Insulated gate field effect transistor and manufacturing thereof
First Claim
1. A method of fabricating an insulated gate field effect transistor, comprising the steps of:
- implanting a first impurity from a main surface of a semiconductor substrate having a first conductive type such that said first impurity reaches a maximum impurity concentration within said semiconductor substrate; and
implanting a second impurity having the first conductive type such that a depth at which said second impurity reaches a maximum impurity concentration substantially matches with a depth at which said first impurity reaches the maximum impurity concentration.
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Abstract
An impurity having a high electrical activation rate is introduced into a channel region, while an In implanted layer is formed in a very shallow region of the channel region. Impurities B, P are re-distributed such that their maximum impurity concentrations are reached at the same depth of a maximum impurity concentration in the In implanted layer, to form channel impurity regions which electrically act as impurities such as B, P, with a similar depth distribution to that of In. The resulting impurity distribution contributes both to the prevention of a punch-through phenomenon and to a large current driving capability of a highly miniaturized complementary MOS transistor.
14 Citations
22 Claims
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1. A method of fabricating an insulated gate field effect transistor, comprising the steps of:
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implanting a first impurity from a main surface of a semiconductor substrate having a first conductive type such that said first impurity reaches a maximum impurity concentration within said semiconductor substrate; and
implanting a second impurity having the first conductive type such that a depth at which said second impurity reaches a maximum impurity concentration substantially matches with a depth at which said first impurity reaches the maximum impurity concentration. - View Dependent Claims (2, 3, 6, 7, 9, 10)
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4. A method of fabricating an insulated gate field effect transistor, comprising the steps of:
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forming a first conductive type region and a second conductive type region on a main surface of the same semiconductor substrate;
implanting a first impurity from the main surface of said semiconductor substrate such that said first impurity reaches a maximum impurity concentration within said semiconductor substrate;
selectively implanting a second impurity having the first conductive type into said first conductive type region such that a depth at which said second impurity reaches a maximum impurity concentration substantially matches with a depth at which said first impurity reaches the maximum impurity concentration; and
selectively implanting a third impurity having a second conductive type into said second conductive type region such that a depth at which said third impurity reaches a maximum impurity concentration matches with the depth at which said first impurity reaches the maximum impurity concentration. - View Dependent Claims (5, 8, 11, 12, 15, 16, 17, 18, 19, 20, 21, 22)
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13. An insulated gate field effect transistor comprising:
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a gate electrode formed on a main surface of a semiconductor substrate having a first conductive type through an insulating film;
a first impurity region formed in a region of said semiconductor substrate beneath said gate electrode; and
a second impurity region having the first conductive type formed in a region of said semiconductor substrate beneath said gate electrode, wherein said first impurity region and said second impurity region distribute such that said first and second impurity regions have their maximum impurity concentrations at the same depth within said semiconductor substrate, and the maximum impurity concentration in said second impurity region is higher than the maximum impurity concentration in said first impurity region.
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14. An insulated gate field effect transistor comprising:
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a first conductive type region, and a second conductive type region having a first conductive type in a main surface region of the same semiconductor substrate;
a gate electrode formed on a main surface of each of said first and second conductive type regions through an insulating film; and
a third impurity region having a second conductive type, wherein said first and second impurity regions distribute in said first conductive type region of said semiconductor substrate beneath said gate electrode such that said first and second impurity regions have their maximum impurity concentrations at the same depth in said semiconductor substrate;
said first and third impurity regions distribute in said second conductive type region of said semiconductor substrate beneath said gate electrode such that said first and third impurity regions distribute such that said first and third impurity regions have their maximum impurity concentrations at the same depth in said semiconductor substrate; and
the maximum impurity concentration in each of said second and third impurity regions is higher than the maximum impurity concentration in said first impurity region.
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Specification