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Electrostatic actuator and method of making same

  • US 20030001453A1
  • Filed: 12/11/2001
  • Published: 01/02/2003
  • Est. Priority Date: 07/02/2001
  • Status: Active Grant
First Claim
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1. An electrostatic actuator comprising:

  • a movable electrode disposed for relative displacement along a basement plane and defining first and second opposed surfaces opposed to each other;

    a first stable electrode wall opposed to the first opposed surface of the movable electrode;

    a second stable electrode wall opposed to the second opposed surface of the movable electrode; and

    an insulating solid piece connecting the first and second stable electrode walls.

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