Vacuum system central control information server

• US 20030014160A1
• Filed: 09/06/2001
• Published: 01/16/2003
• Est. Priority Date: 07/13/2001
• Status: Active Grant

• Current Assignee: Edwards Vacuum, LLC (Atlas Copco AB)
• Original Assignee: Helix Technology Corporation (Azenta, Inc.)
• Inventors: Hann, John M., Nordquist, John P.
• Granted Patent: US 7,016,751 B2
• Time in Patent Office: Days
• US Class Current: 700/275
• CPC Class Codes: F04B 37/08 by condensing or freezing, e.g. cryogenic pumps
• CPC Class Codes: F04B 49/065 and making use of computers
• CPC Class Codes: G05B 19/0428 Safety, monitoring G05B19/0423 takes precedence
• CPC Class Codes: G05B 2219/24048 Remote test, monitoring, diagnostic
• CPC Class Codes: G05B 2219/31156 Network structure, internet
• CPC Class Codes: G05B 2219/31161 Java programcode or simular active agents, programs, applets
• CPC Class Codes: G05B 2219/31186 TCP-IP internet protocol
• CPC Class Codes: G05B 2219/33284 Remote diagnostic
• CPC Class Codes: G05B 2219/35008 Www cad, world wide design and manufacturing
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

Status information about the vacuum system is received by a server. A portion of the status information is formatted in response to a request from a web browser, and the formatted vacuum system information is forwarded to the web browser. Commands, including parameter values, can are entered by a user from the web browser, and implemented at the server or forwarded to the proper component in the vacuum system. A command or change history log of commands is maintained and forwarded to the web browser upon a request from the web browser. Status information includes information about an on-going regeneration of a pump in the vacuum system. Furthermore, regeneration can be controlled, i.e., started, stopped, parameters adjusted, in response to commands received from the web browser. Plural sets of regeneration parameters can be defined by a user from the web browser, and issued simultaneously to many devices. The vacuum system status information is be compared against one or more alarm definitions to determine whether an alarm exists, i.e., is “active.” Active alarms are sent to the web browser. Furthermore, a historical log of alarms is maintained and a portion of it forwarded to the web browser upon a request for alarm history. Alarms may be enabled or disabled individually by means provided to the browser. Means are provided to the browser to allow a user to specify alarm definitions.

Claims

1. A method for monitoring a vacuum system, comprising:

receiving a request from a client browser for vacuum system status information;

retrieving the requested status information;

formatting the retrieved status information; and

forwarding, as a response to the request from the client browser, the formatted vacuum system information to the client browser.

2. The method of claim 1, wherein retrieving the requested status information comprises:

using a database accessor to access information stored in a database; and

using an equipment accessor to access information directly from vacuum system equipment, the database accessor and equipment accessor using the same format to report the accessed data.

3. The method of claim 2, wherein vacuum system equipment comprises cryopumps.

4. The method of claim 2, wherein vacuum system equipment comprises gauges.

5. The method of claim 2, wherein the format is as an XML recordset.

6. The method of claim 1, wherein the request from the client is an HTTP request.

7. The method of claim 6, wherein the response comprises a screen document which the client browser uses to display a screen.

8. The method of claim 7, wherein the screen document comprises HTML and Javascript.

9. The method of claim 7, wherein the screen document is one of plural screens populated with retrieved data.

10. The method of claim 9, wherein one of the plural screens is a monitor screen which provides real-time status information with respect to the vacuum system equipment.

11. The method of claim 10, wherein the monitor screen is from the group of monitor screens comprising:

a tool monitor screen, a cryopump monitor screen, and a waterpump monitor screen.

12. The method of claim 9, wherein one of the plural screens is an information screen which provides non-real-time status information with respect to the vacuum system equipment.

13. The method of claim 12, wherein the information screen is from the group of information screens comprising:

a tool information screen, a cryopump information screen, and a waterpump information screen.

14. The method of claim 9, wherein one of the plural screens is a regeneration screen which provides pump regeneration information.

15. The method of claim 14, wherein the regeneration screen provides the ability for a user at the client browser to change regeneration parameters for a selected pump.

16. The method of claim 14, wherein the regeneration screen provides the ability for a user at the client browser to start a regeneration.

17. The method of claim 14, wherein the regeneration screen provides the ability for a user at the client browser to abort an on-going regeneration.

18. The method of claim 17, wherein the regeneration screen is from the group of regeneration screens comprising:

a cryopump regeneration screen, and a waterpump regeneration screen.

19. The method of claim 14, wherein the regeneration screen provides the ability for a user at the client browser to define a group of selected pumps, to start regeneration of the group and to stop regeneration of the group.

20. The method of claim 14, wherein the regeneration screen provides the ability for a user to define sets of parameters to be issued simultaneously to plural pumps.

21. The method of claim 9, wherein one of the plural screens is an operating settings screen which provides operating settings.

