Substrate processing chamber

• US 20030000647A1
• Filed: 06/29/2001
• Published: 01/02/2003
• Est. Priority Date: 06/29/2001
• Status: Abandoned Application

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Yudovsky, Joseph, Chen, Chiliang, Umotoy, Salvador
• Application Number:
  US09/895,036
• Publication Number:
  US 20030000647A1
• Time in Patent Office: Days
• US Class Current: 156/345.51
• CPC Class Codes: C23C 16/4585 Devices at or outside the perimeter of the substrate support, e.g. clamping rings, shrouds
• CPC Class Codes: C23C 16/54 Apparatus specially adapted for continuous coating
• CPC Class Codes: H01L 21/68742 characterised by a lifting arrangement, e.g. lift pins

Abstract

A chemical vapor deposition (CVD) chamber includes a chamber body which defines a chamber enclosure, and a pedestal mounted in the chamber and adapted to support a substrate during processing. Also included in the processing chamber are substrate lifters adapted to lift the substrate from the pedestal, and an edge ring adapted to shield an edge of the substrate during processing and/or a pumping ring adapted to cover an exhaust channel in the enclosure during processing. A lift plate is adapted to be raised by an actuator. The lift plate contacts a substrate lifter to raise the substrate lifter, and the lift plate also has an extension that extends upwardly from the lift plate. The extension contacts and raises the edge ring and/or the pumping ring simultaneously with actuation of the substrate lifter.

Claims

1. A processing chamber adapted to process a substrate, comprising:

a chamber body which defines a chamber enclosure;

a pedestal fixedly mounted in the chamber enclosure and adapted to support the substrate during processing;

an edge ring adapted to shield an edge of the substrate during processing;

a lift mechanism adapted to selectively raise and lower the edge ring; and

a substrate lifter adapted to lift the substrate from the pedestal,

wherein the lift mechanism is adapted to raise the substrate lifter simultaneously with the edge ring.

2. The processing chamber of claim 1, wherein the lift mechanism has a first range of movement in which the lift mechanism raises the edge ring without raising the substrate lifter and the lift mechanism has a second range of movement in which the lift mechanism simultaneously raises both the edge ring and the substrate lifter.

3. The processing chamber of claim 2, wherein the second range of movement is above the first range of movement.

4. The processing chamber of claim 2, wherein the lift mechanism includes a lift plate adapted to actuate the substrate lifter, and an extension extending upwardly from the lift plate and adapted to contact the edge ring to raise the edge ring.

5. The processing chamber of claim 1, wherein the pedestal is heated.

6. The processing chamber of claim 1, wherein the chamber is adapted to perform a chemical vapor deposition (CVD) process with respect to the substrate.

7. The processing chamber of claim 1, wherein the lift mechanism moves the edge ring between a processing position in which the edge ring obstructs a path of travel of a robot blade and an elevated position in which the edge ring does not obstruct the path of travel of the robot blade.

8. A processing chamber adapted to process a substrate, comprising:

a chamber body which defines a chamber enclosure;

a pedestal fixedly mounted in the chamber enclosure and adapted to support the substrate during processing;

an edge ring adapted to shield an edge of the substrate during processing;

a lift mechanism adapted to selectively raise and lower the edge ring; and

a pumping plate adapted to cover an exhaust channel in the enclosure;

wherein the lift mechanism raises the pumping plate with the edge ring.

9. A processing chamber adapted to process a substrate, comprising:

a chamber body which defines a chamber enclosure;

a pedestal mounted in the chamber enclosure and adapted to support the substrate during processing;

a substrate lifter adapted to lift the substrate from the pedestal;

an edge ring adapted to shield an edge of the substrate during processing; and

a lift mechanism adapted to simultaneously raise the edge ring while raising the substrate lifter relative to the pedestal.

10. The processing chamber of claim 9, further comprising a pumping plate adapted to cover an exhaust channel in the enclosure, and wherein the lift mechanism raises the pumping plate with the edge ring.

11. The processing chamber of claim 10, wherein the lift mechanism includes a lift plate adapted to actuate the substrate lifter, and an extension that extends upwardly from the lift plate to contact the edge ring and the pumping plate.

12. The processing chamber of claim 11, wherein the edge ring has a tab with a slot formed therein, the slot adapted to engage a protrusion on the extension of the lift plate.

14. The processing chamber of claim 13, wherein the edge ring obstructs a path of travel of a robot blade when in the first position and does not obstruct the path of travel of the robot blade when in the second position.

15. The processing chamber of claim 13, further comprising a substrate lifter adapted to lift the substrate from the pedestal, and wherein the lift mechanism is adapted to raise the substrate lifter simultaneously with the edge ring.

