Optical imaging device

• US 20030004412A1
• Filed: 03/05/2002
• Published: 01/02/2003
• Est. Priority Date: 02/04/1999
• Status: Active Grant

• Current Assignee: Olympus Optical Company Ltd. (Olympus Corporation), University Hospitals of Cleveland (University Hospitals Health System Incorporated)
• Original Assignee: Olympus Optical Company Ltd. (Olympus Corporation), University Hospitals of Cleveland (University Hospitals Health System Incorporated)
• Inventors: Horii, Akihiro, Izatt, Joseph A., Hirata, Tadashi, Sivak, Michael V., Iizuka, Shuhei, Rollins, Andrew
• Granted Patent: US 6,564,089 B2
• Time in Patent Office: Days
• US Class Current: 600/425
• CPC Class Codes: A61B 5/0066 Optical coherence imaging
• CPC Class Codes: A61B 5/6852 Catheters
• CPC Class Codes: G01B 2290/65 Spatial scanning object beam
• CPC Class Codes: G01B 2290/70 Using polarization in the interferometer
• CPC Class Codes: G01B 9/02002 using two or more frequencies
• CPC Class Codes: G01B 9/0205 of probe head
• CPC Class Codes: G01B 9/02061 Reduction or prevention of effects of tilts or misalignment
• CPC Class Codes: G01B 9/02069 Synchronization of light source or manipulator and detector
• CPC Class Codes: G01B 9/02091 Tomographic interferometers, e.g. based on optical coherence

Abstract

An Optical Coherence Tomography (OCT) device irradiates a biological tissue with low coherence light, obtains a high resolution tomogram of the inside of the tissue by low-coherent interference with scattered light from the tissue, and is provided with an optical probe which includes an optical fiber having a flexible and thin insertion part for introducing the low coherent light. When the optical probe is inserted into a blood vessel or a patient'"'"'s body cavity, the OCT enables the doctor to observe a high resolution tomogram. In a optical probe, generally, a fluctuation of a birefringence occurs depending on a bend of the optical fiber, and this an interference contrast varies depending on the condition of the insertion. The OCT of the present invention is provided with polarization compensation means such as a Faraday rotator on the side of the light emission of the optical probe, so that the OCT can obtain the stabilized interference output regardless of the state of the bend.

Claims

1. An optical probe comprising:

an elongated flexible insertion unit capable of being introduced into a subject;

light guide means including a low coherence light source and a single mode fiber for emitting low coherence light from an end surface on a distal side of said insertion unit to said subject, and for detecting reflection from said subject;

at least one lens provided on the distal side of said insertion unit for condensing emission from said fiber onto said subject, and for detecting reflection from said subject;

polarization compensation means provided between said single mode fiber and said subject;

scanning emission means for scanning the subject with said low coherence light emitted from said single mode fiber; and

interference means for causing said reflection detected by said single mode fiber to interfere with a reference beam emitted from said light source, to produce a signal for the obtained interference component.

2. An optical imaging device according to claim 1, wherein said polarization compensation means is a Faraday rotator which has a single crystal of magnetic garnet.

3. An optical imaging device according to claim 2, wherein said Faraday rotator rotates the plane of polarization by forty-five degrees.

4. An optical imaging device according to claim 1, wherein said scanning emission means includes an emission-direction-changing means for changing the optical path of the emission, a rotary scanning means for turning an integrated system of said single mode fiber, said at least one lens, and said emission-direction-changing means, and an optical rotary joint for connecting said rotating single mode fiber and said interference means.

5. An optical imaging device according to claim 4, wherein said emission-changing means includes a prism used as a mirror.

6. An optical imaging device according to claim 1, wherein said at least one lens is a refractive index distribution lens (GRIN).

7. An optical imaging device according to claim 6, wherein said Faraday rotator is disposed between said GRIN lens and said prism.

8. An optical imaging device according to claim 7, wherein said Faraday rotator joined with adhesive to said GRIN lens and said prism to form an integrated composition.

