Tunable external cavity laser

• US 20030007523A1
• Filed: 03/15/2002
• Published: 01/09/2003
• Est. Priority Date: 07/06/2001
• Status: Active Grant

• Current Assignee: Intel Corporation
• Original Assignee: Intel Corporation
• Inventors: Hand, Carter, Li, Hua, Daiber, Andrew, Maluf, Nadim, Chapman, William B., Farinas, Alejandro
• Granted Patent: US 6,704,332 B2
• Time in Patent Office: Days
• US Class Current: 372/20
• CPC Class Codes: H01S 3/105 by controlling the mutual position or the reflecting properties of the reflectors of the cavity , e.g. by controlling the cavity lengthH01S3/10076, H01S3/13 take precedence
• CPC Class Codes: H01S 3/1055 one of the reflectors being constituted by a diffraction grating
• CPC Class Codes: H01S 3/1062 using a controlled passive interferometer, e.g. a Fabry-Perot etalon
• CPC Class Codes: H01S 5/0222 Gas-filled housings
• CPC Class Codes: H01S 5/0617 using memorised or pre-programmed laser characteristics
• CPC Class Codes: H01S 5/0687 Stabilising the frequency of the laser
• CPC Class Codes: H01S 5/141 using a wavelength selective device, e.g. a grating or etalon H01S5/146 takes precedence

Abstract

External cavity lasers apparatus and methods that allow fast tuning, high wavelength stability, low cavity losses, and form factors that are comparable to solid state, fixed wavelength lasers. The apparatus comprise a gain medium emitting a light beam, a tunable wavelength selection element positioned in the light beam and configured feed back light of a selected wavelength to the gain medium, and a microelectromechanical systems (MEMS) actuator element operatively coupled to the tunable wavelength selection element. The MEMS actuator element may be configured to actuate the tunable wavelength selection element according to a first degree of freedom to select the wavelength of the feedback to the gain medium, and to actuate the actuate the tunable wavelength selection element according to a second degree of freedom to provide phase control of the feedback. The MEMS actuator element and tunable wavelength selection element may additionally be configured such that actuation of the tunable wavelength selection element with respect to a third degree of freedom provides a selectable level of attenuation of the feedback to the gain medium.

Claims

1. An external cavity laser apparatus, comprising:

(a) a gain medium emitting a light beam; and

(b) a tunable element positioned in said light beam and configured to feed back light of a selected wavelength to said gain medium;

(c) said tunable element adjustable according to a first degree of freedom of movement to provide selection of wavelength of said light fed back to said gain medium;

(d) said tunable element adjustable according to a second degree of freedom of movement to provide control of phase of said light fed back to said gain medium;

(e) said tunable element configured such that adjustment of said tunable element for said selection of said wavelength is orthogonal with respect to adjustment of said tunable element for control of said phase.

2. The apparatus of claim 1, further comprising a microelectromechanical system actuator element operatively coupled to said tunable element, said microelectromechanical system actuator element configured to actuate said tunable element according to said first and second degrees of freedom of movement.

3. The apparatus of claim 2, wherein said microelectromechanical system actuator is configured to actuate said tunable wavelength selection element according to a third degree of freedom of movement to provide adjustment of power of said light fed back to said gain medium.

4. The apparatus of claim 1, wherein said tunable wavelength selection element comprises a movable grating, said grating and a facet of said gain medium defining an external laser cavity.

5. The apparatus of claim 4, wherein said microelectromechanical system actuator element is configured to rotate said grating about a first axis to control wavelength of said light fed back to said gain medium by said grating.

6. The apparatus of claim 5, wherein said microelectromechanical system actuator element is configured to translate said grating along a second axis to control length of said external cavity.

7. The apparatus of claim 5, wherein said microelectromechanical system actuator element is configured to rotate said grating about a third axis to control attenuation of said light fed back to said gain medium by said grating.

8. The apparatus of claim 7, wherein said first axis is parallel to a reflective face of said grating.

9. The apparatus of claim 8, wherein said second axis is perpendicular to said reflective face of said grating.

10. The apparatus of claim 9, wherein said third axis is perpendicular to said first axis and said second axis.

11. The apparatus of claim 1, wherein said tunable wavelength selection element comprises a movable mirror and a stationary reflective grating.

12. The apparatus of claim 11, wherein said microelectromechanical system actuator element is configured to rotate said mirror about a first axis to control wavelength of said light fed back to said gain medium.

13. The apparatus of claim 12, wherein said microelectromechanical system actuator element is configured to translate said mirror along a second axis to control external cavity length.

14. The apparatus of claim 12, wherein said microelectromechanical system actuator element is configured to rotate said mirror about a third axis to control attenuation of said light fed back to said gain medium.

15. The apparatus of claim 1, further comprising a filter element positioned in said light beam, said filter element configured to suppress lasing at wavelengths other than said selected wavelength.

16. The apparatus of claim 1, wherein a reflective face of said tunable wavelength selection element and a facet of said grating define an external laser cavity.

17. The apparatus of claim 16, wherein said external laser cavity is dimensioned to define a plurality of external cavity modes, said external cavity modes corresponding to selectable wavelengths.

19. The apparatus of claim 18, wherein said microelectromechanical system actuator is configured to actuate said tunable wavelength selection element according to a third degree of freedom of movement to control power of said light fed back to said gain medium.

20. The apparatus of claim 19, wherein:

(a) said microelectromechanical system actuator is operatively coupled to said grating;

(b) said microelectromechanical system actuator element configured to rotate said grating about a first axis to control said wavelength of said light fed back to said gain medium;

(c) said microelectromechanical system actuator element configured to translate said grating along a second axis to control said length of said external laser cavity; and

(d) said microelectromechanical system actuator element configured to rotate said grating about a third axis to control said power of said light fed back to said gain medium.

