Sputtering target, method of making same, and high-melting metal powder material
First Claim
1. A method of refining a metal powder comprising the steps of:
- passing a powder metal through a thermal plasma into which a hydrogen gas is introduced; and
performing to high-purify it.
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Abstract
There is provided a method of making a high-melting metal powder which has high purity and excellent formability and, particularly, of a metal powder of spherical particles made of Ta, Ru, etc. having a higher melting point than iron. There is also provided a target of high-melting metal or its alloy, which is made by the sintering under pressure of these powders and which has high purity and a low oxygen concentration and shows high density and a fine and uniform structure. A powder metal material mainly composed of a high-melting metal material is introduced into a thermal plasma into which hydrogen gas has been introduced, thereby to accomplish refining and spheroidizing. Further, an obtained powder is pressed under pressure by hot isostatic pressing, etc.
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Citations
16 Claims
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1. A method of refining a metal powder comprising the steps of:
- passing a powder metal through a thermal plasma into which a hydrogen gas is introduced; and
performing to high-purify it.
- passing a powder metal through a thermal plasma into which a hydrogen gas is introduced; and
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2. A method of making a target comprising the steps of:
- introducing a powder material mainly composed of refractory metal into a thermal plasma, thereby to perform refining and spheroidizing; and
sintering an obtained powder under pressure. - View Dependent Claims (3, 4, 5)
- introducing a powder material mainly composed of refractory metal into a thermal plasma, thereby to perform refining and spheroidizing; and
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6. A sputtering target comprising a sintered powder compact with a relative density of not less than 99%, a purity of not less than 99.999%, and an oxygen concentration of not more than 100 ppm.
- 7. A sputtering target which can be obtained by performing the pressure sintering of the powder obtained by introducing a powder material mainly composed of a refractory metal into a thermal plasma.
- 13. A refractory metal powder material, said powder having a purity of not less than 99.999%, an oxygen concentration of not more than 100 ppm, and having a shape of a sphere or analogous thereto.
Specification