Suitable semiconductor structure for forming multijunction solar cell and method for forming the same

• US 20030015700A1
• Filed: 07/20/2001
• Published: 01/23/2003
• Est. Priority Date: 07/20/2001
• Status: Abandoned Application

• Current Assignee: Motorola, Inc. (Motorola Solutions, Inc.)
• Original Assignee: Motorola, Inc. (Motorola Solutions, Inc.)
• Inventors: Freeburg, Thomas, Prendergast, E. James, Ramdani, Jamal, Eisenbeiser, Kurt W., Droopad, Ravindranath, Ooms, William J.
• Application Number:
  US09/908,860
• Publication Number:
  US 20030015700A1
• Time in Patent Office: Days
• US Class Current: 257/53
• CPC Class Codes: H01L 21/02164 the material being a silicon oxide, e.g. SiO2
• CPC Class Codes: H01L 21/02197 the material having a perovskite structure, e.g. BaTiO3
• CPC Class Codes: H01L 21/02378 Silicon carbide
• CPC Class Codes: H01L 21/02381 Silicon, silicon germanium, germanium
• CPC Class Codes: H01L 21/02395 Arsenides
• CPC Class Codes: H01L 21/02488 Insulating materials
• CPC Class Codes: H01L 21/02543 Phosphides
• CPC Class Codes: H01L 21/02546 Arsenides
• CPC Class Codes: H01L 21/02551 Group 12/16 materials
• CPC Class Codes: H01L 21/31691 with perovskite structure
• CPC Class Codes: H01L 21/8221 Three dimensional integrated circuits stacked in different levels
• CPC Class Codes: H01L 23/66 High-frequency adaptations
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H01L 31/0687 Multiple junction or tandem solar cells
• CPC Class Codes: H01L 31/0693 the devices including, apart from doping material or other impurities, only AIIIBV compounds, e.g. GaAs or InP solar cells
• CPC Class Codes: Y02E 10/544 Solar cells from Group III-V materials
• CPC Class Codes: Y02E 10/547 Monocrystalline silicon PV cells

Abstract

Multijunction solar cell structures (100) including high quality epitaxial layers of monocrystalline semiconductor materials that are grown overlying monocrystalline substrates (102) such as large silicon wafers by forming a compliant substrate for growing the monocrystalline layers are disclosed. One way to achieve the formation of a compliant substrate includes first growing an accommodating buffer layer (104) on a silicon wafer. The accommodating buffer (104) layer is a layer of monocrystalline material spaced apart from the silicon wafer by an amorphous interface layer (112) of silicon oxide. The amorphous interface layer (112) dissipates strain and permits the growth of a high quality monocrystalline oxide accommodating buffer layer. Multiple and varied accommodating buffer layers can be used to achieve the monolithic integration of multiple non-lattice matched solar cell junctions.

Claims

1. A structure for forming a solar cell comprising:

a monocrystalline substrate;

an accommodating buffer layer formed on the substrate;

a first monocrystalline semiconductor layer formed overlying the accommodating buffer layer; and

a second monocrystalline semiconductor layer formed overlying the first monocrystalline semiconductor layer.

2. The semiconductor structure of claim 1, wherein the first and second monocrystalline semiconductor layers each comprise a first type of dopant or second type of dopant.

3. The semiconductor structure of claim 2, wherein the first and second monocrystalline semiconductor layers are each doped with opposite type dopants such that a combination of the first and second monocrystalline layers forms a p-n junction.

4. The semiconductor structure of claim 1, further comprising a template layer formed between the accommodating buffer layer and the first monocrystalline semiconductor layer.

5. The semiconductor structure of claim 1, wherein the template layer comprises a surfactant.

6. The semiconductor structure of claim 5, wherein the surfactant comprises at least one of Al, In, and Ga.

7. The semiconductor structure of claim 5, wherein the template layer further comprises a capping layer.

8. The semiconductor structure of claim 7, wherein the capping layer comprises at least one of As, P, Sb, and N.

9. The semiconductor structure of claim 7, wherein the surfactant comprises Al, the capping layer comprises Al₂Sr, and the first monocrystalline semiconductor layer comprises GaAs.

10. The semiconductor structure of claim 1, wherein the accommodating buffer layer comprises an oxide selected from the group consisting of alkaline earth metal titanates, alkaline earth metal zirconates, alkaline earth metal hafniates, alkaline earth metal tantalates, alkaline earth metal ruthenates, and alkaline earth metal niobates.

11. The semiconductor structure of claim 1, wherein the accommodating buffer layer comprises Sr_xBa_1-xTiO₃ where x ranges from 0 to 1.

12. The semiconductor structure of claim 1, wherein the accommodating buffer layer comprises an oxide formed as a monocrystalline oxide and is subsequently heat treated to convert the monocrystalline oxide to an amorphous oxide.

13. The semiconductor structure of claim 1, further comprising an amorphous oxide layer formed between the first monocrystalline substrate and the accommodating buffer layer.

14. The semiconductor structure of claim 13, wherein the monocrystalline substrate comprises silicon and the amorphous oxide layer comprises a silicon oxide.

15. The semiconductor structure of claim 1, wherein the accommodating buffer layer is conductive.

16. The semiconductor structure of claim 1, wherein the first monocrystalline semiconductor layer is a compound semiconductor material selected from the group consisting of:

III-V compounds, mixed III-V compounds, II-VI compounds, and mixed II-VI compounds.

