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Method and apparatus for forming light absorption film

  • US 20030003224A1
  • Filed: 06/13/2002
  • Published: 01/02/2003
  • Est. Priority Date: 06/29/2001
  • Status: Active Grant
First Claim
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1. A method for forming a light absorption film, composed of a porous metallic vapor deposited film with crystalline grown up in a dendrite structure, in a vacuum vapor deposition, comprising:

  • preliminarily measuring and storing a time profile of targeted electric power in a storage unit by preliminarily applying the targeted electric power to a resistive-heated evaporating boat to measure electric current, flowing through the evaporating boat, and a voltage potential, appearing at both sides of the evaporating boat, that enable a proper film quality to be realized; and

    controlling current electric power, that is a product of the electric current currently flowing through the evaporating boat and the voltage potential currently appearing at the both sides of the evaporating boat during a current vapor deposition, so as to match the targeted electric power stored in the storage unit.

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