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Stage assembly having a follower assembly

  • US 20030010935A1
  • Filed: 07/11/2001
  • Published: 01/16/2003
  • Est. Priority Date: 07/11/2001
  • Status: Active Grant
First Claim
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1. A stage assembly that moves a device along a Y axis, the stage assembly comprising:

  • a device stage that retains the device;

    a stage mover assembly connected to the device stage, the stage mover assembly moving the device stage along the Y axis; and

    a first follower frame that supports the device stage, the first follower frame moving along the Y axis.

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