17. The semiconductor structure of claim 1, wherein the first monocrystalline semiconductor layer comprises a material selected from the group consisting of:

GaAs, AlGaAs, InP, InGaAs, InGaP, InGaAsP, AlInP, and GaInP.

18. The semiconductor structure of claim 3, wherein the first monocrystalline semiconductor layer comprises GaAs of a first dopant type and the second monocrystalline semiconductor layer comprises GaAs of a second dopant type.

19. The semiconductor structure of claim 1, further comprising a plurality of p-n junctions grown on top of the accommodating buffer layer.

20. The semiconductor structure of claim 19, wherein the plurality of p-n junctions comprise semiconductor layers GaAs and GaInP.

21. The semiconductor structure of claim 1, further comprising a p-n junction formed within the monocrystalline substrate.

22. The semiconductor structure of claim 1, further comprising a conductive material layer adjacent and in contact with the monocrystalline substrate.

23. The semiconductor structure of claim 22, wherein the conductive material includes a metal.

24. The semiconductor structure of claim 1, wherein the accommodating buffer layer has a thickness of about 2-10 nm.

25. The semiconductor structure of claim 1, further comprising a microelectronic device formed using the monocrystalline substrate.

26. The semiconductor device of claim 25, wherein the microelectronic device includes a charge controller.

27. The semiconductor device of claim 25, wherein the microelectronic device includes an inverter.

28. The semiconductor structure of claim 20, wherein each of said p-n junctions includes an emitter region and a base region.

29. A multijunction solar cell formed using the structure of claim 19.

30. A structure for forming a solar cell comprising:

a monocrystalline substrate;

a first amorphous oxide layer formed on the substrate;

a monocrystalline semiconductor material of a first type formed overlying the amorphous oxide; and

a monocrystalline semiconductor material of a second type formed over the compound semiconductor material of a first type.

31. The structure of claim 30, wherein the first and second monocrystalline semiconductor layers each comprise a first type of dopant or second type of dopant.

32. The semiconductor structure of claim 31, wherein the first and second monocrystalline semiconductor layers are each doped with opposite type dopants such that a combination of the first and second monocrystalline layers forms a p-n junction.

33. The structure of claim 32, further comprising a multijunction solar cell having a plurality of additional monocrystalline semiconductor layers which form a plurality of additional p-n junctions.

34. The multijunction solar cell of claim 33, further comprising a second amorphous oxide layer.

35. The multijunction solar cell of claim 34, wherein the first and second amorphous oxide layers comprise different materials whose composition depends upon their underlying monocrystalline semiconductor material layer.

36. The multijunction solar cell of claim 35 wherein one of the first and second amorphous oxide layers underlies a GaAs solar cell and comprises Sr_xBa_1-xTiO₃ where x ranges from 0 to 1.

37. The multijunction solar cell of claim 36 wherein the other amorphous oxide layer underlies an InGaAs solar cell and comprises BaZrO₃.

38. The structure of claim 30, wherein the monocrystalline substrate comprises silicon.

39. The structure of claim 30, wherein the monocrystalline substrate comprises a p-n junction.

40. The structure of claim 30, further comprising a conductive layer adjacent and in contact with the monocrystalline substrate.

41. The structure of claim 30, wherein the amorphous oxide layer is monocrystalline.

42. The structure of claim 30, wherein the amorphous oxide layer is conductive.

43. The semiconductor structure of claim 30, further comprising a microelectronic device formed using the monocrystalline substrate.

44. The semiconductor device of claim 43, wherein the microelectronic device includes a charge controller.

45. The semiconductor device of claim 42, wherein the microelectronic device includes an inverter.

46. The semiconductor structure of claim 33, wherein each of said p-n junctions includes an emitter region and a base region.

48. The process of claim 47, wherein the step of providing includes providing a silicon substrate.

49. The process of claim 47, further comprising the step of exposing a portion of the structure to an anneal process to convert the monocrystalline accommodating buffer layer to an amorphous structure.

50. The process of claim 47, further comprising the step of forming an amorphous layer between the accommodating buffer layer and the monocrystalline substrate.

51. The process of claim 47, further comprising the step of growing a second monocrystalline accommodating buffer layer overlying at least one of the monocrystalline semiconductor material layers.

52. The process of claim 51, wherein the step of growing a first monocrystalline accommodating buffer layer comprises growing a layer of Sr_xBa_1-xTiO₃ to accommodate growth of a GaAs monocrystalline semiconductor layer where x ranges from 0 to 1.

53. The process of claim 52, wherein the step of growing a second monocrystalline accommodating buffer layer comprises growing a layer of BaZrO₃ to accommodate growth of an InGaAs monocrystalline semiconductor layer.

47. A process for fabricating a multijunction solar cell structure comprising the steps of:

providing a monocrystalline substrate;

epitaxially growing a first monocrystalline accommodating buffer layer overlying the monocrystalline substrate; and

epitaxially growing a plurality of monocrystalline semiconductor materials over the monocrystalline accommodating buffer layer, wherein the monocrystalline semiconductor materials comprise p-type and n-type materials which are formed to create a plurality of p-n junctions.