Apparatus for predicting life of rotary machine, equipment using the same, method for predicting life and determining repair timing of the same
First Claim
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1. An apparatus for predicting life of rotary machine comprising a load recipe input module configured to acquire loading conditions of a rotary machine;
- a characterizing feature input module configured to obtain characterizing feature data of said rotary machine; and
a life expectancy prediction module configured to calculate life expectancy of said rotary machine in conformity with said loading conditions and said characterizing feature data.
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Abstract
An apparatus for predicting life expectancy of a rotary machine includes a load recipe input module acquiring loading conditions of a rotary machine; a characterizing feature input module obtaining characterizing feature data of a rotary machine; and a life expectancy prediction module calculating life expectancy of the rotary machine in conformity with the loading conditions and the characterizing feature data.
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Citations
38 Claims
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1. An apparatus for predicting life of rotary machine comprising
a load recipe input module configured to acquire loading conditions of a rotary machine; -
a characterizing feature input module configured to obtain characterizing feature data of said rotary machine; and
a life expectancy prediction module configured to calculate life expectancy of said rotary machine in conformity with said loading conditions and said characterizing feature data. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. Manufacturing equipment comprising
a process controller configured to control a production process; -
a rotary machine configured to process load of said production process; and
a life expectancy prediction controller configured to calculate life expectancy of said rotary machine in conformity with process recipe obtained by said process controller and characterizing feature data obtained from said rotary machine. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A method for predicting life of rotary machine comprising
reading a load recipe of loading conditions of a rotary machine; -
determining whether changes exist for said loading conditions by comparing said load recipe with an already existing load recipe for the process;
employing an already existing determination reference if no changes exist for said loading conditions, and reading in and employing a determination reference accommodating said process conditions if changes exist for said loading conditions instead of said already existing determination reference;
processing time series data by reading in detected characterizing feature data for said rotary machine, which correspond to said determination reference; and
calculating life expectancy of said rotary machine in conformity with said time series data and said determination reference. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30)
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31. A method for determining timing of rotary machine repair comprising
reading a load recipe of loading conditions of a rotary machine; -
determining whether changes exist for said loading conditions by comparing said load recipe with an already existing load recipe for the process;
employing an already existing determination reference if no changes exist for said loading conditions, and reading in and employing a determination reference accommodating said process conditions if changes exist for said loading conditions instead of said already existing determination reference;
processing time series data by reading in detected characterizing feature data for said rotary machine, which correspond to said determination reference;
calculating life expectancy of said rotary machine in conformity with said time series data and said determination reference;
finding stand-by times of the process in a time period until said calculated life expectancy is reached, by a semiconductor production simulator; and
determining a stand-by time, of said found stand-by times, which least affects said process or a time including said stand-by time, to be the replacement or repair time of said rotary machine. - View Dependent Claims (32, 33, 34, 35, 36, 37, 38)
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Specification