Integrated radio frequency , optical, photonic, analog and digital functions in a semiconductor structure and method for fabricating semiconductor structure utilizing the formation of a compliant substrate for materials used to form the same
First Claim
1. A semiconductor structure comprising:
- a monocrystalline silicon substrate;
an amorphous oxide material overlying the monocrystalline silicon substrate on a first side of the semiconductor structure;
a monocrystalline perovskite oxide material overlying the amorphous oxide material;
a monocrystalline compound semiconductor material overlying the monocrystalline perovskite oxide material;
one or more silicon devices formed in the monocrystalline silicon substrate;
one or more compound semiconductor devices formed in the monocrystalline compound semiconductor material;
a metal layer interconnecting at least one compound semiconductor device and at least one silicon device on a surface of the first side of the semiconductor structure with reliable step coverage for the topography of the surface.
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Accused Products
Abstract
High quality epitaxial layers of monocrystalline materials can be grown overlying monocrystalline substrates such as large silicon wafers by forming a compliant substrate for growing the monocrystalline layers. An accommodating buffer layer comprises a layer of monocrystalline oxide spaced apart from the silicon wafer by an amorphous interface layer of silicon oxide. The amorphous interface layer dissipates strain and permits the growth of a high quality monocrystalline oxide accommodating buffer layer. The accommodating buffer layer is lattice matched to both the underlying silicon wafer and the overlying monocrystalline material layer. Any lattice mismatch between the accommodating buffer layer and the underlying silicon substrate is taken care of by the amorphous interface layer. Radio frequency, optical, logic and other circuits in both silicon and compound semiconductor materials may be combined and interconnected in a single semiconductor structure.
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Citations
75 Claims
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1. A semiconductor structure comprising:
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a monocrystalline silicon substrate;
an amorphous oxide material overlying the monocrystalline silicon substrate on a first side of the semiconductor structure;
a monocrystalline perovskite oxide material overlying the amorphous oxide material;
a monocrystalline compound semiconductor material overlying the monocrystalline perovskite oxide material;
one or more silicon devices formed in the monocrystalline silicon substrate;
one or more compound semiconductor devices formed in the monocrystalline compound semiconductor material;
a metal layer interconnecting at least one compound semiconductor device and at least one silicon device on a surface of the first side of the semiconductor structure with reliable step coverage for the topography of the surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 16, 17, 19, 20, 21, 22, 24, 26, 27, 28, 29, 30, 31)
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15. A semiconductor structure comprising:
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a monocrystalline silicon substrate;
an amorphous oxide material overlying the monocrystalline silicon substrate on a first side of the semiconductor structure;
a monocrystalline perovskite oxide material overlying the amorphous oxide material;
a monocrystalline compound semiconductor material overlying the monocrystalline perovskite oxide material;
one or more compound semiconductor devices formed in the monocrystalline compound semiconductor material;
metallization on the first side of the semiconductor structure; and
a via extending through the monocrystalline compound semiconductor material, the monocrystalline perovskite oxide material and the amorphous oxide material to form an electric plane probe in the monocrystalline silicon substrate.
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18. A semiconductor structure comprising:
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a monocrystalline silicon substrate;
an amorphous oxide material overlying the monocrystalline silicon substrate;
a monocrystalline perovskite oxide material overlying the amorphous oxide material;
a monocrystalline compound semiconductor material overlying the monocrystalline perovskite oxide material;
a compound semiconductor light emitting device; and
a compound semiconductor light detecting device conFIG.d to detect light emitted by the light emitting device, forming an optical interconnect of the semiconductor structure.
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23. A semiconductor structure comprising:
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a monocrystalline silicon substrate;
an amorphous oxide material overlying the monocrystalline silicon substrate;
a monocrystalline perovskite oxide material overlying the amorphous oxide material;
a monocrystalline compound semiconductor material overlying the monocrystalline perovskite oxide material;
a compound semiconductor light emitting device formed in the monocrystalline compound semiconductor material; and
a silicon light detecting device formed in the monocrystalline silicon substrate and conFIG.d to detect light emitted by the compound semiconductor light emitting device, forming an optical interconnect of the semiconductor structure.
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25. A semiconductor structure comprising:
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a monocrystalline silicon substrate;
an amorphous oxide material overlying the monocrystalline silicon substrate;
a monocrystalline perovskite oxide material overlying the amorphous oxide material;
a monocrystalline compound semiconductor material overlying the monocrystalline perovskite oxide material;
a compound semiconductor light emitting device formed in the monocrystalline compound semiconductor material;
a compound semiconductor light detecting device formed in the monocrystalline compound semiconductor material; and
an optical waveguide coupled with the compound semiconductor light emitting device and the compound semiconductor light detecting device, forming an optical interconnect.
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32. A semiconductor structure comprising:
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a monocrystalline silicon substrate;
an amorphous oxide material overlying the monocrystalline silicon substrate;
a monocrystalline perovskite oxide material overlying the amorphous oxide material;
a monocrystalline compound semiconductor material overlying the monocrystalline perovskite oxide material;
a bipolar transistor; and
a first transmission line electrically coupled with a base of the bipolar transistor; and
a second transmission line electrically coupled with a collector of the bipolar transistor. - View Dependent Claims (33, 34, 36, 37, 38, 39, 40)
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35. A semiconductor structure comprising:
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a monocrystalline silicon substrate;
an amorphous oxide material overlying the monocrystalline silicon substrate;
a monocrystalline perovskite oxide material overlying the amorphous oxide material;
a monocrystalline compound semiconductor material overlying the monocrystalline perovskite oxide material;
a compound semiconductor transistor formed in the monocrystalline compound semiconductor material;
a first transmission line feeding a gate of the compound semiconductor transistor; and
a second transmission line feed by a drain of the compound semiconductor transistor.