9. An optical imaging device for irradiating a subject with low coherence light, to produce a tomogram of the subject from data on light scattered by the subject, said optical imaging device comprising:

light irradiation and reception means for irradiating the subject with low coherence light and for receiving reflection from the subject;

propagation delay time-varying means connected to said light irradiation and reception means for causing low coherence light returning from the subject to interfere with a reference beam, and for varying the propagation delay time of the reference beam, depending on a scanning range, in order to scan the interference location axially along the optical axis, wherein said propagation delay time-varying means varies the interference location, depending on an axial scan of an optical element, and wherein the repetitive axial scan of said optical element continuously varies the interference location;

a light detector for detecting interference light intensity in the form of an interference signal;

reference position detection means for said optical element;

first memory means for preserving an interference contrast signal that corresponds to a particular one-way axial scan based on the detection by said reference position detection means; and

a second memory means for preserving an interference signal that corresponds to an axial scan in the opposite direction to said particular one-way axial scan;

wherein backward reading of data stored in said first memory means and said second memory means produces interference signals that indicate scanning in the same direction.

10. An optical imaging device according to claim 9, wherein said axially scanning optical element includes a mirror.

11. An optical imaging device according to claim 10, wherein said mirror is one of a galvanometer mirror, resonance scan mirror and retro-reflecting prism.

12. An optical imaging device according to claim 9, wherein said reference detection means includes a the driving signal for the axially scanning element.

13. An optical imaging device according to claim 9, wherein said first memory means and said second memory means are line memories for storing digital signals produced by an analog-to-digital conversion of the interference signals.

14. An optical imaging device according to claim 9, further comprising delay setting means for setting delays different from each other, thereby reading data stored in said first memory means and said second memory means.

15. An optical imaging device according to claim 14, further comprising manual input means for setting delays.

16. An optical imaging device according to claim 14, further comprising phase adjustment means for detecting a reference signal in each of the interference signals data stored in said first memory means and said second memory means, and for adjusting said delay setting means so that both reference signals may coincide with each other.

17. An optical imaging device according to claim 9, wherein said optical imaging device reads an interference signal data set from each of said first memory means and said second memory means, and displays the read signal onto adjacent lines in a two-dimensional image.

18. An optical imaging device according to claim 9, wherein said the first memory means and the second memory means consists of a single memory means for preserving an interference contrast signal that corresponds to both directions of axial scan, and wherein reading of data from both beginning and end of said single memory means produces interference signals that indicate scanning in the same direction.

19. An optical imaging device according to claim 18, further comprising delay setting means provided for setting delays different from each other, thereby reading data stored at a beginning and end of said single memory means.

20. An optical imaging device according to claim 18, further comprising phase adjustment means provided for detecting a reference signal in each of the interference signals data stored in a beginning and end of said single memory means, and for adjusting said delay setting means so that both reference signals may coincide with each other.

21. An optical imaging device according to claim 18, wherein said optical imaging device reads an interference signal data set from a beginning and end of said single memory means, and displays the read signal onto adjacent lines in a two-dimensional image.

22. An optical imaging device for irradiating a subject with low coherence light, to produce a tomogram of the subject from data on light scattered by the subject, said optical imaging device comprising:

light irradiation and reception means for irradiating the subject with low coherence light and for receiving reflection from the subject;

propagation delay time-varying means connected to said light irradiation reception means for causing low coherence light returning from the subject to interfere with a reference beam, and for varying the reference beam propagation delay time, depending on the scanning range, in order to scan the interference location axially along the optical axis, wherein said propagation delay time-varying means varies the interference location, depending on the movement of an optical element, and wherein the continuous movement of said optical element continuously varies the interference location;

a light detector for detecting interference light intensity in the form of an interference signal;

position detection means for the interference location;

memory means for preserving interference intensity signals in time series; and

calculation means for calculating an address in said memory means, said address corresponding to the interference location;

wherein said calculation means reads data stored in said address and produces an interference signal that corresponds to the interference location.

24. An optical imaging device according to claim 23, wherein said propagation delay time-varying means varies the interference location in a nonlinear manner with respect to time.

25. An optical imaging device according to claim 23, wherein said propagation delay time-varying means includes a galvanometer mirror.

26. An optical imaging device according to claim 23, wherein said propagation delay time-varying means includes a resonant scan mirror.

27. An optical imaging device according to claim 23, further comprising means for setting movement speed and Doppler frequency of the interference location according to the length of the scanning range.

28. An optical imaging device according to claim 23, wherein said demodulator is preceded by a band-pass filter that passes electronic signals in a frequency band close to the Doppler frequency.

29. An optical imaging device according to claim 28, wherein said frequency characteristics setting means varies cut-off frequencies in the high and low bands of said band-pass filter in accordance with the nonlinearity of the reference arm propagation delay time-varying means in the reference arm.

