Method, system and medium for process control for the matching of tools, chambers and/or other semiconductor-related entities
First Claim
1. A computer-implemented method of converging, to a target setting, processing results generated by one or more semi-conductor processing entities, the one or more processing entities including (or itself acting as the) at least one comparably configured component, the method comprising the steps of:
- (A) collecting data representative of one or more behaviors of at least one of the one or more processing entities, said one or more behaviors being collected in the course of the results of the one or more processing entities converging to (or attempting to maintain proximity with) the target setting; and
(B) sharing information, relating to the data representative of the one or more behaviors, with the one or more processing entities comparably configured with the at least one of the one or more processing entities from which the data was collected, wherein the sharing of the information facilitates the one or more processing entities receiving the data to converge to (or attempt to maintain proximity with) the target setting.
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Accused Products
Abstract
The invention relates to a method, system and computer program useful for producing a product, such as a microelectronic device, for example in an assembly line, where the production facility includes parallel production of assembly lines of products on identically configured chambers, tools and/or modules. Control is provided between such chambers. Behaviors of a batch of wafers (or of each wafer) are collected as the first batch (or each wafer) is processed by one of the identically configured chambers in one assembly line to produce the microelectronic device. The information relating to the behavior is shared with a controller of another one (or more) of the identically configured chambers, process tools and/or modules, to provide an adjustment of the process tool and thereby to produce a second batch (or next wafer) which is substantially identical, within tolerance, to the first batch (or wafer).
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Citations
44 Claims
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1. A computer-implemented method of converging, to a target setting, processing results generated by one or more semi-conductor processing entities, the one or more processing entities including (or itself acting as the) at least one comparably configured component, the method comprising the steps of:
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(A) collecting data representative of one or more behaviors of at least one of the one or more processing entities, said one or more behaviors being collected in the course of the results of the one or more processing entities converging to (or attempting to maintain proximity with) the target setting; and
(B) sharing information, relating to the data representative of the one or more behaviors, with the one or more processing entities comparably configured with the at least one of the one or more processing entities from which the data was collected, wherein the sharing of the information facilitates the one or more processing entities receiving the data to converge to (or attempt to maintain proximity with) the target setting. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39)
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14. A computer program for converging, to a target setting, processing results generated by one or more semi-conductor processing entities, the one or more processing entities including (or itself acting as the) at least one comparably configured component, the computer program stored on at least one computer-readable medium, comprising:
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(A) instructions, on the computer-readable medium, for collecting data representative of one or more behaviors of at least one of the one or more processing entities, said one or more behaviors being collected in the course of the results of the one or more processing entities converging to (or attempting to maintain proximity with) the target setting; and
(B) instructions, on the computer-readable medium, for sharing information, relating to the data representative of the one or more behaviors, with the one or more processing entities comparably configured with the at least one of the one or more processing entities from which the data was collected, wherein the instructions for sharing of the information facilitate the one or more processing entities receiving the data to converge to (or attempt to maintain proximity with) the target setting.
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27. A computer-assisted system for converging, to a target setting, results of parallel processing of a plurality of semi-conductor entities, processed in an assembly line of semiconductor processing entities, comprising:
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(A) a plurality of semi-conductor processing entities including the at least one semi-conductor processing entity, the at least one processing entity having at least one comparably configured component, wherein the at least one processing entity performs in parallel at least a portion of processing on at least one device of a plurality of devices;
(B) at least one comparably component on at least one of;
the at least one processing entity and another one of the semi-conductor processing entities;
wherein the at least one other comparably configured component performs in parallel the portion of processing on at least one other device of the plurality of devices;
(C) a controller, collecting data representative of at least one result of the processing of at least one device of the plurality of devices, on the at least one processing entity including the at least one comparably configured component, and converging the result of the processing of the at least one device on the at least one comparably configured component and a result of processing of the at least one other device by the at least one comparably configured component.
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40. A computer-assisted system for converging, to a target setting, results of parallel processing of a plurality of semi-conductor entities, processed in an assembly line of semiconductor processing entities, comprising:
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(A) a plurality of semi-conductor processing entities including the at least one semiconductor processing entity, the at least one processing entity having at least one comparably configured component, wherein the at least one processing entity performs in parallel at least a portion of processing on at least one device of a plurality of devices;
(B) at least one comparably component on at least one of;
the at least one processing entity and another one of the semi-conductor processing entities;
wherein the at least one other comparably configured component performs in parallel the portion of processing on at least one other device of the plurality of devices;
(C) means for collecting data representative of at least behavior resulting from processing of at least one device of the plurality of devices, on the at least one processing entity including the at least one comparably configured component, and for converging the behavior of the at least one comparably configured component. - View Dependent Claims (41, 42, 43, 44)
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Specification