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Vertically integrated optical devices coupled to optical fibers

  • US 20030002809A1
  • Filed: 05/15/2002
  • Published: 01/02/2003
  • Est. Priority Date: 06/08/1998
  • Status: Active Grant
First Claim
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24. A method of forming a socket layer for holding a plurality of optical fibers, comprising:

  • forming a first mask on a first surface of a wafer, said first mask defining a pattern including a first plurality of socket openings;

    forming a second mask on a second, opposing surface of said wafer, said second mask including a second plurality of socket openings aligned with said first plurality of socket holes;

    etching said first surface;

    etching said second surface to etch through a socket between said socket openings in said first and second masks; and

    removing said first and second masks.

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