16. The processing chamber of claim 13, wherein the lift mechanism includes a lift plate adapted to actuate the substrate lifter, and an extension extending upwardly from the lift plate and adapted to contact the edge ring to raise the edge ring.

17. The processing chamber of claim 13, wherein the pedestal is fixedly mounted in the chamber enclosure.

19. The processing chamber of claim 18, further comprising a substrate lifter adapted to lift the substrate from the pedestal, and wherein the lift mechanism is adapted to raise the substrate lifter simultaneously with the pumping plate.

20. The processing chamber of claim 19, wherein the lift mechanism includes a lift plate adapted to actuate the substrate lifter, and an extension extending upwardly from the lift plate and adapted to contact the pumping plate to raise the pumping plate.

21. The processing chamber of claim 18, wherein the lift mechanism moves the pumping plate between a first position at which the pumping plate covers the exhaust channel during processing and a second position that is above the first position, the pumping plate being held at the second position during loading of the substrate into the chamber enclosure.

22. The processing chamber of claim 21, wherein the pumping plate obstructs a path of travel of a robot blade when in the first position and does not obstruct the path of travel of the robot blade when in the second position.

24. The processing chamber of claim 23, wherein the edge ring has a tab with a slot formed therein, the slot adapted to engage a protrusion on the extension of the lift plate.

29. The actuator assembly of claim 28, wherein the assembly housing is substantially cylindrical, and the plunger is substantially concentric with the assembly housing.

30. The actuator assembly of claim 28, wherein the assembly housing includes a fitting adapted to introduce a purge gas into the assembly housing between the assembly housing and the bellows.

13. A processing chamber adapted to process a substrate, comprising:

a chamber body which defines a chamber enclosure;

a pedestal in the chamber enclosure and adapted to support the substrate during processing;

an edge ring adapted to shield an edge of the substrate during processing; and

a lift mechanism adapted to selectively raise and lower the edge ring, the lift mechanism moving the edge ring between a first position at which the edge ring shields the edge of the substrate during processing and a second position above the first position, the edge ring being held at the second position during loading of the substrate into the chamber enclosure.

18. A processing chamber adapted to process a substrate, comprising:

a chamber body which defines a chamber enclosure;

a pedestal mounted in the chamber enclosure and adapted to support the substrate during processing;

a pumping plate adapted to cover an exhaust channel in the enclosure; and

a lift mechanism adapted to selectively raise and lower the pumping plate.

23. A processing chamber adapted to process a substrate, comprising:

a chamber body which defines a chamber enclosure;

a pedestal fixedly mounted in the chamber enclosure and adapted to support the substrate during processing;

a substrate lifter adapted to lift the substrate from the pedestal;

an edge ring adapted to shield an edge of the substrate during processing;

a pumping plate adapted to cover an exhaust channel in the enclosure during processing;

an actuator; and

a lift plate adapted to be raised by the actuator, the lift plate also being adapted to contact the substrate lifter to raise the substrate lifter, the lift plate having an extension that extends upwardly from the lift plate, the extension being adapted to contact and raise the edge ring and the pumping plate.

25. A method of operating a substrate processing chamber, comprising:

providing a substrate lifter adapted to lift a substrate from a pedestal in the chamber;

providing an edge ring adapted to shield an edge of the substrate during processing;

providing a pumping plate adapted to cover an exhaust channel in the chamber during processing; and

using a lift mechanism to actuate the substrate lifter and to simultaneously raise the edge ring and the pumping plate.

26. A method of operating a substrate processing chamber that includes an edge ring, a pumping ring and a substrate lifter, the method comprising:

moving a lift mechanism in a first range of movement to raise the edge ring and the pumping ring without raising the substrate lifter; and

moving the lift mechanism in a second range of movement to simultaneously raise the edge ring, the pumping ring and the substrate lifter.

27. A processing chamber adapted to process a substrate, comprising:

a chamber body which defines a chamber enclosure;

a pedestal fixedly mounted in the chamber enclosure and adapted to support the substrate during processing;

a substrate lifter adapted to lift the substrate from the pedestal;

an edge ring adapted to shield an edge of the substrate during processing;

a pumping ring adapted to cover an exhaust channel in the enclosure during processing; and

a lift mechanism adapted to (a) move in a first range of movement to simultaneously raise the edge ring and the pumping ring without raising the substrate lifter, and (b) move in a second range of movement to simultaneously raise the edge ring, the pumping ring and the substrate lifter.

28. An actuator assembly adapted to be installed on a substrate processing chamber, comprising:

an assembly housing adapted to be mounted to an underside of the substrate processing chamber;

an actuator mounted at a lower end of the assembly housing, the actuator having a plunger that extends upwardly from the actuator into the assembly housing;

a sleeve in which the plunger moves; and

a bellows having a first flange at a first end of the bellows attached to the plunger and having a second flange at a second end of the bellows attached to the actuator.