MICROCANTILEVER SENSOR
First Claim
1. A microcantilever for detecting at least one analyte comprising:
- a deflectable arm having one end fixedly coupled to a substrate, said arm capable of deflecting responsive to a volumetric change of a subjacent sensing element contacting said arm, and detecting means capable of measuring the deflection of said arm.
2 Assignments
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Accused Products
Abstract
An apparatus and method for sensing chemical and/or biological analytes includes a deflectable arm of a microcantilever formed over and contacting a sensing element. A gaseous or liquid medium which may include the analyte being detected, is introduced to the sensing element. The sensing element undergoes volumetric expansion or contraction in the presence of the analyte sought to be detected, typically by adsorbing the analyte. The volumetric change of the sensing element causes the deflectable arm to deflect. The deflectable arm includes at least one measurable physical property which changes when the arm deflects. Detecting means are provided to measure the change in the physical property to determine the presence and amount of analyte present. An array of microcantilevers in which each microcantilever is dedicated to detecting a particular analyte which may be included in the medium, is also provided.
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Citations
34 Claims
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1. A microcantilever for detecting at least one analyte comprising:
a deflectable arm having one end fixedly coupled to a substrate, said arm capable of deflecting responsive to a volumetric change of a subjacent sensing element contacting said arm, and detecting means capable of measuring the deflection of said arm. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. An array of microcantilevers for detecting analytes, comprising:
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a plurality of discrete sensing elements formed on a surface;
a corresponding plurality of deflectable arms, each having one end fixedly coupled to a substrate and an overhang portion situated superjacent a corresponding sensing element and contacting said corresponding sensing element, each deflectable arm capable of deflecting responsive to a volumetric change in said corresponding sensing element; and
detecting means capable of measuring the deflection of each deflectable arm. - View Dependent Claims (23, 24, 25, 26, 27, 28, 30, 31, 32, 33, 34)
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29. A method for detecting an analyte within a medium, comprising:
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providing a deflectable microcantilever arm having one end fixedly coupled to a substrate, said microcantilever arm disposed in a rest position;
forming a sensing element subjacent said arm and contacting an underside of said arm, said sensing element capable of at least one of vertical swelling and vertical contraction responsive to the presence of said analyte, said vertical swelling causing said microcantilever arm upward deflection and said vertical contraction causing said microcantilever arm downward deflection;
introducing a medium containing said analyte to said sensing element, said medium being one of a liquid and a vapor; and
measuring said deflection of said microcantilever arm.
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Specification