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Sputtering target, method of making same, and high-melting metal powder material

  • US 20030019326A1
  • Filed: 08/21/2002
  • Published: 01/30/2003
  • Est. Priority Date: 07/07/1999
  • Status: Active Grant
First Claim
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1. A method of refining a metal powder comprising the steps of:

  • passing a powder metal through a thermal plasma into which a hydrogen gas is introduced; and

    performing to high-purify it.

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