30. An optical imaging device according to claim 23, wherein said demodulator comprises a tracking demodulator including a coherent demodulator, said coherent demodulator requiring a reference frequency signal, said reference frequency signal being provided by a signal generator according to the calculated Doppler shift of the reference arm, said reference frequency signal being varied in accordance with the reference arm propagation delay time.

23. An optical imaging device for irradiating a subject with low coherence light, to produce a tomogram of the subject, from data on light scattered by the subject, said optical imaging device comprising:

light irradiation and reception means for irradiating the subject with low coherence light and for receiving reflection from the subject;

propagation delay time-varying means connected to said light irradiation and reception means for causing low coherence light returning from the subject to interfere with a reference beam, and for varying the reference beam propagation delay time, depending on the scanning range, in order to scan the interference location axially along the optical axis;

a light detector for detecting interference light intensity in the form of an interference signal;

calculation means for calculating a Doppler frequency of an interference signal produced by scanning the reference beam propagation delay time;

a demodulator for demodulating the signal from said light detector, and

a frequency characteristics setting means for varying frequency characteristics of said demodulator depending on the calculated Doppler frequency.

31. An optical imaging device for irradiating a subject with low coherence light to produce a tomogram of the subject from data on light scattered by the subject, said optical imaging device comprising:

an optical probe having an elongated flexible insertion unit capable of being introduced into the subject, said optical probe having a light guide including a single mode fiber for emitting low coherence light from an end surface on a distal end of said insertion unit to said subject, and for detecting reflection from said subject;

interference means for causing low coherence light returning from the subject to interfere with a reference beam;

optical probe attachment means provided on an optical path between said optical probe and said interference means;

propagation delay time-varying means connected to said interference means for varying the propagation delay time of the reference beam, depending on the scanning range, in order to scan the interference location axially along the optical axis;

polarization adjustment means provided in at least one place on optical paths including a path from said interference means to said optical probe, and a path from said interference means to said propagation delay time-varying means;

reference reflection means provided close to a distal end of said optical probe insertion unit; and

polarization optimization means for obtaining reflection data from said reference reflection means in the form of an interference intensity signal produced from said interference means, and for setting said polarization adjustment means so that the interference intensity signal may be maximized.

32. An optical imaging device according to claim 31, further comprising scanning emission means including an emission-direction-changing means for changing the optical path of the emission, rotary scanning means for turning an integrated system of said single mode fiber, lenses, and said emission-direction-changing means, and an optical rotary joint for connecting said rotating single mode fiber and said interference means.

33. An optical imaging device according to claim 31, further comprising scanning emission means including an emission-direction-changing means for changing the optical path of the emission, a linear scanning means for scanning an integrated system of said single mode fiber, lenses, and said emission-direction-changing means along the axis of the insertion unit.

34. An optical imaging device according to claim 31, wherein said polarization adjustment means includes at least one optical fiber loop.

35. An optical imaging device according to claim 31, wherein said polarization adjustment means includes at least a ½

wavelength plate and a ¼

wavelength plate.

36. An optical imaging device according to claim 31, said reference reflection means being a scattering object of liquid.

37. An optical imaging device according to claim 31, said reference reflection means being a reflecting or scattering object of solid.

38. An optical imaging device according to claim 31, said reference reflection means being an integrating sphere.

39. An optical imaging device according to claim 31, said reference reflection means being a part of an optical element provided on an optical path from said single mode fiber to said end surface on the distal side of said insertion unit.

40. An optical imaging device according to claim 39, said optical element being one of a surface of a lens, prism, Faraday rotator and optical sheath.

41. An optical imaging device for irradiating a subject with low coherence light to produce a tomogram of the subject from data on light scattered by the subject, said optical imaging device comprising:

light irradiation and reception means for irradiating the subject with low coherence light and for receiving reflections from the subject;

propagation delay time-varying means connected to said light irradiation and reception means for causing the low coherence light returning from the subject to interfere with a reference beam, and for varying the propagation delay time, depending on the scanning range, in order to scan the interference location axially along the optical axis;

said propagation delay time-varying means having a dispersive means, imaging means, and reflection mirror; and

said reflection mirror including a polygonal mirror, wherein the rotation of said polygonal mirror enables scanning the interference location.

42. An optical imaging device according to claim 41, said dispersive means being a grating, said imaging means being a lens, wherein the lens is placed approximately one focal length away from a grating, and the reflection surface of said polygonal mirror is provided approximately one focal length beyond said lens.

