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System and method for programmable illumination pattern generation

  • US 20020198665A1
  • Filed: 03/16/2002
  • Published: 12/26/2002
  • Est. Priority Date: 09/17/2000
  • Status: Active Grant
First Claim
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1. An apparatus for programmably generating an illumination pattern superimposed onto a substrate, said illumination pattern having a predetermined arrangement of light and dark zones, said apparatus comprising:

  • an illumination source;

    a reconfigurable mask composed of an array of pixels, said pixels being actively controllable and directly addressable by means of a computer-controlled circuit and computer interface, said computer-controlled circuit being operated using a software program providing temporal control of the intensity of illumination emanating from each pixel so as to form the illumination pattern comprising the predetermined arrangement of light and dark zones;

    a projection system suitable for imaging the reconfigurable mask onto the substrate; and

    an imaging system incorporating a camera capable of viewing said substrate with superimposed illumination pattern.

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