein an area of the opening formed in the mask is smaller than an area of a top opening of the cavity in the substrate.
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313. The method of claim 0, wherein the opening formed in the mask comprises a square.
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314. The method of claim 0, wherein the opening formed in the mask comprises a circle.
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315. The method of claim 0, wherein the opening formed in the mask comprises a cross.
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316. The method of claim 0, wherein the opening formed in the mask comprises a star.
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317. The method of claim 0, wherein the opening formed in the mask comprises slits.
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318. The method of claim 0, wherein the mask comprises a plastic.
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319. The method of claim 0, wherein the cavity comprises a bottom opening.
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320. The method of claim 0, wherein the substrate allows fluid flow through the cavity.
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321. The method of claim 0, wherein the cavity comprises a bottom opening configured to allow passage of a particle smaller than the bottom opening through the cavity.
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322. The method of claim 0, wherein the cavity comprises a bottom opening configured to inhibit a particle larger than the bottom opening from passing through the cavity.
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323. The method of claim 0, wherein a top opening and a bottom opening of the cavity provide selection of the particle substantially contained in the cavity.
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324. The method of claim 0, wherein the cavity comprises a top opening configured to inhibit a particle larger than the top opening from passing into the cavity through the flexible projections.
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325. The method of claim 0, wherein the cavity comprises a top opening configured to allow a particle smaller than the top opening into the cavity through the flexible projections.
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326. The method of claim 0, wherein the particle is smaller than a top opening and larger than a bottom opening of the cavity.
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327. The method of claim 0, further comprising forming a plurality of cavities in the substrate.
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328. The method of claim 0, wherein from about 10 to about 106 cavities are formed in the substrate.
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329. The method of claim 0, further comprising providing a plurality of particles to the substrate.
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330. The method of claim 0, further comprising inserting a plurality of particles in a plurality of cavities in the substrate.
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331. The method of claim 0, further comprising directing a solution of particles towards a top opening of the cavity, wherein the particle of desired size is transferred into the cavity.
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332. The method of claim 0, further comprising exposing the particle to a medium to shrink the particle for insertion into the cavity, wherein swelling of the particle after insertion into the cavity substantially contains the particle within the cavity.
- 333. The method of claim 0, wherein the flexible projections exhibit an elastic behavior, and wherein the flexible projections bend downward to allow insertion of the particle into the cavity, and wherein the flexible projections return upward to substantially contain the particle in the cavity.
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334. The method of claim 0, wherein anisotropically etching the substrate comprises etching a bulk crystalline (100) silicon substrate to the (111) planes in the substrate.
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335. The method of claim 0, wherein the mask comprises silicon dioxide.
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336. The method of claim 0, wherein the mask comprises a dry film photoresist material.
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337. The method of claim 0, further comprising illuminating the particle with a light source, wherein the flexible projections are transparent to light generated by the light source.
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338. The method of claim 0, wherein the flexible projections are configured to elastically bend into the cavity in the substrate.
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339. The method of claim 0, further comprising depositing a second mask, the second mask configured to inhibit the flexible projections bending from an initial position to a position away from the cavity.
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340. The method of claim 0, wherein inserting the particle into the cavity comprises using airflow to pull the particle through the flexible projections.
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341. The method of claim 0, wherein inserting the particle into the cavity comprises electrically actuating the flexible projections to allow insertion of the particle into the cavity.
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342. A sensor array for detecting an analyte in a fluid, comprising:
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a substrate, wherein the substrate comprises at least one cavity;
a particle positioned within the cavity, wherein the particle is configured to produce a signal upon interaction with the analyte; and
a flexible projection positioned over a portion of the cavity, wherein the flexible projection is configured to substantially inhibit displacement of the particle during use.
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375. A method for forming a sensor array for selecting a particle, comprising:
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depositing a mask on a substrate;
forming an opening in the mask to expose a portion of the substrate;
anisotropically etching the exposed portion of the substrate to form a cavity in the substrate, wherein the cavity comprises a top opening and a bottom opening; and
inserting a particle into the cavity, wherein a diameter of the particle is smaller than the top opening of the cavity, and wherein the diameter of the particle is larger than the bottom opening of the cavity, wherein the particle is configured to produce a signal when the particle interacts with the analyte during use.
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399. A sensor array for selecting a particle comprising:
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a substrate, wherein the substrate comprises at least one cavity, the cavity comprising;
a top opening; and
a bottom opening;
wherein the cavity is configured to allow fluid to pass through the substrate through the top opening and the bottom opening of the cavity; and
a particle positioned within the cavity, wherein the particle is configured to produce a signal when the particle interacts with the analyte during use; and
wherein a diameter of the particle is smaller than the top opening of the cavity, and wherein the diameter of the particle is larger than the bottom opening of the cavity.