43. An optical imaging device according to claim 41, wherein the center of rotation of said polygon mirror is a predetermined distance off the optical axis of said propagation delay time-varying means.

44. An optical imaging device according to claim 41, wherein a rotation reference position detection means is provided on said polygonal mirror.

47. An optical imaging device according to claim 46, wherein said at least one scale indicates an optical length for a refractive index n of approximately 1, and an optical length for a refractive index n of 1.3 to 1.5.

48. An optical imaging device according to claim 46, including a further scale which indicates optical length in the medium in those regions of the image representing the medium, and which indicates optical length in the tissue in those regions of the image representing the tissue.

50. An optical scanning probe unit according to claim 49, wherein said reflection reduction coating is a dielectric multi-layer coating.

51. An optical scanning probe unit according to claim 49, wherein said reflection reduction coating is inside the sheath.

52. An optical scanning probe unit according to claim 49, wherein said reflection reduction coating is outside the sheath.

45. An optical imaging device for irradiating a subject with low coherence light to produce a tomogram of the subject from data on light scattered by the subject, said optical imaging device comprising:

light irradiation and reception means for irradiating the subject with low coherence light and for receiving reflections from the subject;

propagation delay time-varying means connected to said light irradiation and reception means for causing the low coherence light returning from the subject to interfere with a reference beam, and for varying the propagation delay time, depending on a scanning range, in order to scan the interference location axially along the optical axis;

said propagation delay time-varying means having a dispersive means, imaging means, and reflection mirror;

a resonant scanner including said reflection mirror; and

a scanner driver which generates a drive signal for a resonant scanner containing additional one or higher frequency harmonic components.

46. An optical imaging device for irradiating a subject with low coherence light to produce a tomogram of the subject from data on light scattered by the subject, said optical imaging device comprising at least one scale including at least one of a scale indicating an optical length in medium and a scale indicating an optical length in the tissue.

49. An optical scanning probe unit for optical imaging instruments, which forms tomographic images of an object by irradiating low-coherent light on the object and collecting data of light scattered from the object comprising:

a sheath comprising a resin tube having flexibility throughout most of its length and having a tip end formed of material with high light permeability; and

an optical emitter and receiver provided inside said tip end formed of material with high light permeability for emitting the light toward the sheath inside, irradiating the permeated light on the object located outside the sheath, and receiving the light which is at least one of reflected, scattered and excited from the object via the sheath;

wherein at least the part provided with said optical emitter and receiver on the sheath has a reflection reduction coating.

53. An optical scanning probe unit for optical imaging instruments, which forms tomographic images of an object by irradiating low-coherent light on the object and collecting data of light scattered from the object comprising:

a sheath comprising a resin tube having flexibility throughout most of its length;

an optical window at the tip of the said sheath and formed of material with high light permeability; and

an optical emitter and receiver provided inside said optical window for emitting light toward the optical window inside, irradiating the permeated light on the object located outside the optical window, and receiving the light which is one of reflected, scattered and excited from the object via the optical window;

wherein at least a part provided with said optical emitter and receiver on the optical window is a rigid light permeability part.

54. An optical scanning probe unit according to claim 53, wherein said light permeability part includes a glass pipe.

55. An optical scanning probe unit according to claim 53, wherein said light permeability part is rigid plastic.

57. An optical scanning probe unit according to claim 56, wherein said anti-wearable coating includes a ceramic coating.

58. An optical scanning probe unit according to claim 57, wherein said ceramic coating is polysilazane.

60. An optical diagnosis device according to claim 59, wherein the end surfaces of the optical element are non-perpendicular to a flux of the signal light incident on the end surfaces of said optical element.

61. An optical diagnosis device according to claim 59, wherein the optical element with said light gathering effect is a refractive index distribution lens.

62. An optical diagnosis device according to claim 59, wherein at least an optical element with a light gathering effect is provided in said end optical system, and the end surfaces of all the optical elements of said end optical system are slanted to the optical axis of the optical element with said light gathering effect.

63. An optical diagnosis device according to claim 62, wherein the optical element with said light gathering effect is a refractive index distribution lens.

64. An optical diagnosis device according to claim 59, wherein the optical axis of the refractive index distribution lens of the end optical system on the side of the signal light agrees with the optical axis of the single mode fiber, and the end surface on the side of the object of said single mode fiber and the end surface of the optical element in said end optical system on the side of the signal light are wholly slantedly polished in the same direction.

