Method of forming photo-catalytic film made of titanium oxide on base material and laminated material thereof

• US 20030003304A1
• Filed: 12/13/2001
• Published: 01/02/2003
• Est. Priority Date: 06/28/2001
• Status: Active Grant

• Current Assignee: Fuji Xerox Company Limited (Xerox Holdings Corp.)
• Original Assignee: Fuji Xerox Company Limited (Xerox Holdings Corp.)
• Inventors: Ohtsu, Shigemi, Akutsu, Eiichi
• Granted Patent: US 6,793,980 B2
• Time in Patent Office: Days
• US Class Current: 428/412
• CPC Class Codes: B01J 21/063 Titanium; Oxides or hydroxides thereof
• CPC Class Codes: B01J 21/066 Zirconium or hafnium; Oxides or hydroxides thereof
• CPC Class Codes: B01J 35/39 Photocatalytic properties
• CPC Class Codes: B01J 37/0238 via the gaseous phase-sublimation
• CPC Class Codes: B01J 37/345 of ultraviolet wave energy
• CPC Class Codes: C03C 17/2456 Coating containing TiO2
• CPC Class Codes: C03C 17/3417 all coatings being oxide coatings
• CPC Class Codes: C03C 2217/71 Photocatalytic coatings
• CPC Class Codes: C03C 2218/32 After-treatment
• CPC Class Codes: C23C 14/58 After-treatment
• CPC Class Codes: Y10T 428/31507 Of polycarbonate

Abstract

A method of forming a photo-catalytic film made of titanium oxide on a base material based on a simple process at low temperatures, particularly a method of forming a laminated material comprising photo-catalytic film of titanium oxide formed on a base material is provided. A method of forming a photo-catalytic film made of titanium oxide on a base material includes a treating process, in which photo-catalytic film of titanium oxide is formed on a base material and irradiated with UV light in vacuum or in an atmosphere of reducing gas at a temperature maintained between 25° C. and below 300° C.

Claims

1. A method of forming a photo-catalytic film comprising:

providing a base material with a titanium oxide film; and

irradiating the titanium oxide film with UV light in vacuum or in an atmosphere of reducing gas at a temperature maintained between 25 and 300°

C.

2. A method of forming a photo-catalytic film according to claim 1, wherein the film of titanium oxide before the irradiation is a film of amorphous titanium oxide, and the photo-catalytic film of titanium oxide after the irradiation is a film of anatase-type titanium oxide.

3. A method of forming a photo-catalytic film according to claim 1, wherein the photo-catalytic film of titanium oxide has oxygen deficiencies.

4. A method of forming a photo-catalytic film according to claim 1, wherein the UV light is applied with an excimer lamp.

5. A method of forming a photo-catalytic film according to claim 1, wherein the maintained temperature ranges between 50 and 250°

C.

6. A method of forming a photo-catalytic film according to claim 1, wherein the base material is made of plastic, and the maintained temperature ranges between 50°

C. and a heat resistant temperature of the plastic base material.

7. A method of forming a photo-catalytic film according to claim 1, wherein the heat resistant temperature of the plastic base material ranges between 100 and 230°

C.

8. A method of forming a photo-catalytic film according to claim2, wherein the film of amorphous titanium oxide is formed by a sputtering method.

9. A method of forming a photo-catalytic film according to claim2, wherein the film of amorphous titanium oxide is formed by an electron beam deposition method.

10. A method of forming a photo-catalytic film according to claim 1, wherein an anti-reflection film is set up between the base material and the titanium oxide film.

11. A method of forming a photo-catalytic film according to claim 10, wherein the anti-reflection film having a mono-layer, a refractive index between a refractive index of the base material and the refractive index of the photo-catalytic film of titanium oxide, and an optical thickness, which is defined as a product of the refractive index thereof by a film thickness thereof, corresponding to one-fourth or integer multiples of a wavelength of light near a center of a visible region.

12. A method of forming a photo-catalytic film of titanium oxide on a base material according to claim 10, wherein the anti-reflection film has multi layers, each layer having refractive index between the refractive index of the base material and the refractive index of the photo-catalytic film of titanium oxide, and optical thickness values, which are defined as a product of the refractive index thereof by thickness thereof, corresponding to one-fourth or its integer multiples of a wavelength of light near a center of a visible region.

13. A method of forming a photo-catalytic film according to claim 12, wherein the refractive index of the anti-reflection film is between 1.5 and 2.3.

14. A method of forming a photo-catalytic film according to claim 13, wherein the anti-reflection film is made of metal oxide.

15. A method of forming a photo-catalytic film according to claim 14, wherein the anti-reflection film is made of zirconium oxide.

17. A method of forming a photo-catalytic film according to claim 16, wherein a thickness of the anti-reflection film is between 50 nm and 100 nm.

18. A method of forming a photo-catalytic film according to claim 1, wherein the photo-catalytic film has an optical thickness value, which is defined as a product of a refractive index thereof by the film thickness thereof, corresponding to one-half or its integer multiples of a wavelength of light near a center of a visible region.

19. A method of forming a photo-catalytic film according to claim 18, wherein the thickness of the film is between 70 nm and 150 nm.

16. A method of forming a photo-catalytic film according to claiml4, wherein the anti-reflection film is made of ITO.

20. A laminated material comprising a base material, an antireflection film, and a photo-catalytic film of titanium oxide arranged in this order.

22. A laminated material according to claim 20, wherein the base material is a light-transmitting flexible base material made of plastic.

25. A flexible photo-catalytic sheet according to claim 24, wherein the sheet is substantially light-transmitting.

21. A laminated material comprising a base material and a photo-catalytic film of titanium oxide having a thickness between 50 nm and 2.0 μ

m.

23. A laminated material according to claim 21, wherein the photo-catalytic film has an optical thickness, which is defined as a product of the refractive index thereof by the film thickness thereof, corresponding to one-half or its integer multiples of a wavelength of light near the center of a visible region.

24. A flexible photo-catalytic sheet comprising a plastic base, an anti-reflection film, and a film of crystalline titanium oxide arranged in this order.

26. A flexible photo-catalytic sheet comprising a plastic base material and a film of anatase-type titanium oxide arranged in this order.