Method and apparatus for forming light absorption film

• US 20030003224A1
• Filed: 06/13/2002
• Published: 01/02/2003
• Est. Priority Date: 06/29/2001
• Status: Active Grant

• Current Assignee: Nissan Motor Co., Ltd.
• Original Assignee: Nissan Motor Co., Ltd.
• Inventors: Nakajima, Yasushi
• Granted Patent: US 6,730,351 B2
• Time in Patent Office: Days
• US Class Current: 427/8
• CPC Class Codes: C23C 14/243 Crucibles for source material C23C14/28, C23C14/30 take precedence
• CPC Class Codes: C23C 14/543 using measurement on the vapor source

Abstract

A method and apparatus is provided for forming a light absorption film, composed of a porous metallic vapor deposited film with crystalline grown up in a dendrite structure, in a vacuum vapor deposition. A targeted time profile of applied electric power is obtained from electric current flowing through an evaporating boat 9 and a voltage potential thereof that enable a proper film quality to be realized with the evaporating boat using a resistive-heating technique and is preliminarily measured and stored in a computer 17 for controlling current electric power, obtained by electric current currently flowing through the evaporating boat and a voltage thereof currently appearing during a current vapor deposition process, so as to match the targeted time profile of the applied electric power. Under a condition where a desired light absorption film is obtained, since the amount of applied electric power correlated with fluctuations in an evaporating speed falls in a deviation range of approximately ±5%, a strong relationship exists between electric power applied to the evaporating boat and a quality of a resulting deposited film. Accordingly, accurately realizing an appropriately applied electric power that is preliminarily and experimentally obtained enables proper control of a vapor deposition speed, resulting in formation of a desired light absorption film in a stable and easy manner.

Claims

1. A method for forming a light absorption film, composed of a porous metallic vapor deposited film with crystalline grown up in a dendrite structure, in a vacuum vapor deposition, comprising:

preliminarily measuring and storing a time profile of targeted electric power in a storage unit by preliminarily applying the targeted electric power to a resistive-heated evaporating boat to measure electric current, flowing through the evaporating boat, and a voltage potential, appearing at both sides of the evaporating boat, that enable a proper film quality to be realized; and

controlling current electric power, that is a product of the electric current currently flowing through the evaporating boat and the voltage potential currently appearing at the both sides of the evaporating boat during a current vapor deposition, so as to match the targeted electric power stored in the storage unit.

2. The method according to claim 1, further comprising:

preliminarily obtaining and storing relational data in the storage unit between the electric power applied to the evaporating boat and an electrical resistance value thereof in the absence of source material on the evaporating boat; and

terminating vapor deposition when an electrical resistance value appearing during the vapor deposition carried out with the applied electric power matches the electrical resistance value stored in the storage unit.

3. A method for forming a light absorption film, composed of a porous metallic deposited film with crystalline grown up in a dendrite structure, in a vacuum vapor deposition, comprising:

preliminarily measuring and storing a targeted time changing rate of a combined resistance, in a storage unit, between an evaporating boat and source material obtained by preliminarily applying electric power to the evaporating boat to perform resistive-heating to measure electric current, flowing through the same, and a voltage potential, appearing at both sides of the evaporating boat, that enable a proper film quality to be realized; and

controlling electric power to be applied to the evaporating boat such that a current time changing rate of combined resistance obtained by the electric current currently flowing through the evaporating boat and the voltage potential currently appearing at the both sides of the evaporating boat during a current vapor deposition matches the targeted time changing rate of the combined resistance stored in the storage unit.

4. The method according to claim 3, further comprising:

preliminarily obtaining and storing relational data in the storage unit between the electric power applied to the evaporating boat and an electrical resistance value thereof in the absence of source material on the evaporating boat; and

terminating vapor deposition when an electrical resistance value appearing during the vapor deposition carried out with the applied electric power matches the electrical resistance value stored in the storage unit.

5. A light absorption film forming apparatus, comprising:

a vacuum vapor deposition device having an evaporating boat to perform resistive-heating;

a storage unit storing a time profile of targeted applied electric power obtained by measuring electric current flowing through the evaporating boat and a voltage potential appearing at both sides of the same that enable a proper film quality to be realized; and

a control unit controlling current electric power to be applied to the evaporating boat such that the current electric power obtained by a product of the electric current currently flowing through the vapor deposition boat and the voltage potential currently appearing at the both sides of the same during a current vapor deposition matches the time profile of the targeted applied electric power stored in the storage unit.

6. The light absorption film forming apparatus according to claim 5, wherein:

the evaporating boat includes a central scorching heat area on which the source material is placed for evaporation, a non-wetting area formed at a circumferentially periphery of the scorching heat area, and electrical connector portions extending outward from the non-wetting area;

wherein the non-wetting area is processed to have a non-wetting property to preclude the source material and the evaporating boat from wetting with respect to one another.

7. A light absorption film forming apparatus, comprising:

vacuum vapor deposition means having an evaporating boat to perform resistive-heating;

storage means for storing a time profile of targeted applied electric power obtained by measuring electric current flowing through the evaporating boat and a voltage potential appearing at both sides of the same that enable a proper film quality to be realized; and

control means for controlling current electric power to be applied to the evaporating boat such that the current electric power obtained by a product of the electric current currently flowing through the evaporating boat and the voltage potential currently appearing at the both sides of the same during a current vapor deposition matches the targeted time profile of the applied electric power stored in the storage unit.

8. A light absorption film forming apparatus, comprising:

a vacuum vapor deposition device having an evaporating boat to perform resistive-heating;

a storage unit storing a targeted time changing rate of a combined resistance between the evaporating boat and source material obtained by preliminarily applying electric power to the evaporating boat to perform resistive-heating to measure electric current, flowing through the same, and a voltage potential, appearing at both sides of the evaporating boat, that enable a proper film quality to be realized; and

a control unit controlling electric power to be applied to the evaporating boat such that a current time changing rate of the combined resistance obtained by the electric current currently flowing through the evaporating boat and the voltage potential currently appearing at the both sides of the evaporating boat during a current vapor deposition matches the targeted time changing rate of the combined resistance stored in the storage unit.

9. The light absorption film forming apparatus according to claim 8, wherein:

the evaporating boat includes a central scorching heat area on which the source material is placed for evaporation, a non-wetting area formed at a circumferentially periphery of the scorching heat area, and electrical connector portions extending outward from the non-wetting area;

wherein the non-wetting area is processed to have a non-wetting property to preclude the source material and the evaporating boat from wetting with respect to one another.

10. A light absorption film forming apparatus, comprising:

vacuum vapor deposition means having an evaporating boat to perform resistive-heating;

storage means for storing a targeted time changing rate of a combined resistance between the evaporating boat and source material obtained by preliminarily applying electric power to the evaporating boat to perform resistive-heating to measure electric current, flowing through the same, and a voltage potential, appearing at both sides of the evaporating boat, that enable a proper film quality to be realized; and

control means for controlling electric power to be applied to the evaporating boat such that a current time changing rate of the combined resistance obtained by the electric current currently flowing through the evaporating boat and the voltage potential currently appearing at the both sides of the evaporating boat during a current vapor deposition matches the targeted time changing rate of the combined resistance stored in the storage means.