Electrostatic actuator
First Claim
1. An electrostatic actuator comprising:
- an insulating substrate;
a main electrode installed at a selected region of one surface of the insulating substrate, to which positive charge or negative charge is applied;
an auxiliary actuating part having an auxiliary electrode of which lower surface faces with upper surface of the main electrode, the auxiliary actuating part being installed on the substrate such that a selected region of the auxiliary electrode is moved toward the main electrode by an electrostatic attractive force between the main electrode and the auxiliary electrode if a charge having an opposite polarity to the charge applied to the main electrode is applied to the auxiliary electrode from an outside; and
a main actuating part having an actuating body made of conductor, and of which lower surface faces with upper surface of the auxiliary electrode, the main actuating part being installed on the substrate such that a selected region of the actuating body is moved toward the auxiliary electrode by an electrostatic attractive force between the auxiliary electrode and the actuating body if a charge having an opposite polarity to the charge applied to the auxiliary electrode is applied to the actuating body from the outside.
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Accused Products
Abstract
Disclosed is an electrostatic actuator. A multi-layered auxiliary electrode is further arranged between main electrode and actuating body, and positive charge or negative charge is applied to main electrode, respective auxiliary electrodes, and actuating body such that electrostatic attractive force is generated between auxiliary electrodes adjacent to the main electrode, between adjacent auxiliary electrodes, and between auxiliary electrodes adjacent to the actuating body. According to the invention, distance between the induced charges is shortened, so that electrostatic attractive force therebetween increases, thereby capable of maintaining an actuating range equal to or larger than the conventional electrostatic actuator. The electrostatic actuator according to the present invention can be applied to various MEMS devices, such as an optical switch in which a mirror is formed in the actuator, a radio frequency (RF) switch, or a variable electrostatic capacitor, or the like.
133 Citations
11 Claims
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1. An electrostatic actuator comprising:
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an insulating substrate;
a main electrode installed at a selected region of one surface of the insulating substrate, to which positive charge or negative charge is applied;
an auxiliary actuating part having an auxiliary electrode of which lower surface faces with upper surface of the main electrode, the auxiliary actuating part being installed on the substrate such that a selected region of the auxiliary electrode is moved toward the main electrode by an electrostatic attractive force between the main electrode and the auxiliary electrode if a charge having an opposite polarity to the charge applied to the main electrode is applied to the auxiliary electrode from an outside; and
a main actuating part having an actuating body made of conductor, and of which lower surface faces with upper surface of the auxiliary electrode, the main actuating part being installed on the substrate such that a selected region of the actuating body is moved toward the auxiliary electrode by an electrostatic attractive force between the auxiliary electrode and the actuating body if a charge having an opposite polarity to the charge applied to the auxiliary electrode is applied to the actuating body from the outside. - View Dependent Claims (2, 3, 7)
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4. An electrostatic actuator comprising:
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an insulating substrate;
a main electrode installed at a selected region of one surface of the insulating substrate, to which positive charge or negative charge is applied;
an auxiliary actuating part having an auxiliary electrode of which lower surface faces with upper surface of the main electrode, the auxiliary actuating part being installed on the substrate such that the auxiliary electrode is moved toward the main electrode by an electrostatic attractive force between the main electrode and the auxiliary electrode if a charge having an opposite polarity to the charge applied to the main electrode is applied to the auxiliary electrode from an outside; and
a main actuating part having an actuating body made of conductor, and of which lower surface faces with upper surface of the auxiliary electrode, the main actuating part being installed on the substrate such that the actuating body is moved toward the auxiliary electrode by an electrostatic attractive force between the auxiliary electrode and the actuating body if a charge having an opposite polarity to the charge applied to the auxiliary electrode is applied to the actuating body from the outside. - View Dependent Claims (5, 6)
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8. An electrostatic actuator comprising:
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an insulating substrate;
an auxiliary actuating part having an electrode to which positive charge or negative charge is applied, a first column fixed on the substrate such that one side surface of the first column faces with one side surface of the electrode apart from the first column, and a first elastic body made of conductor connecting a rear end of the electrode with a rear end of the first column; and
a main actuating part made of conductor, having a first actuating body of which both side surfaces are apart from one side surface of the first column and one side surface of the electrode and face with the one side surface of the first column and the one side surface of the electrode, a second actuating body made of conductor, of which one side surface is apart from other side surface of the electrode and faces with the other side surface of the electrode, a second column of which one side surface is apart from other side surface of the first column and faces with the other side surface of the first column, a second elastic body made of conductor connecting a front end of the first actuating body with a front end of the second actuating body, and a third elastic body made of conductor connecting the front end of the first actuating body with a front end of the second column. - View Dependent Claims (9, 10, 11)
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Specification