65. An optical diagnosis device according to claim 59, wherein the end surface of the optical element in said end optical system on the side of the signal light satisfies the following conditions 1 and 2:

θ

_f>

arc sin(NA/n) 

 

(Condition

     1) θ

_s≧

θ

_f (s=1, 2, . . . ,m) 

 

(Condition

     2)

where NA represents NA of light radiated into air in case of polishing perpendicularly the end surface of the single mode fiber,

n is the refractive index of the core of the single mode fiber,

θ

_f is the angle of the normal line of the end surface on the side of the object of the single mode fiber to the optical axis of the single mode fiber, and

θ

_s is the angle of the normal line of the end surface that the order is s of the optical element of the end optical system on the side of the signal light to the optical axis of said refractive index distribution lens, and

m is the number of border surfaces of the end optical system on the side of the signal light.

66. An optical diagnosis device according to claim 59, wherein at least an optical element with a light gathering effect is provided in said end optical system on the side of the signal light, and the axis of the single mode fiber is decentered to the optical axis of the optical element with said light gathering effect.

67. An optical diagnosis device according to claim 66, wherein the optical element with said light gathering effect is a refractive index distribution lens.

68. An optical diagnosis device according to claim 66, wherein the end surface on the side of the objective surface of said refractive index distribution lens and the end surfaces of all the optical elements on the side of the object from the refractive index distribution lens are perpendicular to the optical axis of said refractive index distribution lens.

69. An optical diagnosis device according to claim 66, wherein the following conditions 1 and 3 are satisfied.

θ

_f>

airc sin(NA/n) 

 

(Condition

     1) θ

_g≧

θ

_f 

 

(Condition

     3)

where, NA represents NA of light radiated into air in case of polishing perpendicularly the end surface of the single mode fiber,

n is the refractive index of the core of the single mode fiber,

θ

_f is the angle of the normal line of the end surface on the side of the object of the single mode fiber to the optical axis of the single mode fiber, and

θ

_g are angles of the normal line of the end surface on the side of the single mode fiber of the refractive index distribution lens to the optical axis of the refractive index distribution lens and angles of the normal lines of the end surfaces of all the optical elements between the single mode fiber and the refractive index distribution lens to the optical axis of the refractive index distribution lens.

70. An optical diagnosis device according to claim 59, wherein an outermost side of said end optical system on the side of the signal light comprises a sheath, and a flux of light of the signal light incident on said sheath is slantedly incident on the surface of the sheath.

71. An optical diagnosis device according to claim 70, wherein the incident angle of a chief light ray of the signal light incident on the sheath to the normal line of the surface of the sheath is larger than 10°

.

72. An optical diagnosis device according to claim 70, wherein said end optical system on the side of the signal light comprises at least an optical element for deflecting the observing direction by reflecting light, and the deflecting angle of the optical element for deflecting said observing direction is set so that the flux of said signal light is slantedly incident on the surface of the sheath.

56. An optical scanning probe unit for optical imaging instruments, which forms tomographic images of an object by irradiating low-coherent light on the object and collecting data of light scattered from the object comprising:

a sheath comprising a resin tube having flexibility throughout most of the length;

an optical window at the tip of the said sheath and formed of material with high light permeability; and

an optical emitter and receiver provided inside said optical window for emitting light toward the optical window inside, irradiating the permeated light on the object located outside the optical window, and receiving the light which is one of reflected, scattered, or excited from the object via the optical window;

wherein at least a part provided with said optical emitter and receiver inside the optical window has anti-wearable coating.

59. An optical diagnosis device for observing a tomography structure by changing the length of an optical path on the side of a reference light when getting an interference signal by composing the signal light and the reference light again after dividing low coherence light radiated from a light source with short coherence length into a signal light side and a reference light side and irradiating signal light to an observed object, comprising:

an end optical system on the side of the signal light of the optical tomography diagnosis device said end optical system including a plurality of optical elements having end surfaces, wherein;

said side of the signal light includes single mode fiber and the end optical system on the side of the signal light; and

when the number of times of light reflection between said end surfaces of each optical element is less than three times, said reflection light does not return to said single mode fiber.

