Scintillator panel and radiation image sensor
First Claim
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1. A scintillator panel comprising:
- a radiation-transmitting substrate;
a reflective metal thin film disposed on said substrate;
a protective film covering an entire surface of said reflective metal thin film; and
a scintillator deposited on said protective film, and wherein said protective film has a function to protect said reflective metal thin film against said scintillator.
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Abstract
An Ag film as a light-reflecting film is formed on one surface of an a-C substrate of a scintillator panel. The entire surface of the Ag film is covered with an SiN film for protecting the Ag film. A scintillator having a columnar structure, which converts an incident radiation into visible light, is formed on the surface of the SiN film. The scintillator is covered with a polyparaxylylene film together with the substrate.
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Citations
66 Claims
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1. A scintillator panel comprising:
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a radiation-transmitting substrate;
a reflective metal thin film disposed on said substrate;
a protective film covering an entire surface of said reflective metal thin film; and
a scintillator deposited on said protective film, and wherein said protective film has a function to protect said reflective metal thin film against said scintillator. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48)
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15. A scintillator panel characterized by comprising:
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a radiation-transmitting substrate;
a reflective metal thin film disposed on said substrate;
a protective film disposed on said reflective metal thin film; and
a scintillator deposited on said protective film at a position except an edge portion thereof, wherein said reflective metal thin film transmits radiation and reflects light irradiated from said scintillator, and wherein said protective film has a function to protect said reflective metal thin film against said scintillator.
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29. A scintillator panel comprising:
- a radiation-transmitting substrate;
a metal thin film formed on said substrate, which is a radiation-transmittable and reflects light of a predetermined wavelength;
a protective film formed on said metal thin film; and
a scintillator comprising a large number of columnar crystals which are deposited on said protective film and which convert radiation into light of wavelengths that can be reflected by said metal thin film, said protective film preventing contact between said metal thin film and said scintillator, further comprised of;
an intermediate film disposed between said substrate and said metal thin film to adhere said substrate and said metal thin film. - View Dependent Claims (50, 51)
- a radiation-transmitting substrate;
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49. A scintillator panel comprising:
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a radiation-transmitting substrate;
a metal thin film formed on said substrate, which is radiation-transmittable and reflects light of a predetermined wavelength;
a protective film formed on said metal thin film; and
a scintillator comprising a large number of columnar crystals which are deposited on said protective film and which convert radiation into light of wavelengths that can be reflected by said metal thin film, wherein said protective film prevents contact between said metal thin film and said scintillator, and said scintillator panel further comprises of an intermediate film disposed between said substrate and said metal thin film for improving the adhesion between said substrate and said metal thin film.
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52. A scintillator panel comprising:
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a radiation-transmitting substrate;
a metal reflective film formed on one surface of said substrate;
a protective organic film which covers said metal reflective film and which also covers at least the side walls of said substrate;
an alkali halide-type scintillator which is formed as a large number of needle crystals by deposition on said protective organic film over said metal reflective film; and
a moisture-proof organic film covering said scintilltor;
wherein said protective organic film prevents scintillator components from becoming attached to said substrate and said metal reflective film during the deposition of said scintillator, and said moisture-proof organic film covers the scintillator including the scintillator components which are attached to said protective organic film. - View Dependent Claims (53, 54, 55, 57, 58, 59)
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56. A making method for a scintillator panel, comprising the steps of:
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forming a metal reflective film on one surface of a radiation-transmitting substrate;
forming a protective organic film which covers an area extending from at least one surface of said substrate, including said metal reflective film, to the side walls of said substrate;
forming a scintillator through the growth of a large number of needle crystals by depositing alkali halide-type scintillator components on only a predetermined part of the surface of said protective organic film which is substantially on said metal reflective film, while preventing the scintillator components from becoming attached to said metal reflective film and said substrate using said protective organic film; and
forming a moisture-proof organic film covering said scintillator including the scintillator components which have become attached to outside of said predetermined part.
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60. A scintillator panel comprising:
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a radiation-transmitting substrate;
a metal reflective film formed on one surface of said substrate;
a first protective organic film covering said metal reflective film;
an alkali halide-type scintillator formed as a large number of needle crystals by deposition on the part of said first protective organic film covering said metal reflective film;
a frame-shaped second protective organic film covering an area extending from the side walls of said scintillator to at least the side wall parts of said substrate; and
a moisture-proof organic film covering said scintillator and the surface of said second protective organic film. - View Dependent Claims (63, 64)
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61. A scintillator panel comprising:
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a radiation-transmitting substrate;
a metal reflective film formed on one surface of said substrate;
a first protective organic film covering said metal reflective film;
an alkali halide-type scintillator formed as a large number of needle crystals by deposition on the part of said first protective organic film covering said metal reflective film;
a moisture-proof organic film covering an area extending from said scintillator to at least the side walls of said substrate; and
a frame-shaped second protective organic film covering an area extending from the side walls of said scintillator to at least the side wall parts of said substrate. - View Dependent Claims (62)
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65. A making method for a scintillator panel, comprising the steps of:
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forming a metal reflective film on one surface of a radiation-transmitting substrate;
forming a first protective organic film on said metal reflective film;
forming a scintillator through the growth of a large number of needle crystals by depositing alkali halide-type scintillator components on the part of said first protective organic film covering said metal reflective film;
forming a second protective organic film covering an area extending from the side walls of said scintillator to at least the side walls of said substrate; and
forming a moisture-proof organic film covering said scintillator and also the surface of said second protective organic film.
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66. A making method for a scintillator panel, comprising the steps of:
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forming a metal reflective film on one surface of a radiation-transmitting substrate;
forming a first protective organic film on said metal reflective film;
forming a scintillator through the growth of a large number of needle crystals by depositing alkali halide-type scintillator components on the part of said first protective organic film covering said metal reflective film;
forming a moisture-proof organic film covering an area extending from said scintillator to at least the side walls of said substrate; and
forming a second protective organic film over said moisture-proof organic film, covering an area extending from the side walls of said scintillator to at least the side wall parts of said substrate.
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Specification