21. The apparatus of claim 20, wherein said first axis is parallel to a reflective face of said grating.

22. The apparatus of claim 21, wherein said second axis is perpendicular to said reflective face of said grating.

23. The apparatus of claim 19, wherein:

(a) said tunable wavelength selection element further comprises a mirror, said mirror operatively coupled to said microelectromechanical system actuator;

(b) said microelectromechanical system actuator element configured to rotate said mirror about a first axis to control said wavelength of said light fed back to said gain medium;

(c) said microelectromechanical system actuator element configured to translate said mirror along a second axis to control said length of said external laser cavity; and

(d) said microelectromechanical system actuator element configured to rotate said mirror about a third axis to control said power of said light fed back to said gain medium.

24. The apparatus of claim 23, wherein said first axis is parallel to a reflective face of said grating.

25. The apparatus of claim 24, wherein said second axis is perpendicular to said reflective face of said grating.

26. The apparatus of claim 18, further comprising a filter element positioned in said light beam, said filter element configured to suppress lasing at wavelengths other than said selected wavelength.

27. The apparatus of claim 18, wherein said external laser cavity is dimensioned to define a plurality of external cavity modes, said external cavity modes corresponding to selectable wavelengths.

28. The apparatus of claim 18, wherein said external laser cavity is dimensioned to suppress lasing associated with external cavity modes.

30. The method of claim 29, further comprising coupling said tunable wavelength selection element to a microelectromechanical actuator.

31. The method of claim 30, further comprising adjusting power of said light fed back to said gain medium by positionally adjusting said tunable wavelength selection element, with said microelectromechanical actuator, with respect to a third degree of freedom of movement.

32. The method of claim 31, wherein said positioning a tunable wavelength selection element in said light beam comprises positioning a movable grating in said light beam, said grating and a reflective facet of said gain medium defining an external laser cavity.

33. The method of claim 32, wherein said selecting said wavelength of said light fed back to said gain medium comprises rotatably adjusting said grating, by said microelectromechanical actuator, about a first axis.

34. The method of claim 33, wherein said adjusting said phase of said light fed back to said gain medium comprises adjusting length of said external cavity by translatably adjusting said grating, by said microelectromechanical actuator, along a second axis.

35. The method of claim 34, wherein said adjusting said power of said light fed back to said gain medium comprises rotatably adjusting said grating, by said microelectromechanical actuator, about a third axis.

36. The method of claim 31, wherein said positioning a tunable wavelength selection element in said light beam comprises positioning a movable mirror in said light beam, and positioning a stationary grating in said light beam after said movable mirror, said grating and a reflective facet of said gain medium defining an external laser cavity.

37. The method of claim 36, wherein said selecting said wavelength of said light fed back to said gain medium comprises rotatably adjusting said mirror, by said microelectromechanical actuator, about a first axis.

38. The method of claim 37, wherein said adjusting said phase of said light fed back to said gain medium comprises adjusting length of said external cavity by translatably adjusting said mirror, by said microelectromechanical actuator, along a second axis.

39. The method of claim 38, wherein said adjusting said power of said light fed back to said gain medium comprises rotatably adjusting said mirror, by said microelectromechanical actuator, about a third axis.

40. The method of claim 29, further comprising positioning a filter element in said light beam, said filter element configured to suppress lasing at wavelengths other than a selected wavelength.

18. An external cavity laser apparatus, comprising:

(a) a gain medium having first and second facets and emitting a light beam from said first facet;

(b) a tunable wavelength selection element, said tunable wavelength selection element comprising a grating, said tunable wavelength selection element positioned in said light beam and configured feed back light to said gain medium, said grating and said second facet of said gain medium defining an external laser cavity; and

(c) a microelectromechanical system actuator element operatively coupled to said tunable wavelength selection element;

(d) said microelectromechanical system actuator element configured to actuate said tunable wavelength selection element according to a first degree of freedom of movement to provide selection of wavelength of said light fed back to said gain medium;

(e) said microelectromechanical system actuator configured to actuate said tunable wavelength selection element according to a second degree of freedom of movement to control length of said external laser cavity;

(f) said tunable wavelength selection element configured such that said adjustment of said selection of said wavelength is orthogonal with respect to said adjustment of said phase.

29. A method for laser operation, comprising:

(a) emitting a light beam from a gain medium;

(b) positioning a tunable element in said light beam;

(d) feeding back light to said gain medium by said tunable element;

(e) selecting wavelength of said light fed back to said gain medium by positionally adjusting said tunable element with respect to a first degree of freedom of movement; and

(f) controlling phase of said light fed back to said gain medium by positionally adjusting said tunable element with respect to a second degree of freedom of motion;

(g) said positionally adjusting of said tunable element for selecting said wavelength carried out orthogonally with respect to said positionally adjusting said tunable element for controlling said phase of said light fed back to said gain medium.

41. An laser apparatus, comprising:

(a) gain means for emitting a light beam

(b) tunable means for wavelength selection positioned in said light beam and configured feed back light of a selected wavelength to said gain medium;

(c) microelectromechanical system actuation means for positionally adjusting said tunable means with respect to a first degree of freedom of movement to provide selection of wavelength of said light fed back to said gain medium, and for positionally adjusting said tunable means with respect to a second degree of freedom of movement to provide control of phase of said light fed back to said gain medium;

(d) said tunable means configured such that said adjustment of said tunable means for selection of said wavelength is orthogonal with respect to said adjustment of said tunable means for control of said phase.