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422. A sensor array for detecting a analytes in a fluid, comprising:
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a substrate;
a first cavity formed in the substrate, the first cavity having a first top opening and a first bottom opening;
a second cavity formed in the substrate, the second cavity having a second top opening and a second bottom opening;
a first particle positioned in the first cavity having a first particle size, wherein the first particle is configured to produce a signal when the first particle interacts with an analyte during use;
a second particle positioned in the second cavity having a second particle size, wherein the second particle is configured to produce a signal when the second particle interacts with an analyte during use;
wherein the second particle size is greater than the first top opening and wherein the first particle size is less than the second bottom opening. - View Dependent Claims (423, 424, 425, 426, 427, 428, 429, 430, 431, 432, 433, 434, 435, 436, 437, 438, 439, 440, 441, 442, 443, 444, 446, 447, 448, 449, 450)
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445. A method of forming a sensor array for detecting an analyte in a fluid, comprising:
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forming a first and second cavity in a substrate, the first cavity has a first top opening and a first bottom opening, and wherein the second cavity has a second top opening and a second bottom opening; and
placing a mixture of a first and a second particle on the substrate, wherein the first particle has a first particle size, and wherein the first particle is configured to produce a signal when the first particle interacts with an analyte during use, and wherein the second particle has a second particle size, wherein the second particle is configured to produce a signal when the second particle interacts with an analyte during use, and wherein the second particle size is greater than the first top opening and wherein the first particle size is less than the second bottom opening;
inserting the particles into the cavities.
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451. A method of forming a sensor array, comprising:
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depositing a mask on a substrate;
forming an opening in the mask to expose a portion of the substrate;
anisotropically etching the exposed portion of the substrate to form a cavity in the substrate, wherein the cavity comprises a top opening and a bottom opening;
undercutting the mask during etching of the substrate to form flexible projections positioned over the cavity such that the opening in the mask is smaller than the top opening of the cavity; and
inserting a particle into the cavity, wherein a diameter of the particle is smaller than the top opening of the cavity and larger than the bottom opening of the cavity, and wherein the flexible projections substantially contain the particle in the cavity.
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452. A sensor array, comprising:
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a substrate having at least one cavity, the cavity comprising;
a top opening; and
a bottom opening;
wherein the cavity is configured to allow fluid to pass through the substrate through the top opening and the bottom opening of the cavity;
a particle positioned within the cavity; and
a flexible projection positioned over the cavity;
wherein the flexible projection is configured to contain the particle in the cavity during use.
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453. A method of sorting various sized particles, comprising:
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depositing a mask on a substrate;
forming an opening in the mask to expose a portion of the substrate;
anisotropically etching the exposed portion of the substrate to form a cavity in the substrate, the cavity having a top opening larger than a bottom opening; and
pulling a solution of various sized particles through the substrate through the top opening and the bottom opening of the cavity of the substrate.
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454. A device for sorting various sized particles, comprising:
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a substrate having at least one cavity, the at least one cavity comprising;
a top opening; and
a bottom opening;
wherein the top opening of the cavity is larger than the bottom opening of the cavity; and
wherein the cavity is configured to allow fluid containing various sized particles to pass through the substrate through the top opening and the bottom opening of the at least one cavity during use.
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455. A method of placing an array of particles on a target, comprising:
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depositing a mask on a substrate;
forming a plurality of openings in the mask to expose portions of the substrate;
anisotropically etching the exposed portions of the substrate to form a plurality of cavities in the substrate, wherein the plurality of cavities having top openings larger than bottom openings;
pulling a solution of particles through the substrate through the top openings and the bottom openings of the plurality of cavities of the substrate;
positioning the substrate in a desired position over the target; and
dislodging particles captured in the cavities of the substrate onto the target.
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456. A method of forming a check valve assembly, comprising:
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depositing a first mask on a substrate;
forming a first opening in the first mask to expose a portion of the substrate;
anisotropically etching the exposed portion of the substrate to form a cavity in the substrate;
undercutting the first mask during etching of the substrate to form flexible projections positioned over the cavity;
forming a second opening in a second mask, wherein the second opening is positioned over the first opening in the first mask; and
inserting a particle into the cavity in the substrate through the flexible projections, wherein a diameter of the particle is larger than the second opening in the second mask and larger than a length of a bottom opening of the cavity, and wherein the diameter of the particle is smaller than a width of the bottom opening of the cavity.
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457. A check valve assembly, comprising:
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a substrate, wherein the substrate comprises a cavity;
a particle positioned in the cavity, wherein a diameter of the particle is larger than a top opening into the cavity and larger than a length of a bottom opening of the cavity, and wherein the diameter of the particle is smaller than a width of the bottom opening of the cavity; and
a flexible projection positioned over the cavity, wherein the flexible projection is configured to allow insertion of the particle in the cavity;
wherein fluid flow is allowed in a direction from the top opening through the bottom opening of the cavity, and wherein fluid flow is substantially inhibited in a reverse direction during use.
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458. A method of forming a check valve assembly, comprising:
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depositing a mask on a substrate;
forming slits in the mask;
anisotropically etching the substrate through the slits in the mask to form a cavity in the substrate, wherein the cavity comprises a top opening and a bottom opening; and
undercutting the mask during etching of the substrate to form flexible projections positioned over the cavity, wherein the flexible projections allow fluid flow in a direction from the top opening through the bottom opening of the cavity, and wherein the flexible projections substantially inhibit fluid flow in a reverse direction.
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459. A check valve assembly, comprising:
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a substrate, wherein the substrate comprises a cavity; and
a flexible projection positioned over a top opening of the cavity;
wherein the flexible projection allows fluid flow through the substrate in a direction from the top opening through a bottom opening of the cavity, and wherein the flexible projections substantially inhibit fluid flow in a reverse direction during use.
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Specification