22. The method of claim 21, wherein operating setting information comprises any settings from the group comprising:

temperature control, power fail temperature, keypad lock, parameter lock and power fail mode.

23. The method of claim 21, wherein the operating settings screen provides the ability for a user to change the operating settings.

24. The method of claim 9, wherein one of the plural screens is a relay parameters screen which provides parameter values for relays within the vacuum system.

25. The method of claim 24, wherein the relay parameters screen provides the ability for a user to modify the relay parameters.

26. The method of claim 9, wherein one of the plural screens is an alarms screen which provides alarm information.

27. The method of claim 26, wherein the alarms screen is an alarms configuration screen which provides the ability for a user to configure alarms.

28. The method of claim 26, wherein the alarms screen is an alarms enable screen which provides the ability for a user to enable and disable alarms.

29. The method of claim 26, wherein the alarms screen is an active alarms screen which provides a list of active alarms, and provides the ability for a user to acknowledge individual active alarms.

30. The method of claim 26, wherein the alarms screen is an alarms history screen which provides a list of past alarms.

31. The method of claim 9, wherein one of the plural screens is a change history screen which provides a list of updates and commands.

32. The method of claim 9, wherein one of the plural screens is a calendar screen which provides a calendar showing, for each day on the calendar, events which occurred on that day.

33. The method of claim 32, wherein the calendar screen provides the ability for a user to select at least one type of event for viewing.

34. The method of claim 32, wherein an event type is from the group consisting of:

alarms, routines and changes.

35. The method of claim 9, wherein one of the plural screens is a data analysis screen which allows a user to view information about regenerations.

36. The method of claim 36, wherein the data analysis screen provides the ability for a user to select for analysis from the group consisting of:

full regenerations, fast regenerations, and all regenerations.

37. The method of claim 9, wherein each screen is associated with a unique screen identifier.

38. The method of claim 37, wherein each logical piece of equipment is associated with a unique serial number identifier (SNID), and a network address.

39. The method of claim 38, wherein a request comprises the screen identifier of the currently displayed screen and the SNIDs of equipment from which data is requested, further comprising:

selecting an accessor responsive to the screen identifier; and

translating each SNID in the request to a network address if the request is processed by an equipment accessor.

40. The method of claim 37, wherein a request comprises a continuing parameter identifying the next screen to be shown at the browser.

41. The method of claim 37, further comprising:

if the request is for an action, selecting an actionator responsive to the screen identifier; and

passing action parameters in the request to the selected actionator, the actionator communicating with the vacuum system to implement the requested action.

42. The method of claim 9, wherein at least one of the plural screens provides the ability for a user to enter notes.

43. The method of claim 1, wherein the client request is an update request, containing at least one parameter value to be updated.

44. The method of claim 1, further comprising:

forwarding a tree document to the client browser, the tree document at the browser displaying the vacuum system in a hierarchical tree, the tree periodically requesting updates.

45. The method of claim 44, wherein the tree document comprises a Java applet and tree updates comprise Javascript scripts which instruct the Java applet how to draw the tree.

46. The method of claim 9, wherein at least one screen comprises plural tabs, each tab associated with a unique tab identifier, wherein a request comprises a tab identifier associated with a selected tab.

47. The method of claim 7, wherein a currently displayed screen is periodically updated automatically according to a defined update period.

48. The method of claim 47, wherein the update period is configurable.

49. The method of claim 47, wherein the update period is about thirty seconds.

50. The method of claim 47, wherein the currently displayed screen is not automatically updated while a user is entering data onto the screen.

51. A monitoring system for monitoring a vacuum system, comprising:

a web module which receives requests from a client browser for vacuum system status information;

a database accessor which accesses requested status information from a database and provides the accessed status information to the web module; and

an equipment accessor which accesses requested status information from the vacuum system and provides the accessed status information to the web module, the database accessor and equipment accessor using the same format to report the accessed status information to the web module,

the web module formatting the retrieved status information and forwarding, as a response to the request from the client browser, the formatted vacuum system information to the client browser.

52. The monitoring system of claim 51, wherein vacuum system equipment comprises cryopumps.

53. The monitoring system of claim 51, wherein vacuum system equipment comprises gauges.

54. The monitoring system of claim 51, wherein the accessors format status information is as XML recordsets.

55. The monitoring system of claim 51, wherein the request from the client is an HTTP request.

56. The monitoring system of claim 55, wherein the response comprises a screen document which the client browser uses to display a screen.

57. The monitoring system of claim 56, wherein the screen document comprises HTML and Javascript.

58. The monitoring system of claim 56, wherein the screen document is one of plural screens populated with retrieved data.

59. The monitoring system of claim 58, wherein one of the plural screens is a monitor screen which provides real-time status information with respect to the vacuum system equipment.

60. The monitoring system of claim 59, wherein the monitor screen is from the group of monitor screens comprising:

a tool monitor screen, a cryopump monitor screen, and a waterpump monitor screen.

