Method and apparatus for determining a magnetic field

• US 20030001596A1
• Filed: 06/22/2001
• Published: 01/02/2003
• Est. Priority Date: 06/22/2001
• Status: Active Grant

• Current Assignee: Hitachi, Ltd.
• Original Assignee: Hitachi, Ltd.
• Inventors: Nakamura, Satoshi, Suga, Takashi, Hayashi, Yoshihiko, Uesaka, Kouichi
• Granted Patent: US 6,625,554 B2
• Time in Patent Office: Days
• US Class Current: 324/750
• CPC Class Codes: G01R 31/315 by inductive methods

Abstract

The present invention provides a magnetic field measuring method and system for determining the magnetic field of an integrated circuit (IC) inside the IC package, including the pre-packaged IC. In one embodiment, induced voltages due only to the magnetic field are determined at measurement heights on the order of the line spacings in an integrated circuit. A magnetic probe is used; the probe has a loop of wire parallel to the current, for measuring the induced voltage of the horizontal component of the magnetic field. The induced voltage due to the electric field is removed by using a calculation including the difference of two measurements. The magnetic field distribution for the integrated circuit may be determined by using the above procedure on a grid like pattern above the IC.

Claims

1. A method for determining a magnetic field value of an integrated circuit inside an integrated circuit package, said integrated circuit having a plurality of current carrying lines, said method comprising:

measuring a first induced voltage due to a current carrying line'"'"'s electromagnetic field, wherein said first induced voltage includes a first electric field induced voltage;

measuring a second induced voltage due to said current carrying line'"'"'s electromagnetic field, such that said second induced voltage includes a second electric field voltage that is substantially equal to said first electric field induced voltage; and

determining said component of said magnetic field based on a difference between said first induced voltage and said second induced voltage.

2. The method of claim 1 wherein said first induced voltage is V_P and said second induced voltage is V_N and wherein said determining said component includes calculating (V_P−

V_N)/2.

3. The method of claim 1 wherein said measuring is performed at a height above said plurality of current carrying lines, and wherein said height is on a same order of magnitude as a distance between said plurality of current carrying lines.

4. The method of claim 3 wherein said plurality of current carrying lines, includes a power line.

5. The method of claim 3 wherein said plurality of current carrying lines, includes a signal line.

6. The method of claim 1 wherein said first induced voltage is a first root mean squared (rms) voltage and said second induced voltage is a second root mean squared voltage.

7. The method of claim 1 wherein said integrated circuit has transistor densities equal to or greater than a Large Scale Integrated (LSI) circuit.

8. A method for determining a magnetic field distribution of an electronic circuit of a Large Scale Integrated (LSI) circuit inside said LSI circuit package, comprising:

determining a first voltage induced in a measuring circuit by an Electro-magnetic field of said electronic circuit, wherein said measuring circuit, when used for determining said first voltage, has a first end coupled to ground and a second end coupled to a voltage measuring device;

determining a second voltage induced in said measuring circuit by said Electro-magnetic field of said electronic circuit, wherein said measuring circuit, when used for determining said second voltage, has said first end coupled to said voltage measuring device and said second end coupled to ground; and

calculating a magnetic field induced voltage using a difference between said first induced voltage and said second induced voltage, wherein a magnetic field at said measuring circuit is proportional to said magnetic field induced voltage.

9. The method of claim 8 wherein said measuring circuit is not rotated between said determining a first voltage and said determining a second voltage.

10. The method of claim 8 wherein said electronic circuit comprises a signal line.

11. The method of claim 8 wherein said electronic circuit comprises a power line.

12. The method of claim 8 wherein induced voltage measurements from said measuring circuit are taken on the order of 30 micrometers above said electronic circuit.

14. The magnetic field probe of claim 13 wherein said switch is a crossbar switch.

15. The magnetic field probe of claim 13 wherein said measuring probe has a dimension equal to about said height.

16. The magnetic field probe of claim 13 wherein said measuring probe is a square probe of dimension 30 μ

m by 30 μ

m.

17. The magnetic field probe of claim 13 wherein said height is on the same order of magnitude as said distance.

18. The magnetic field probe of claim 13 wherein said measuring probe is a loop of wire.

19. The magnetic field probe of claim 13 wherein said measuring probe is a coil of wire oriented parallel to an integrated circuit'"'"'s current carrying line.

20. The magnetic field probe of claim 13 further comprising:

a positioning grid for determining at least one path for said measuring probe to follow, wherein said measuring probe takes at least two measurements at each point in said positioning grid without rotating.

13. A magnetic field probe system for determining a magnetic field distribution of an integrated circuit inside an integrated circuit package, comprising:

a measuring probe for measuring an induced voltage produced by an electromagnetic field of said integrated circuit at a height above said integrated circuit on a same order of magnitude as a distance between said integrated circuit'"'"'s current carrying lines, said measuring probe comprising a first termination point coupled with a second termination point by an electronic circuit;

a voltage measuring device for measuring said induced voltage; and

a switch in which a first end is coupled to said measuring probe via said first and second termination points and a second end is coupled to said voltage measuring device and to ground, wherein when said switch is in a first position, said first termination point is coupled to said voltage measuring device and said second termination point is coupled to ground, and when said switch is in a second position, said first termination point is coupled to ground and said second termination point is coupled to said voltage measuring device.

21. A computer program product stored on a computer readable medium for determining a magnetic field value of an integrated circuit inside an integrated circuit package, said integrated circuit comprising a line, said computer program product comprising:

code for determining a first voltage induced in a measuring circuit by an Electro-magnetic field of said line, wherein said measuring circuit, when used for determining said first voltage, has a first end coupled to ground and a second end coupled to a voltage measuring device;

code for determining a second voltage induced in said measuring circuit by said Electro-magnetic field of said line, wherein said measuring circuit, when used for determining said second voltage, uses a switch to couple said first end to said voltage measuring device and said second end to ground; and

code for calculating a magnetic field induced voltage using a difference between said first induced voltage and said second induced voltage, wherein a magnetic field at said measuring circuit is proportional to said magnetic field induced voltage.