Raised on-chip inductor and method of manufacturing same
First Claim
Patent Images
1. An integrated inductor disposed on a substrate, the inductor comprising:
- a first conductor including an anchoring extremity that mechanically anchors said first conductor to the substrate, the first conductor being otherwise raised with respect to the substrate.
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Abstract
A raised on-chip planar inductor. An inductor is fabricated on a substrate. The inductor, except for an anchoring extremity, is lifted from the substrate, preferably by application of a magnetic field to a magnetic layer formed on the inductor. The lifting of the inductor deforms a plastic bending region. After the magnetic field is removed, the inductor remains raised with respect to the substrate.
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Citations
25 Claims
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1. An integrated inductor disposed on a substrate, the inductor comprising:
a first conductor including an anchoring extremity that mechanically anchors said first conductor to the substrate, the first conductor being otherwise raised with respect to the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method of forming an inductor on a substrate, comprising the steps of:
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fabricating a planar inductor on the substrate, said planar inductor being anchored to the substrate by an anchoring extremity but otherwise detached from said substrate; and
lifting said planar inductor, except for said anchoring extremity, to plastically deform said planar inductor and lift said planar inductor, anchored by said anchoring extremity, into a raised position with respect to the substrate. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 24, 25)
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23. An integrated circuit having an inductor formed by the steps of:
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fabricating a planar inductor on a substrate including a conductor extending between an anchoring extremity and a distal end; and
lifting said distal end while said anchoring extremity remains connected to said substrate to plastically deform said planar inductor and lift said inductor, except for said anchoring extremity, into a raised position with respect to said substrate.
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Specification