61. The monitoring system of claim 58, wherein one of the plural screens is an information screen which provides non-real-time status information with respect to the vacuum system equipment.

62. The monitoring system of claim 61, wherein the information screen is from the group of information screens comprising:

a tool information screen, a cryopump information screen, and a waterpump information screen.

63. The monitoring system of claim 58, wherein one of the plural screens is a regeneration screen which provides pump regeneration information.

64. The monitoring system of claim 63, wherein the regeneration screen provides the ability for a user at the client browser to change regeneration parameters for a selected pump.

65. The monitoring system of claim 63, wherein the regeneration screen provides the ability for a user at the client browser to start a regeneration.

66. The monitoring system of claim 63, wherein the regeneration screen provides the ability for a user at the client browser to abort an on-going regeneration.

67. The monitoring system of claim 66, wherein the regeneration screen is from the group of regeneration screens comprising:

a cryopump regeneration screen, and a waterpump regeneration screen.

68. The monitoring system of claim 63, wherein the regeneration screen provides the ability for a user at the client browser to define a group of selected pumps, to start regeneration of the group and to stop regeneration of the group.

69. The monitoring system of claim 63, wherein the regeneration screen provides the ability for a user to define sets of parameters to be issued simultaneously to plural pumps.

70. The monitoring system of claim 58, wherein one of the plural screens is an operating settings screen which provides operating settings.

71. The monitoring system of claim 70, wherein operating setting information comprises any settings from the group comprising:

temperature control, power fail temperature, keypad lock, parameter lock and power fail mode.

72. The monitoring system of claim 70, wherein the operating settings screen provides the ability for a user to change the operating settings.

73. The monitoring system of claim 58, wherein one of the plural screens is a relay parameters screen which provides parameter values for relays within the vacuum system.

74. The monitoring system of claim 73, wherein the relay parameters screen provides the ability for a user to modify the relay parameters.

75. The monitoring system of claim 58, wherein one of the plural screens is an alarms screen which provides alarm information.

76. The monitoring system of claim 75, wherein the alarms screen is an alarms configuration screen which provides the ability for a user to configure alarms.

77. The monitoring system of claim 75, wherein the alarms screen is an alarms enable screen which provides the ability for a user to enable and disable alarms.

78. The monitoring system of claim 75, wherein the alarms screen is an active alarms screen which provides a list of active alarms, and provides the ability for a user to acknowledge individual active alarms.

79. The monitoring system of claim 75, wherein the alarms screen is an alarms history screen which provides a list of past alarms.

80. The monitoring system of claim 58, wherein one of the plural screens is a change history screen which provides a list of updates and commands.

81. The monitoring system of claim 58, wherein one of the plural screens is a calendar screen which provides a calendar showing, for each day on the calendar, events which occurred on that day.

82. The monitoring system of claim 81, wherein the calendar screen provides the ability for a user to select at least one type of event for viewing.

83. The monitoring system of claim 81, wherein an event type is from the group consisting of:

alarms, routines and changes.

84. The monitoring system of claim 58, wherein one of the plural screens is a data analysis screen which allows a user to view information about regenerations.

85. The monitoring system of claim 84, wherein the data analysis screen provides the ability for a user to select for analysis from the group consisting of:

full regenerations, fast regenerations, and all regenerations.

86. The monitoring system of claim 58, wherein each screen is associated with a unique screen identifier.

87. The monitoring system of claim 86, wherein each logical piece of equipment is associated with a unique serial number identifier (SNID), and a network address.

88. The monitoring system of claim 87, wherein a request comprises the screen identifier of the currently displayed screen and the SNIDs of equipment from which data is requested, further comprising:

an accessor table from which an accessor is selected responsive to the screen identifier; and

a SNID translator used to translate each SNID in the request to a network address if the request is processed by an equipment accessor.

89. The monitoring system of claim 86, wherein a request comprises a continuing parameter identifying the next screen to be shown at the browser.

90. The monitoring system of claim 86, further comprising:

an actionator table from which an actionator is selected responsive to the screen identifier if the request is for an action, the web module passing action parameters in the request to the selected actionator, the actionator communicating with the vacuum system to implement the requested action.

91. The monitoring system of claim 51, wherein the client request is an update request, containing at least one parameter value to be updated.

92. The monitoring system of claim 51, further comprising:

a tree writer which forwards a tree document to the client browser, the tree document at the browser displaying the vacuum system in a hierarchical tree, the tree periodically requesting updates.

93. The monitoring system of claim 92, wherein the tree document comprises a Java applet and tree updates comprise Javascript scripts which instruct the Java applet how to draw the tree.

94. The system of claim 51, further comprising:

a command history log for maintaining a history of action/update requests.

95. The system of claim 51, further comprising:

an alarm analyzer which compares the vacuum system status information with at least one alarm definition to determine whether an alarm exists.

96. The system of claim 95, further comprising:

a historical alarm log for maintaining a history of alarms.