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41. A semiconductor structure operable as an integrated down converter, the semiconductor structure comprising:
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a monocrystalline silicon substrate;
an amorphous oxide material overlying the monocrystalline silicon substrate;
a monocrystalline perovskite oxide material overlying the amorphous oxide material;
a monocrystalline compound semiconductor material overlying the monocrystalline perovskite oxide material;
a compound semiconductor transistor conFIG.d to receive an input signal;
a compound semiconductor oscillator;
a compound semiconductor mixer having a first input coupled with the compound semiconductor transistor and a second input coupled with the a compound semiconductor oscillator and an output;
a filter having an input coupled to the output of the compound semiconductor mixer and an output;
an amplification circuit having an input coupled with the output of the filter; and
a control circuit for controlling operation as an integrated down converter. - View Dependent Claims (42, 43, 44, 45, 46, 48, 49)
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47. A semiconductor structure operable as a transimpedance amplifier, the semiconductor structure comprising:
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a monocrystalline silicon substrate;
an amorphous oxide material overlying the monocrystalline silicon substrate;
a monocrystalline perovskite oxide material overlying the amorphous oxide material;
a monocrystalline compound semiconductor material overlying the monocrystalline perovskite oxide material;
a photodiode coupled with an input of the transimpedance amplifier and formed on a compound semiconductor portion of the semiconductor structure;
first and second amplifiers formed at least in part on a silicon portion of the semiconductor structure, the first amplifier coupled with the photodiode and the second amplifier coupled with an output of the transimpedance amplifier; and
a feedback resistor coupled from the output to the first amplifier.
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50. A semiconductor structure operable as an integrated phase shifter, the semiconductor structure comprising:
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a monocrystalline silicon substrate;
an amorphous oxide material overlying the monocrystalline silicon substrate;
a monocrystalline perovskite oxide material overlying the amorphous oxide material;
a monocrystalline compound semiconductor material overlying the monocrystalline perovskite oxide material;
a plurality of phased array channels, each phased array channel including a compound semiconductor transistor conFIG.d to receive a channel input signal, and a phase shift element. - View Dependent Claims (51, 52, 53, 54, 55, 56, 58, 59, 60)
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57. A semiconductor structure operable as an integrated transceiver, the semiconductor structure comprising:
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a monocrystalline silicon substrate;
an amorphous oxide material overlying the monocrystalline silicon substrate;
a monocrystalline perovskite oxide material overlying the amorphous oxide material;
a monocrystalline compound semiconductor material overlying the monocrystalline perovskite oxide material;
a transmit/receive switch conFIG.d to be coupled with an antenna;
a transmit/receive module coupled with the transmit/receive switch; and
a radio frequency (RF) and intermediate frequency (IF) circuit coupled with the receive module.
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61. A semiconductor structure operable as an optical line amplifier, the semiconductor structure comprising:
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a monocrystalline silicon substrate;
an amorphous oxide material overlying the monocrystalline silicon substrate;
a monocrystalline perovskite oxide material overlying the amorphous oxide material;
a monocrystalline compound semiconductor material overlying the monocrystalline perovskite oxide material;
an input optical waveguide;
an input optical waveguide;
a first multiplexer/demultiplexer coupled with the input optical waveguide;
a second multiplexer/demultiplexer coupled with the output optical waveguide; and
optical amplifiers bi-directionally coupled between the first multiplexer/demultiplexer and the second multiplexer/demultiplexer. - View Dependent Claims (62, 63, 64, 65)
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66. A semiconductor structure operable as a transimpedance amplifier, the semiconductor structure comprising:
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a monocrystalline silicon substrate;
an amorphous oxide material overlying the monocrystalline silicon substrate;
a monocrystalline perovskite oxide material overlying the amorphous oxide material;
a monocrystalline compound semiconductor material overlying the monocrystalline perovskite oxide material;
an integrated optical waveguide conFIG.d to receive a composite optical signal including a plurality of individual optical signals;
an optical demultiplexer coupled with the integrated optical waveguide to separate the individual optical signals;
a plurality of photodetectors conFIG.d to convert the individual optical signals to individual electrical signals; and
an amplification circuit coupled with the plurality of photodetectors. - View Dependent Claims (67, 68, 69, 70, 71)
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72. A semiconductor structure operable as an optical transceiver, the semiconductor structure comprising:
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a monocrystalline silicon substrate;
an amorphous oxide material overlying the monocrystalline silicon substrate;
a monocrystalline perovskite oxide material overlying the amorphous oxide material;
a monocrystalline compound semiconductor material overlying the monocrystalline perovskite oxide material;
an optical to electrical converter circuit;
an electrical to optical converter circuit; and
a controller coupled with the optical to electrical converter circuit and the electrical to optical converter circuit. - View Dependent Claims (73, 74, 75)
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Specification