×

Electrostatic chuck with dielectric coating

  • US 20030010292A1
  • Filed: 07/16/2001
  • Published: 01/16/2003
  • Est. Priority Date: 07/16/2001
  • Status: Abandoned Application
First Claim
Patent Images

1. A substrate support comprising:

  • a body having a support surface, a mounting surface disposed opposite the support surface and at least one side separating the support surface and mounting surface;

    one or more conductive members disposed within the body; and

    a dielectric coating disposed on at least the mounting surface.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×