73. An optical scanning probe device for an optical imaging devise for irradiating low interference light to a subject and constructing a tomographic image of a subject from information of light scattered in the subject, the optical scanning probe devise comprising:

a single mode fiber;

a hollow fiber end matter for inserting and fixing said single mode fiber, the fiber end matter being slantly polished so that an end surface of said single mode fiber and the end surface of the fiber end matter are the same surface;

a GRIN lens contacted with an optical axis agreed with said fiber end matter and slantly polished on the contact surface at least on the side of the fiber end;

an optical system including at least an optical element disposed on the side of another end surface of said GRIN lens, the end optical system, wherein the perpendicular of an outgoing or an incident surface of at least a ray of the optical element in said optical system has the specific angle to an optical flux of signal light; and

means for agreeing with an optical center axis for agreeing and contacting said fiber end matter with the optical center axis of said GRIN lens.

74. An optical scanning probe device according to claim 73, wherein said means for agreeing with the optical center axis includes a pipe matter for contacting by inserting said fiber end matter and said GRIN lens into an inner cavity.

75. An optical scanning probe device according to claim 73, wherein said means for agreeing with a phase of a polishing surface for connecting by agreeing with the phase of a surface slantly polished is provided on the connecting surface between said fiber end matter and said GRIN lens.

76. An optical scanning probe device according to claim 75, wherein said means for agreeing with a phase of a polishing surface includes a window installed on the side surface in the vicinity of connecting said fiber end matter with said GRIN lens in said pipe matter and markings installed respectively on said fiber end matter and said GRIN lens in the vicinity of connecting said fiber end matter with said GRIN lens.

77. An optical scanning probe device according to claim 75, wherein said means for agreeing with a phase of a polishing surface, wherein the form of the inner cavity of said pipe matter is a form except a cylindrical form and the form of the side surface of said fiber end matter and the cross section of the GRIN lens are the same form as said inner cavity.

78. An optical scanning probe device according to claim 77, wherein the forms of the inner cavity of said pipe matter, the side surface of said fiber end matter and the cross section of the GRIN lens are D cut type.

79. An optical scanning probe device according to claim 73, wherein said pipe matter is installed as means for protecting at least an optical element of said optical system on the side of the end rather than the GRIN lens on said pipe matter.

80. An optical scanning probe device for an optical imaging devise for irradiating low interference light to a subject and constructing a tomographic image of a subject from information of light scattered in the subject, the optical scanning probe device comprising:

an elongated and flexible cylindrical sheath having an end which is not open, said sheath having at least a side surface on a side of the end that is formed of a material with good light transmission;

a single mode fiber provided in an inner cavity of said sheath and from which low interference light outgoes;

a lens for collecting the light outgoing from said single mode fiber;

means fixed on said lens for changing the light path of outgoing light in an almost perpendicular direction to the cylindrical surface of the sheath; and

a correcting optical system having positive and negative refractive force in the direction of the specific axis on the cross section of the beam of said outgoing light.

81. An optical scanning probe device according to claim 80, wherein said direction of the specific axis is one of a peripheral direction of a surface of the cylindrical sheath and a longitudinal direction of said sheath.

82. An optical scanning probe device according to claim 81, wherein said correcting optical system has a cylindrical convex lens effect in the direction of said X axis of said beam of the outgoing light, where the peripheral direction of said sheath cylindrical surface to the beam of said outgoing light is the X axis, the direction of the major axis of said sheath being the Y axis.

83. An optical scanning probe device according to claim 82, wherein said correcting optical system has a cylindrical concave lens effect in the direction of said Y axis of said beam of the outgoing light.

84. An optical scanning probe device according to claim 82, wherein said correcting optical system has a cylindrical convex lens effect in the direction of said X axis of said beam of the outgoing light.

85. An optical scanning probe device according to claim 82, wherein said correcting optical system has a cylindrical concave lens effect in the direction of said Y axis of said beam of the outgoing light.

86. An optical scanning probe device according to claim 80, wherein said means for changing the outgoing light path is a prism and said correcting optical system is constructed by a curved surface provided on the prism.

87. An optical scanning probe device according to claim 80, wherein said correcting optical system includes a cylindrical lens.

88. An optical scanning probe device according to claim 80, wherein said lens is a GRIN lens, and said correcting optical system is constructed by rolling the side surface of the major axis of the GRIN lens.

89. An optical scanning probe devise according to claim 80, said means for changing the outgoing light path is a mirror and said correcting optical system includes a curved surface on the mirror.

90. An optical scanning probe device according to claim 80, said correcting optical system including a refractive index distribution board.